An MBE system is disclosed for eliminating the excess flux in an MBE growth chamber before growth, during growth or growth interruption, and/or after growth by evaporating getter material from an effusion evaporator to the cold panel. The cold panel can be the cryopanel of the MBE growth chamber or a cold panel in an attached chamber. Said MBE system includes the cyropanel in the MBE growth chamber or a cold panel in the chamber attached to the MBE growth chamber. With a proper process such as cooling the cold panel, loading a substrate for the MBE process, providing necessary flux for the MBE growth, heating the effusion evaporator and opening the shutter for the evaporator to get the getter material flux onto the said panel, the excess flux will be eliminated. The cross contamination of the grown layer is then avoided.

An MBE system is disclosed for eliminating the excess flux in an MBE growth chamber before growth, during growth or growth interruption, and/or after growth by evaporating getter material from an effusion evaporator to the cold panel. The cold panel can be the cryopanel of the MBE growth chamber or a cold panel in an attached chamber. Said MBE system includes the cyropanel in the MBE growth chamber or a cold panel in the chamber attached to the MBE growth chamber. With a proper process such as cooling the cold panel, loading a substrate for the MBE process, providing necessary flux for the MBE growth, heating the effusion evaporator and opening the shutter for the evaporator to get the getter material flux onto the said panel, the excess flux will be eliminated. The cross contamination of the grown layer is then avoided.

Disclosed is a gas collection apparatus used in manufacturing a semiconductor. The apparatus includes: a housing having a chamber formed therein; a heating member installed in the housing to heat cobalt-carbon gas introduced into the chamber; a cobalt deposition member installed across the chamber of the housing to deposit cobalt composite; and a cooling member that induces carbon composite to be solidified and deposited while rapidly cooling the carbon composite.

Disclosed is a gas collection apparatus used in manufacturing a semiconductor. The apparatus includes: a housing having a chamber formed therein; a heating member installed in the housing to heat cobalt-carbon gas introduced into the chamber; a cobalt deposition member installed across the chamber of the housing to deposit cobalt composite; and a cooling member that induces carbon composite to be solidified and deposited while rapidly cooling the carbon composite.

A cryopump has a cryogenic refrigerator with cold and colder stages that cool a radiation shield, a primary cryopumping array and a frontal array. The frontal array is coupled to the cold stage and is spaced from and wrapped around the frontally facing envelope of the primary cryopumping array. The frontal array may be recessed from the frontal opening and closer to the primary cryopumping array than to the frontal opening.

A cryopump has a cryogenic refrigerator with cold and colder stages that cool a radiation shield, a primary cryopumping array and a frontal array. The frontal array is coupled to the cold stage and is spaced from and wrapped around the frontally facing envelope of the primary cryopumping array. The frontal array may be recessed from the frontal opening and closer to the primary cryopumping array than to the frontal opening.

A terpene extraction system and method of extracting terpenes from plant biomass are described. The plant biomass is derived from a cannabis source plant, as one example source plant. A reactor assembly and one or more cold traps can be a part of the system, and can be involved in the method. The reactor assembly has a housing that receives the plant biomass, and has an agitator that moves the plant biomass in the housing, per an example. The cold trap(s) is situated downstream of the reactor assembly. A heater and a vacuum pump can also be part of the terpene extraction system, and can be involved in the method.

A terpene extraction system and method of extracting terpenes from plant biomass are described. The plant biomass is derived from a cannabis source plant, as one example source plant. A reactor assembly and one or more cold traps can be a part of the system, and can be involved in the method. The reactor assembly has a housing that receives the plant biomass, and has an agitator that moves the plant biomass in the housing, per an example. The cold trap(s) is situated downstream of the reactor assembly. A heater and a vacuum pump can also be part of the terpene extraction system, and can be involved in the method.

A process to transform spent cannabis biomass into activated carbon via a treatment involving a chemical activation process. The spent cannabis biomass is mixed with an activating agent and then subjected to a heat treatment. The spent cannabis biomass is heated in stages, the first to remove water and volatile components, and the second to reclaim leftover cannabinoids. During a third, higher temperature stage, the biomass is converted to activated carbon.

A process to transform spent cannabis biomass into activated carbon via a treatment involving a chemical activation process. The spent cannabis biomass is mixed with an activating agent and then subjected to a heat treatment. The spent cannabis biomass is heated in stages, the first to remove water and volatile components, and the second to reclaim leftover cannabinoids. During a third, higher temperature stage, the biomass is converted to activated carbon.