The present disclosure relates to an apparatus for trapping a reaction by-product created by an etching process, the apparatus being configured to trap a reaction by-product contained in an unreacted gas discharged after a process is performed in an etching process chamber during a semiconductor manufacturing process, trap and stack the reaction by-product in the form of powder at a position between a vacuum pump and a scrubber through multiple flow path switching structures, multiple trapping structures, and multiple stacking structures, and discharge only a gaseous unreacted gas to the scrubber.

An apparatus for removing debris from the intake of an engine includes an air cleaner housing with an inlet opening, an air entry cavity, one or more turbulent flow tubes, and at least one outlet opening. The inlet opening in the air cleaner housing is configured to receive an incoming flow of air from a blower. The air entry cavity is coupled with the inlet opening of the air cleaner housing. The one or more turbulent flow tubes configured to divide the flow of air from the air entry cavity and remove debris from the flow of air. The at least one outlet opening in the air cleaner housing is coupled to the one or more turbulent flow tubes and configured to expel the debris from the air cleaner housing. In addition, excess air from the air cleaner housing and/or combustion air is expelled from the air cleaner housing.

A vacuum unit includes a debris tank receiving wet or dry waste. A multi-cyclone separator is coupled to an outlet of the debris tank. The multi-cyclone separator receives the wet or dry waste from the debris tank and the multi-cyclone separator includes a plurality of cyclones. A filter is coupled to the outlet of the multi-cyclone separator and receives exhaust airflow from the multi-cyclone which then flows onto the blower or fan and is vented external to the vacuum unit.

A system for extracting polluted air in the vicinity of a road surface, the system comprising at least one inlet assembly arranged to be recessed into the road surface and to be connected to an extraction duct, said at least one inlet assembly comprising: a pod arranged to protrude above the level of the road surface and to be driven over; and one or more intakes located within the pod, the pod defining a passage arranged to be connected to an extraction duct.

A fluid cleaning and filtering system includes a pre-treatment system before a force generation turbine to condense and pretreat gases and particulate matter; a flow rectifier before a tangential inlet; diffuser pipes for compressing the gases and particulate matter therein and project same into the deflector disks, diffuser pipes at an outlet of the so-called condenser, a purger, a diffuser and a deflector; a force generation turbine; an energy generator using torque from the turbine rotor; an internal energy generator; a flow rectifier in a first tangential inlet and a flow rectifier in a second tangential inlet; a new full-cone atomizer nozzle to wet particles and clean gases; a diffuser in the condensers and a deflector disk for the condensers.

A fluid cleaning and filtering system includes a pre-treatment system before a force generation turbine to condense and pretreat gases and particulate matter; a flow rectifier before a tangential inlet; diffuser pipes for compressing the gases and particulate matter therein and project same into the deflector disks, diffuser pipes at an outlet of the so-called condenser, a purger, a diffuser and a deflector; a force generation turbine; an energy generator using torque from the turbine rotor; an internal energy generator; a flow rectifier in a first tangential inlet and a flow rectifier in a second tangential inlet; a new full-cone atomizer nozzle to wet particles and clean gases; a diffuser in the condensers and a deflector disk for the condensers.

A particle separator for removing particles from a gaseous stream, the particle separator having a separator body having a centerline axis and a peripheral wall defining a separation chamber, a fluid inlet in fluid communication with the separation chamber, a particle outlet in fluid communication with the separation chamber, a fluid outlet in fluid communication with the separation chamber, and a plurality of angled inlet apertures fluidly coupled between the fluid inlet and the separation chamber. A particulate separation system for removing particles from a gaseous stream, the particulate filtration system having an inlet, an outlet, and a plurality of particle separators located between and in fluid communication with, the inlet and the outlet, wherein each of the plurality of particle separators receives less than about 5 percent by volume of the flow of the gaseous stream entering the inlet.

A particulate filtration device is suggested, comprising an inlet for an inflow of a gas stream which is particle-laden, an outlet for an outflow of the gas stream having a significantly reduced particulate load, a main filter section, which is arranged within a flow path of the gas stream between the inlet and the outlet and which comprises a filtration medium, and a prefilter chamber, which is arranged upstream of the main filter section and which comprises an inertial filter element, having several perforations, wherein the perforations of the inertial filter element are arranged within the flow path of the gas stream in such a way that when the flow path of the gas stream is passing through the perforations, an inertial separation of the particulates from the mean flow path of the gas stream is achieved.

A separator tank and a gas compressor having a separator tank are provided. The separator tank includes a tank body defining an inner volume, a tank inlet pipe providing fluid communication with the inner volume of the tank body, wherein the tank inlet pipe tangentially penetrates the tank body and is oriented to direct fluid entering the tank body in a spiral fluid flow pathway, and a sump tube positioned to collect fluid flowing within the tank body, the sump tube comprising a vertically oriented opening oriented to align and capture fluid flowing along the spiral fluid flow pathway.

A precleaner arrangement for separating a portion of entrained material from air flow air entering an engine air cleaner. The precleaner arrangement includes a precleaner housing and at least a first flexible air deflection vane with a fixed portion secured to the precleaner housing and a deflectable portion. The deflectable portion includes a curved section extending from the fixed portion and a tail section extending from the curved section. The deflectable portion is configured to deflect in response to a sufficient air flow rate change through the precleaner arrangement, in use. Some arrangements will also include a second stage, outlet vane assembly.