Methods and apparatus for vaporizing liquid into the surrounding environment, including directing liquid from a liquid source to a vaporization port where the vaporization port has lateral dimensions varying from 10 um to 300 um, applying heat to the liquid in the vaporization port with an at least one heating element located in thermal communication to the vaporization port, and releasing vaporized liquid from the vaporization port into the surrounding environment so that fluid is transported through the depth of the structure.

Provided are a method for producing an ultra-fine bubble-containing liquid, an ultra-fine bubble-containing liquid, and a method for utilizing and a device for utilizing ultra-fine bubbles that allow highly concentrated UFBs to be maintained for a long period of time and that are capable of effectively utilizing the UFBs. To this end, the method for producing an ultra-fine bubble-containing liquid includes an ultra-fine bubble generating step and a dispersing step to disperse the ultra-fine bubbles. In the ultra-fine bubble generating step, the ultra-fine bubbles are generated in a liquid by heating a heating element and making film boiling on an interface between the liquid and the heating element. In the dispersing step, a floc, which includes two or more ultra-fine bubbles, is dispersed into multiple ultra-fine bubbles by applying vibration to the liquid in which the floc floats.

Provided are a method for producing an ultra-fine bubble-containing liquid, an ultra-fine bubble-containing liquid, and a method for utilizing and a device for utilizing ultra-fine bubbles that allow highly concentrated UFBs to be maintained for a long period of time and that are capable of effectively utilizing the UFBs. To this end, the method for producing an ultra-fine bubble-containing liquid includes an ultra-fine bubble generating step and a dispersing step to disperse the ultra-fine bubbles. In the ultra-fine bubble generating step, the ultra-fine bubbles are generated in a liquid by heating a heating element and making film boiling on an interface between the liquid and the heating element. In the dispersing step, a floc, which includes two or more ultra-fine bubbles, is dispersed into multiple ultra-fine bubbles by applying vibration to the liquid in which the floc floats.

Provided is a generating method for generating an ultra-fine bubble-containing liquid in which multiple types of UFB s of different gas components are mixed at a desired concentration ratio, and a manufacturing apparatus for a liquid containing ultra-fine bubbles. Multiple types of UFB-containing liquids are generated for each gas contained by the UFBs, and the UFB-containing liquids are mixed with each other based on a mix proportion of a desired UFB concentration.

Provided is a generating method for generating an ultra-fine bubble-containing liquid in which multiple types of UFB s of different gas components are mixed at a desired concentration ratio, and a manufacturing apparatus for a liquid containing ultra-fine bubbles. Multiple types of UFB-containing liquids are generated for each gas contained by the UFBs, and the UFB-containing liquids are mixed with each other based on a mix proportion of a desired UFB concentration.

Provided is a vaporizer capable of reducing the occurrence of bumping in a vaporization space and thereby minimizing the pressure fluctuations therein, when a method not using an atomizer is employed. A vaporizer (1) includes a tank body (10), a porous member (30) disposed in the vaporizer (1) and heated, a supply tube (40) configured to supply a liquid material (L) to the porous member (30), and a gas discharge passage (7) configured to discharge a source gas (G) produced by vaporizing the liquid material (L) to the outside. An outlet (41) of the supply tube (40) is disposed in contact with or in close proximity to the porous member (30). When the outlet (41) is disposed in close proximity to the porous member (30), a separation distance (H) between the outlet (41) and the porous member (30) is not greater than a distance from the outlet (41) to a bottom of a droplet of the liquid material (L) formed and suspended at the outlet (41) by surface tension.

The present disclosure provides a method for stably supplying a highly pure n-butylamine gas having a constant composition. The present disclosure is a composition supply method including: a filling step of filling a container with a composition containing n-butylamine in an amount of 99.5% by volume or more and isobutylamine in an amount of 0.001% by volume or more and 0.5% by volume or less; a warming step of warming the container filled with the composition to 50° C. or higher; and a gas supply step of supplying a gas containing n-butylamine and isobutylamine from the warmed container to a predetermined device.

Methods for the gas-phase delivery of gases, such as process gases, from the gas phase of a multicomponent source liquid are provided. The methods are generally directed to the generation of process gases having mass flow rates which are proportional to the input power delivered to the multicomponent source liquid containers. The methods may be used to deliver process gases to critical process applications.

A thermodenuder having a main tube with an outer wall, and a heater (23) arranged within the main tube. The heater is arranged in the center of a cross section through the main tube and is spaced apart from the outer wall of the main tube. The main tube has a main axis of extension, and the heater extends parallel to the main axis. The main tube has two openings that are arranged at opposing side faces of the main tube. A channel for an aerosol is arranged within the main tube between the heater and the outer wall and between the two openings. Furthermore, a method for removing semi-volatile material and semi-volatile particles from an aerosol is provided.

A thermodenuder having a main tube with an outer wall, and a heater (23) arranged within the main tube. The heater is arranged in the center of a cross section through the main tube and is spaced apart from the outer wall of the main tube. The main tube has a main axis of extension, and the heater extends parallel to the main axis. The main tube has two openings that are arranged at opposing side faces of the main tube. A channel for an aerosol is arranged within the main tube between the heater and the outer wall and between the two openings. Furthermore, a method for removing semi-volatile material and semi-volatile particles from an aerosol is provided.