The present disclosure provides a substrate processing apparatus capable of stabilizing the particle level when re-supplying a chemical solution. The substrate processing apparatus includes a circulation line connected to a chemical supply unit to circulate a chemical solution, a filter installed in the circulation line to filter particles in the chemical solution, a supply line connected to a first node of the circulation line and configured to supply the chemical solution to the chamber, and a drain line connected, in the circulation line, to a second node located between the filter and the first node, and configured to drain the chemical solution, the apparatus being configured to operate, during a first duration, from when a pump of the chemical supply unit is restarted after the pump had stopped, to drain the chemical solution that passes through the filter.

The present disclosure provides a substrate processing apparatus capable of stabilizing the particle level when re-supplying a chemical solution. The substrate processing apparatus includes a circulation line connected to a chemical supply unit to circulate a chemical solution, a filter installed in the circulation line to filter particles in the chemical solution, a supply line connected to a first node of the circulation line and configured to supply the chemical solution to the chamber, and a drain line connected, in the circulation line, to a second node located between the filter and the first node, and configured to drain the chemical solution, the apparatus being configured to operate, during a first duration, from when a pump of the chemical supply unit is restarted after the pump had stopped, to drain the chemical solution that passes through the filter.

The gate housing has a flow passage therethrough, the flow passage having an inlet and an outlet. The gate housing also includes a gate pocket configured to receive a blast gate and to allow the blast gate to slide therein between an open position and a closed position. The magnetic brake element is on the gate housing and includes a magnet mounted to the gate housing such that a magnetic force of the magnet extends into the gate pocket.

A method for controlling operation of a dust extractor, the method comprising; obtaining (S1) sensor data (235) related to an airflow (240) into the dust extractor, determining (S2) if the dust extractor is operating in a high airflow operating range based on the sensor data (235), and if the dust extractor is operating in the high airflow operating range, controlling (S3) a fan motor (210) of the dust extractor to reduce the airflow (240) to a reduced flow level (330, 3301) at or above a pre-determined airflow level (340) and below an obtainable flow level (310), wherein the pre-determined airflow level (340) is associated with a dust extraction capability of the dust extractor (100).

The invention relates to a work vehicle (1) comprising an operable arm (10) adapted to handle a tool (A-D) fastened to the free end of the arm, a control unit (4) for controlling the work vehicle (1), a dust control system arranged to distribute water mist with the aim of retaining dust that is created when the tool is used. For efficient dust control, the dust control system comprises a pressure air source (31) and a water pressure source (21), an air duct (33) arranged for the tool (A-D), through which an airflow from the pressure air source (31) can be conveyed, an injection nozzle (26) directed against the airflow in the air duct (33), with which water from the water pressure source (21) can be sprayed into the airflow for atomization of the water into liquid drops, which together with the airflow form a water mist, whereby the air duct arranged for the tool (A-D) is directed, so that the liquid drops form water mist (36) in the surroundings of the tool.

The invention relates to a work vehicle (1) comprising an operable arm (10) adapted to handle a tool (A-D) fastened to the free end of the arm, a control unit (4) for controlling the work vehicle (1), a dust control system arranged to distribute water mist with the aim of retaining dust that is created when the tool is used. For efficient dust control, the dust control system comprises a pressure air source (31) and a water pressure source (21), an air duct (33) arranged for the tool (A-D), through which an airflow from the pressure air source (31) can be conveyed, an injection nozzle (26) directed against the airflow in the air duct (33), with which water from the water pressure source (21) can be sprayed into the airflow for atomization of the water into liquid drops, which together with the airflow form a water mist, whereby the air duct arranged for the tool (A-D) is directed, so that the liquid drops form water mist (36) in the surroundings of the tool.

An extractor system includes a negative pressure gas stream source, a negative pressure conduit, a positive pressure gas stream source, a plurality of positive pressure gas stream manifolds, and an operator interface. The negative pressure conduit is conveys the negative pressure gas stream from a work area. A first end of the negative pressure conduit is coupled to the negative pressure gas stream source, such that the negative pressure gas stream flows from the work area through a second end of the negative pressure conduit and toward the first end of the negative pressure conduit. The positive pressure gas stream manifolds are disposed about the negative pressure conduit at the second end of the negative pressure conduit, and fluidly coupled to the positive pressure gas stream source. The positive pressure gas stream is directed through the plurality of positive pressure gas stream manifolds. The operator interface allows a user to control the positive pressure gas stream through each of the plurality of positive pressure gas stream manifolds.

A system for extracting polluted air in the vicinity of a road surface, the system comprising at least one inlet assembly arranged to be recessed into the road surface and to be connected to an extraction duct, said at least one inlet assembly comprising: a pod arranged to protrude above the level of the road surface and to be driven over; and one or more intakes located within the pod, the pod defining a passage arranged to be connected to an extraction duct.

A heating/ventilating/air conditioning (HVAC) air duct cleaning system with certain improvements having a system housing containing a vacuum-generating subsystem, a rotating motor with an output shaft, and a debris reservoir; a hose connection panel on the system housing positioned at an angle of approximately 45 degrees from horizontal; and a hose coupler on the hose connection panel, configured to receive a duct cleaning hose and to transfer rotational energy from the output shaft to a connection end of a rotatable cable when received into the guide portion, wherein the coupler provides coaxial alignment between the guide portion and the output shaft.

A heating/ventilating/air conditioning (HVAC) air duct cleaning system with certain improvements having a system housing containing a vacuum-generating subsystem, a rotating motor with an output shaft, and a debris reservoir; a hose connection panel on the system housing positioned at an angle of approximately 45 degrees from horizontal; and a hose coupler on the hose connection panel, configured to receive a duct cleaning hose and to transfer rotational energy from the output shaft to a connection end of a rotatable cable when received into the guide portion, wherein the coupler provides coaxial alignment between the guide portion and the output shaft.