An apparatus is for trapping multiple reaction by-products for a semiconductor process, in which a trapping region is divided by a difference in vertical temperature distribution according to a distance spaced apart from a heater and by structures for switching flow path directions and generating multiple vortices using a trapping structure, and reaction by-product mixtures contained in a gas, which is discharged after a process of depositing multiple different thin film layers is performed in a process chamber during a semiconductor manufacturing process, is trapped by a single trapping apparatus, such that a reaction by-product, which is aggregated in the form of a thin film in a relatively high-temperature region, is trapped by a first trapping part in an upper region, and a reaction by-product, which is aggregated in the form of powder in a relatively low-temperature region, is trapped by a second trapping part in a lower region.

This disclosure provides an integrated system and method for producing purified water, hydrogen, and oxygen from contaminated water. The contaminated water may be derived from regolith-based resources on the moon, Mars, near-Earth asteroids, or other destination in outer space. The integrated system and method utilize a cold trap to receive the contaminated water in a vapor phase and selectively freeze out water from one or more volatiles. A heat source increases temperature in the cold trap to vaporize the frozen contaminated water to produce a gas stream of water vapor and volatiles. A chemical scrubber may remove one or more volatiles. The integrated system and method utilize ionomer membrane technology to separate the water vapor from remaining volatiles. The water vapor is delivered for crew use or delivered to an electrolyzer to produce hydrogen and oxygen.

This disclosure provides an integrated system and method for producing purified water, hydrogen, and oxygen from contaminated water. The contaminated water may be derived from regolith-based resources on the moon, Mars, near-Earth asteroids, or other destination in outer space. The integrated system and method utilize a cold trap to receive the contaminated water in a vapor phase and selectively freeze out water from one or more volatiles. A heat source increases temperature in the cold trap to vaporize the frozen contaminated water to produce a gas stream of water vapor and volatiles. A chemical scrubber may remove one or more volatiles. The integrated system and method utilize ionomer membrane technology to separate the water vapor from remaining volatiles. The water vapor is delivered for crew use or delivered to an electrolyzer to produce hydrogen and oxygen.

A device and method for carbon dioxide capture using circumscribed hollow membranes is disclosed. The device includes a hollow membrane unit having an inner conduit composed of a vapor membrane, and an outer conduit having an inside surface circumscribing the inner conduit forming a lumen. The outer conduit includes a CO.sub.2 pump membrane. The device also includes a mechanical pump maintaining a pressure differential between the lumen and the atmosphere, providing a product stream of CO.sub.2-rich gas from the lumen. The vapor membrane is sufficiently hydrophobic and porous to contain liquid water while also allowing water vapor formed by evaporation to pass through into the lumen. As water vapor passes from the lumen to the atmosphere through the CO.sub.2 pump membrane, a carbon concentration gradient is formed and maintained across the CO.sub.2 pump membrane. The carbon concentration gradient actively pumps CO.sub.2 out of the atmosphere and into the lumen.

A device and method for carbon dioxide capture using circumscribed hollow membranes is disclosed. The device includes a hollow membrane unit having an inner conduit composed of a vapor membrane, and an outer conduit having an inside surface circumscribing the inner conduit forming a lumen. The outer conduit includes a CO.sub.2 pump membrane. The device also includes a mechanical pump maintaining a pressure differential between the lumen and the atmosphere, providing a product stream of CO.sub.2-rich gas from the lumen. The vapor membrane is sufficiently hydrophobic and porous to contain liquid water while also allowing water vapor formed by evaporation to pass through into the lumen. As water vapor passes from the lumen to the atmosphere through the CO.sub.2 pump membrane, a carbon concentration gradient is formed and maintained across the CO.sub.2 pump membrane. The carbon concentration gradient actively pumps CO.sub.2 out of the atmosphere and into the lumen.

A purification system for nitrogen gas and xenon gas in water and a static isotopic analysis method thereof are provided. The system includes a sample container, a carbon dioxide ice cold trap, a gas delivery main pipe and a mass spectrometer for noble gas communicated sequentially. The gas delivery main pipe is provided with branch pipelines communicated with a cryo pump and a vacuum pump set respectively, the mass spectrometer for noble gas is communicated with the vacuum pump set, and the cryo pump adsorbs or releases nitrogen gas and/or xenon gas by setting different temperatures of the cryo pump. Inlet and outlet sides of the carbon dioxide ice cold trap are respectively provided with a first valve and a second valve. Fourth and fifth valves are respectively disposed between the gas delivery main pipe and the vacuum pump set, and between the gas delivery main pipe and the cryo pump.

A purification system for nitrogen gas and xenon gas in water and a static isotopic analysis method thereof are provided. The system includes a sample container, a carbon dioxide ice cold trap, a gas delivery main pipe and a mass spectrometer for noble gas communicated sequentially. The gas delivery main pipe is provided with branch pipelines communicated with a cryo pump and a vacuum pump set respectively, the mass spectrometer for noble gas is communicated with the vacuum pump set, and the cryo pump adsorbs or releases nitrogen gas and/or xenon gas by setting different temperatures of the cryo pump. Inlet and outlet sides of the carbon dioxide ice cold trap are respectively provided with a first valve and a second valve. Fourth and fifth valves are respectively disposed between the gas delivery main pipe and the vacuum pump set, and between the gas delivery main pipe and the cryo pump.

Methods and systems for separating liquid components are disclosed. A vessel is provided containing a solids conveyance device. At least a first portion of the vessel acts as an indirect-contact heat exchanger and a second portion of the vessel contains a filter. A process liquid stream, containing a first component and a second component, is passed into the first portion of the vessel. A portion of the second component is frozen and entrained in the first portion of the vessel into the process liquid stream, resulting in a process slurry stream. The process slurry stream is passed into a second portion of the vessel by the solids conveyance device. The process slurry stream is separated into a solid product stream and a primary liquid product stream by passing the primary liquid product stream through the filter and out of the vessel while separately removing the solid product stream out of the vessel.

Methods and systems for separating liquid components are disclosed. A vessel is provided containing a solids conveyance device. At least a first portion of the vessel acts as an indirect-contact heat exchanger and a second portion of the vessel contains a filter. A process liquid stream, containing a first component and a second component, is passed into the first portion of the vessel. A portion of the second component is frozen and entrained in the first portion of the vessel into the process liquid stream, resulting in a process slurry stream. The process slurry stream is passed into a second portion of the vessel by the solids conveyance device. The process slurry stream is separated into a solid product stream and a primary liquid product stream by passing the primary liquid product stream through the filter and out of the vessel while separately removing the solid product stream out of the vessel.

A cryopump includes a cryopanel, a main body, and a baffle plate. The cryopanel is connected to a refrigerator. The main body accommodates the cryopanel. The baffle plate is located in a gas inlet of the main body. The baffle plate includes a first portion and a second portion. The first portion includes a center of the baffle plate and a first hole extending through the baffle plate. The second portion includes an edge of the baffle plate and a second hole extending through the baffle plate. The second portion has a greater conductance than the first portion.