Provided herein are methods, systems, and device for control, delivery, and purification of low vapor pressure gases in conjunction with carrier gas in micro-electronics and other critical process applications. The present invention is based on the observation that when temperature and pressure of a device for delivering a gas stream are held constant, the concentration of vapor in the gas stream may be modulated based on the level of liquid within the chamber thereof.

Provided herein are methods, systems, and apparatus for inhibiting decomposition of hydrogen peroxide gas through use of surface modification of production and delivery components.

An on-demand vapour generator includes a vapour chamber configured to produce a vapour and a vapour absorption assembly configured to receive flows of vapour from the vapour chamber. The vapour absorption assembly includes a first vapour-permeable passage having a passage outlet and at least one second vapour-permeable passage that is closed. When vapour absorption assembly receives a flow of vapour from the vapour chamber, the flow of vapour passes through the first vapour-permeable passage to the passage outlet at least substantially without absorption of vapour from the flow of vapour. However, when a flow of vapour is not received from the vapour chamber, vapour entering the vapour absorption assembly from the vapour chamber passes into the first vapour-permeable passage and the at least one second vapour-permeable passage and is at least substantially absorbed.

An ultrafine bubble generating apparatus and an ultrafine bubble generating method capable of efficiently generating an ultrafine bubble-containing liquid with high purity are provided. In order to this, a heating element provided in a liquid is caused to generate heat, and film boiling is made on an interface between the liquid and the heating element. A film boiling bubble is generated by the film boiling, and ultrafine bubbles are thus generated near the film boiling bubble.

An ultrafine bubble generating apparatus and an ultrafine bubble generating method capable of efficiently generating an ultrafine bubble-containing liquid with high purity are provided. In order to this, a heating element provided in a liquid is caused to generate heat, and film boiling is made on an interface between the liquid and the heating element. A film boiling bubble is generated by the film boiling, and ultrafine bubbles are thus generated near the film boiling bubble.

An ultrafine bubble generating apparatus that generates ultrafine bubbles by causing a heating element to generate film boiling in a liquid includes: an element substrate including a heating part provided with multiple heating elements, in which the element substrate is configured to suppress variation of energies inputted to the heating elements in the heating part.

An ultrafine bubble generating apparatus that generates ultrafine bubbles by causing a heating element to generate film boiling in a liquid includes: an element substrate including a heating part provided with multiple heating elements, in which the element substrate is configured to suppress variation of energies inputted to the heating elements in the heating part.

Provided is an UFB generating apparatus and an UFB generating method capable of efficiently generating an UFB-containing liquid with high purity. To this end, the ultrafine bubble generating apparatus includes a pre-processing unit that performs predetermined pre-processing on a liquid W and a generating unit that generates ultrafine bubbles in the liquid on which the pre-processing is performed. The generating unit generates the ultrafine bubbles by causing a heating element, which is provided in the liquid on which the pre-processing is performed, to generate heat to generate film boiling on an interface between the liquid and the heating element.

Provided is an UFB generating apparatus and an UFB generating method capable of efficiently generating an UFB-containing liquid with high purity. To this end, the ultrafine bubble generating apparatus includes a pre-processing unit that performs predetermined pre-processing on a liquid W and a generating unit that generates ultrafine bubbles in the liquid on which the pre-processing is performed. The generating unit generates the ultrafine bubbles by causing a heating element, which is provided in the liquid on which the pre-processing is performed, to generate heat to generate film boiling on an interface between the liquid and the heating element.

Provided are an ultrafine bubble generating apparatus and an ultrafine bubble generating method that can efficiently generate a UFB-containing liquid with high purity and can extend lifetime of the apparatus additionally. To this end, a shape of a bubble during generation thereof is partially restricted by forming walls around a heating element, and a position in which the bubble disappears is displaced from a position of the heating element.