B05C21/00

METHOD AND APPARATUS FOR TREATING SUBSTRATE
20170341106 · 2017-11-30 ·

Provided is a method and apparatus for treating a substrate with a liquid. The substrate treating method comprises a pre-treating step for supplying the treatment liquid containing hydrogen fluoride (HF) to the substrate and treating the substrate before the surface modification step and a surface modification step for supplying an alkene-based chemical onto a substrate to change the surface of the substrate to a hydrophobic state. As a result, the surface of the substrate is uniform, and generation of particles can be reduced when the substrate is removed.

METHOD AND APPARATUS FOR TREATING SUBSTRATE
20170341106 · 2017-11-30 ·

Provided is a method and apparatus for treating a substrate with a liquid. The substrate treating method comprises a pre-treating step for supplying the treatment liquid containing hydrogen fluoride (HF) to the substrate and treating the substrate before the surface modification step and a surface modification step for supplying an alkene-based chemical onto a substrate to change the surface of the substrate to a hydrophobic state. As a result, the surface of the substrate is uniform, and generation of particles can be reduced when the substrate is removed.

DEPOSITION MASK APPARATUS, MASK SUPPORT MECHANISM, AND PRODUCTION METHOD FOR DEPOSITION MASK APPARATUS

A deposition mask apparatus including a frame, a supporter including a plurality of supporting members fixed to the frame, and a deposition mask fixed to the frame is provided. The plurality of supporting members include at least a first supporting member that is closest to an intermediate position between a third portion and a fourth portion of the frame and a second supporting member that is located closer to the third portion of the frame than the first supporting member. The first supporting member in a state of warping downward from the frame with a first warping amount supports the deposition mask from below. The second supporting member in a state of warping downward from the frame with a second warping amount that is smaller than the first warping amount supports the deposition mask from below.

Airflow Detection Apparatus, Airflow Detection Method, and Airflow Detection Program
20220057425 · 2022-02-24 ·

An airflow detection apparatus (1) an airflow detection apparatus (1) that detects an airflow in a painting booth, and includes a thread-like member (2) installed inside the painting booth, an image capture device (4) capable of generating image data obtained by capturing an image of the thread-like member (2), and a calculation device capable of performing calculation processing on the image data. The thread-like member (2) is installed in the painting booth in a mode in which at least a portion thereof is suspended. The calculation device specifies a portion corresponding to the thread-like member (2) in the image data, and detects an airflow based on a position of the portion.

Method for producing different populations of molecules or fine particles with arbitrary distribution forms and distribution densities simultaneously and in quantity, and masking

A masking member contains parallel through-holes, each of the through-holes contains a tilted wall structure; an upper end of the tilted wall structure of one of the through-holes abuts on an upper end of the tilted wall structure of an adjacent one of the through-holes thereby forming a knife-edge ridge at the upper ends. The masking member may in contact with a substrate. Formation in quantity of various different populations of a substance being studied with multiple combinations of distribution form and distribution density may be conducted by dripping a suspension of a single concentration of the substance onto the masking member.

HOLDING DEVICE FOR THE SURFACE TREATMENT OF BAR CUTTERS
20170297048 · 2017-10-19 ·

A holding device for fastening bar cutters in order for the cutting edges thereof to be coated, wherein the fastening is configured in such a way that a plurality of bar cutters can be arranged in a row such that the cutting faces and tips thereof have the same orientation, and the holding device includes a screen which at least partially protects the cutting faces from the coating, wherein, with bar cutters arranged in a row in the manner described, the top edge of the screen projects beyond the knife tips in such a way that no knife tips protrude.

Method for discharging fluid

In conventional fluid discharge devices, a discharge head used should be increased in size according to increase in size of a workpiece such as silicon wafer. However, if the discharge head increases in length, a deformation amount of a mask used for discharging the fluid on the workpiece increases, thereby the discharging amount varies. Discharging the fluid in a reciprocating manner is performed using a fluid discharging device including a head unit having a width shorter than a length of the workpiece. A suction port having opening portions each having a slit shape are disposed on the both sides of the discharge nozzle in a vicinity of the discharge nozzle.

Method for discharging fluid

In conventional fluid discharge devices, a discharge head used should be increased in size according to increase in size of a workpiece such as silicon wafer. However, if the discharge head increases in length, a deformation amount of a mask used for discharging the fluid on the workpiece increases, thereby the discharging amount varies. Discharging the fluid in a reciprocating manner is performed using a fluid discharging device including a head unit having a width shorter than a length of the workpiece. A suction port having opening portions each having a slit shape are disposed on the both sides of the discharge nozzle in a vicinity of the discharge nozzle.

Mask assembly and method for fabricating the same
09821416 · 2017-11-21 · ·

A mask assembly includes a mask frame having frame openings formed thereon, and a plurality of unit masks fixed to the mask frame. The respective unit masks extend in a first direction, and at least one of the plurality of unit masks includes at least one of a one sided projection projecting to one side thereof and another sided projection projecting to another side thereof, at both end portions of the unit mask, in a second direction that crosses the first direction.

Sealing plug, assembly and method for sealing an opening

A sealing plug for closing an opening in a component, in particular a body component of a motor vehicle, has a base body which is formed such that it can cover the opening and engage behind an edge of the opening. On the base body a sealing body is arranged, which includes a ring portion and several lamellae with free radial ends, which protrude from the ring portion and are flexible in circumferential direction. The sealing plug is pushed into the opening such that the rear-side latching lip engages behind the edge of the opening, wherein the lamellae of the sealing body are deformed in circumferential direction and center the sealing plug in the opening. After heating of the sealing plug a sealing material of the sealing body, which expands under the influence of heat, encloses the inner edge of the opening as well as radially adjoining regions of the front side and the rear side of the component around the entire circumference of the opening and completely fills the space formed between the supporting lip, the latching lip and the component.