A substrate processing apparatus includes: a chamber; and a processing gas supply unit connected to the chamber via a processing gas supply flow path and configured to supply a processing gas. The processing gas supply unit includes a raw material cartridge that includes a raw material tank that accommodates a porous member containing a metal-organic framework adsorbed with gas molecules of a raw material of the processing gas; a main body configured to communicate the raw material tank and the processing gas supply flow path with each other when the raw material cartridge is attached; and a desorption mechanism configured to desorb the gas molecules of the raw material of the processing gas and allow the gas molecules to flow out as the processing gas to the processing gas supply flow path while the raw material cartridge is attached to the main body.

A continuous flow reactor without any moving parts to facilitate solid-liquid reaction without clogging is disclosed herein. It comprises plurality of identical cavities in series/sequence, each cavity being provided with: a pair of inlets at the top to allow entry of reactants into the reactor; an outlet at the bottom to allow the reactants to the next cavity for mixing; and a jacket covering around the cavities to provide heating or cooling effect as per the requirement. The outlet of the previous cavity is inclined at a suitable angle relative to the outlet of the next cavity to prevent clogging and facilitate efficient mixing of the reactants.

The present invention provides apparatuses and methods for the synthesis of oligonucleotides and related compounds. In particular, the present invention allows to effectively prepare reagents to be fed into an apparatus for the synthesis of such oligomers.

The present invention relates to a reaction control method in which a conversion rate of a reaction may be predicted from a flow rate of a feed introduced into a reactor and a flow rate of product water generated in the reactor, and through which the conversion rate of the reactor may be easily controlled.

Provided herein are systems and methods for generating gas and delivering the gas at multiple output pressures. The system includes a plurality of gas generators and a plurality of applications, each application having a different header pressure. A plurality of header valves directs the gas flow to the plurality of applications such that energy loss is minimized.

In an embodiment, a reactor for carrying out a melt transesterification reaction at a reactor temperature of 160 to 300° C. and a reactor pressure of 5 to 200 mbar, comprises a cylindrical tank comprising a top, a side, and a bottom, wherein the bottom is convex, extending away from the top; a stirring shaft disposed within the cylindrical tank along an axis thereof so that it is rotatable from outside of the cylindrical tank; a stirring blade extending from the stirring shaft in the cylindrical tank; a reactant solution inlet located on the bottom; and a reaction solution outlet located on the bottom. The reactor can be used for the polymerization of a polycarbonate oligomer.

In an embodiment, a reactor for carrying out a melt transesterification reaction at a reactor temperature of 160 to 300° C. and a reactor pressure of 5 to 200 mbar, comprises a cylindrical tank comprising a top, a side, and a bottom, wherein the bottom is convex, extending away from the top; a stirring shaft disposed within the cylindrical tank along an axis thereof so that it is rotatable from outside of the cylindrical tank; a stirring blade extending from the stirring shaft in the cylindrical tank; a reactant solution inlet located on the bottom; and a reaction solution outlet located on the bottom. The reactor can be used for the polymerization of a polycarbonate oligomer.

Gas injectors for providing uniform flow of fluid are provided herein. The gas injector includes a plenum body. The plenum body includes a recess, a protrusion adjacent to the recess and extending laterally away from the plenum body, and a plurality of nozzles extending laterally from an exterior surface of the plenum body. The plenum body has a plurality of holes in an exterior wall of the plenum body. Each nozzle is in fluid communication with an interior volume of the plenum body. By directing the flow of fluid, the gas injector provides for a uniform deposition.

A reactor for the polymerization of olefins comprising a first inlet for introducing a first stream comprising monomer(s), catalyst(s) and optionally hydrogen, solvent or comonomer(s) and/or mixtures thereof, at least one outlet for withdrawing a product stream, characterized in that the reactor further comprises at least one second inlet for introducing a second stream comprising monomer(s), catalyst(s) and optionally hydrogen, solvent or comonomer(s) and/or mixtures thereof; and a process for polymerizing olefins in a reactor according to the present invention, comprising the steps of introducing monomer(s), catalyst(s), and optionally hydrogen, solvent or comonomer(s) and/or mixtures thereof as the first stream via the first inlet into the reactor forming a reaction mixture; polymerizing a polymer from the reaction mixture; withdrawing the product stream via the at least one outlet from the reactor; characterized in that the process comprises a further step of introducing a second stream comprising monomer(s), catalyst(s), and optionally hydrogen, solvent or comonomer(s) and/or mixtures thereof into the reactor via the at least one second inlet into the reactor.

A flow divider for diverging a fluid includes a main body that includes first and second side surfaces being opposite to each other along a central axis of the main body. The first side surface has a central segment transversely intersecting the central axis, and having an inlet channel recessed toward the second side surface, a generally annular channel surrounding the central segment, recessed toward the second side surface, and spatially communicated with the inlet channel at a junction space, and an inclined segment surrounding the annular channel. A width of the annular channel decreases gradually from a start measurement to an end measurement along a rotational direction with respect to the central axis.