A method of regenerating a cryopump includes a first discharging process that includes alternately evacuating a cryopump housing and supplying a purge gas in a first pressure range, and a second discharging process that includes evacuating the cryopump housing to a low pressure region below the first pressure range. The second discharging process includes making a determination at least once in the low pressure range as to whether the second discharging process should be terminated, and supplying the purge gas to the cryopump housing prior to a first-time determination as to whether the second discharging process should be terminated.

A method of regenerating a cryopump includes a first discharging process that includes alternately evacuating a cryopump housing and supplying a purge gas in a first pressure range, and a second discharging process that includes evacuating the cryopump housing to a low pressure region below the first pressure range. The second discharging process includes making a determination at least once in the low pressure range as to whether the second discharging process should be terminated, and supplying the purge gas to the cryopump housing prior to a first-time determination as to whether the second discharging process should be terminated.

A continuous vacuum fractionation system for separation of one or more of the plurality of components present in a raw cannabis extract into at least an overhead fraction, a bottoms fraction, and a side stream fraction, wherein the raw cannabis extract may be prepared by any of a variety of extraction techniques. The system includes an extract supply assembly having a primary feed pump, and one or more continuous fractionation units each including a modular fractionation column. Each column has a re-boiler, a close-coupled overhead condenser, and at least one modular fractionation stage, and further, the columns are operable in either series or parallel configurations. The close-coupled overhead condenser has an oversized impingement plate overlying a condenser inlet to minimize non-vapor components from entering and contacting the condenser. A vacuum assembly is provided to maintain at least the modular fractionation columns under a predetermined vacuum during operation.

A continuous vacuum fractionation system for separation of one or more of the plurality of components present in a raw cannabis extract into at least an overhead fraction, a bottoms fraction, and a side stream fraction, wherein the raw cannabis extract may be prepared by any of a variety of extraction techniques. The system includes an extract supply assembly having a primary feed pump, and one or more continuous fractionation units each including a modular fractionation column. Each column has a re-boiler, a close-coupled overhead condenser, and at least one modular fractionation stage, and further, the columns are operable in either series or parallel configurations. The close-coupled overhead condenser has an oversized impingement plate overlying a condenser inlet to minimize non-vapor components from entering and contacting the condenser. A vacuum assembly is provided to maintain at least the modular fractionation columns under a predetermined vacuum during operation.

Disclosed is a gas collection apparatus used in manufacturing a semiconductor. The apparatus includes: a housing having a chamber formed therein; a heating member installed in the housing to heat cobalt-carbon gas introduced into the chamber; a cobalt deposition member installed across the chamber of the housing to deposit cobalt composite; and a cooling member that induces carbon composite to be solidified and deposited while rapidly cooling the carbon composite.

Disclosed is a gas collection apparatus used in manufacturing a semiconductor. The apparatus includes: a housing having a chamber formed therein; a heating member installed in the housing to heat cobalt-carbon gas introduced into the chamber; a cobalt deposition member installed across the chamber of the housing to deposit cobalt composite; and a cooling member that induces carbon composite to be solidified and deposited while rapidly cooling the carbon composite.

A terpene extraction system and method for efficiently extracting valuable terpenes from biological material, such as hemp. The terpene extraction system and method generally includes a fluid-bed mixer having a vessel, wherein the vessel can hold a vacuum and contain microwaves such that microwaves and vacuum can be applied to biological material in the vessel. The system also may include a microwave generator adapted to provide microwave radiation to the vessel, and one or more paddles adapted to move within the vessel, such that the paddle can agitate the biological material in the vessel and create a fluid bed. The system also includes a cold trap assembly in fluid communication with the vessel; and a vacuum pump in fluid communication with the vessel and the cold trap assembly, such that the vacuum pump can create a vacuum in the vessel by drawing vapor through the cold trap assembly.

A terpene extraction system and method for efficiently extracting valuable terpenes from biological material, such as hemp. The terpene extraction system and method generally includes a fluid-bed mixer having a vessel, wherein the vessel can hold a vacuum and contain microwaves such that microwaves and vacuum can be applied to biological material in the vessel. The system also may include a microwave generator adapted to provide microwave radiation to the vessel, and one or more paddles adapted to move within the vessel, such that the paddle can agitate the biological material in the vessel and create a fluid bed. The system also includes a cold trap assembly in fluid communication with the vessel; and a vacuum pump in fluid communication with the vessel and the cold trap assembly, such that the vacuum pump can create a vacuum in the vessel by drawing vapor through the cold trap assembly.

Systems and methods for improving the performance of dilution refrigeration systems are described. Filters and traps employed in the helium circuit of a dilution refrigerator may be modified to improve performance. Some traps may be designed to harness cryocondensation as opposed to cryoadsorption. A cryocondensation trap employs a cryocondensation surface having a high thermal conductivity and a high specific heat with a binding energy that preferably matches at least one contaminant but does not match helium. Multiple traps may be coupled in series in the helium circuit, with each trap designed to trap a specific contaminant or set of contaminants. Both cryocondensation and cryoadsorption may be exploited among multiple traps.

Systems and methods for improving the performance of dilution refrigeration systems are described. Filters and traps employed in the helium circuit of a dilution refrigerator may be modified to improve performance. Some traps may be designed to harness cryocondensation as opposed to cryoadsorption. A cryocondensation trap employs a cryocondensation surface having a high thermal conductivity and a high specific heat with a binding energy that preferably matches at least one contaminant but does not match helium. Multiple traps may be coupled in series in the helium circuit, with each trap designed to trap a specific contaminant or set of contaminants. Both cryocondensation and cryoadsorption may be exploited among multiple traps.