A driving method of a vertical heat treatment apparatus having a vertical reaction container with a heating part installed includes: performing a process of loading wafers by a substrate holder support to the reaction container; performing a film forming process of storing a first gas at a storage unit and pressurizing the first gas, and alternatively performing a step of supplying the first gas to the vacuum atmosphere reaction container and a step of supplying the second gas to the reaction container; subsequently performing a purge process of unloading the substrate holder support and supplying a purge gas into the reaction container to forcibly peel off a thin film attached to the reaction container; and while the purge process is performed, performing a process of repeating storing the purge gas at the storage unit, pressurizing the gas and discharging the gas into the reaction container.

Embodiments of the invention are directed to a thin film fabricating apparatus which may be employed in mass production and may stably provide a uniform nano-order layer. An exemplary embodiment of a thin film fabricating apparatus includes: an electrode bath which contains a thin film-forming material; a plurality of needle electrodes disposed in the electrode bath; a plurality of ring electrodes disposed on the electrode bath at positions corresponding to the needle electrodes; and a substrate stand disposed opposite to the needle electrodes and the ring electrodes, where the substrate stand holds the substrate, on which a thin film is to be formed.

Provided is a coating apparatus that allows high-quality coating by causing a coated object to pass through a falling curtain of paint without vibrating the coated object. A coating apparatus 1, which coats a surface of a plate-shaped coated object M, includes: a table 10, on which the coated object M is disposed; a flow coater head 20, from which a curtain of paint P falls; a gutter-shaped liquid receiver 30, which is disposed below the flow coater head 20 and which collects the paint P falling from the flow coater head 20; and a horizontal conveying portion 41, which conveys the table 10, on which the coated object M is disposed, in a horizontal direction to pass through the paint P falling from the flow coater head 20.

An apparatus and method for spreading grout configured to apply and spread grout, sealant, and other similar materials.

Object: A liquid material application apparatus and a liquid material application method are provided with which a liquid material can be discharged in a predetermined discharge amount per unit time regardless of a relative moving speed in a series of application works.

Solution: The liquid material application apparatus includes a discharge head, a robot moving the discharge head relative to a workpiece, a movement control unit controlling relative movement of the discharge head and the workpiece, and a discharge control unit controlling an operation of discharging a liquid material from a discharge head, wherein the discharge control unit executes, in a switchable manner in accordance with an application program, first mode discharge control of changing a discharge amount of the liquid material, which is discharged from the discharge head per unit time, depending on a relative moving speed between the discharge head and the workpiece, and second mode discharge control of operating the discharge head to discharge the liquid material in a predetermined discharge amount per unit time regardless of the relative moving speed. The liquid material application method is implemented using the liquid material application apparatus.

Application of liquid material is carried out without causing variations in discharge amount even on a stage under heating while temperature of a liquid material is adjusted by a temperature control device. A liquid material discharge device includes a discharge port, a liquid chamber in communication with the discharge port, and a temperature control device adjusting a temperature of the liquid chamber, the liquid material discharge device discharging the liquid material from the discharge port while a workpiece and the discharge port are moved relative to each other. The liquid material discharge device also includes a coolant flow path through which a coolant for heat exchange with the temperature control device flows, and a discharge control device controlling a discharge operation. An application device including the liquid material discharge device and an application method using the application device are also provided.

Application of liquid material is carried out without causing variations in discharge amount even on a stage under heating while temperature of a liquid material is adjusted by a temperature control device. A liquid material discharge device includes a discharge port, a liquid chamber in communication with the discharge port, and a temperature control device adjusting a temperature of the liquid chamber, the liquid material discharge device discharging the liquid material from the discharge port while a workpiece and the discharge port are moved relative to each other. The liquid material discharge device also includes a coolant flow path through which a coolant for heat exchange with the temperature control device flows, and a discharge control device controlling a discharge operation. An application device including the liquid material discharge device and an application method using the application device are also provided.

A liquid coating apparatus includes a liquid storage assembly to store a liquid, a pressure sensor to detect a remaining amount of liquid in the liquid storage assembly, a discharge assembly to discharge the liquid in the liquid storage assembly to an outside, a negative pressure pump to generate a negative pressure lower than an atmospheric pressure, a negative pressure adjusting container with an internal pressure adjusted to a predetermined negative pressure by the negative pressure pump, a pressure adjustment controller to control drive of the negative pressure pump based on a detection result of the pressure sensor, and a pressure switch to adjust pressure in the liquid storage assembly to the predetermined negative pressure in the negative pressure adjusting container.

A heat exchange device for heating liquid adhesive material to an application temperature suitable for an adhesive bonding application includes a body having an inlet configured to receive a flow of liquid adhesive material and an outlet configured to provide the liquid adhesive material to a dispensing device for the adhesive bonding application. A fluid passageway in the body connects the inlet and the outlet. The fluid passageway includes a thin slit section in the form of an elongated ring shape, having a length along a fluid flow direction between the inlet and the outlet, the thin slit section further having a first dimension and a second dimension transverse to the fluid flow direction. The first dimension and the length are substantially greater than the second dimension. The heat exchange device further includes a heating element for heating the liquid adhesive material flowing through the thin slit section.

A syringe attachment/detachment mechanism enables a syringe to be easily attached to and detached from a discharge device without causing twisting of a tube, and enabling the syringe and an adapter to be fixedly held in a desired orientation. In the syringe attachment/detachment mechanism and the device provided with the mechanism, the mechanism being adapted for a discharge device to which a syringe including an attachment part and an upper connection part is attached through screwing, the attachment part includes an inner cylindrical portion having a small-diameter opening, an outer cylindrical portion surrounding the inner cylindrical portion, and a screw portion. The attachment/detachment mechanism includes a support member including a cylindrical insertion portion into which the inner cylindrical portion is inserted, and having a channel formed therein for communication between the small-diameter opening and a nozzle of the discharge device. A rotation member includes a screw portion.