Disclosed herein are systems and methods for polishing internal surfaces of apertures in semiconductor processing chamber components. A method includes providing a ceramic article having at least one aperture, the ceramic article being a component for a semiconductor processing chamber. The method further includes polishing the at least one aperture based on flowing an abrasive media through the at least one aperture of the ceramic article, the abrasive media including a polymer base and a plurality of abrasive particles.

Disclosed herein are systems and methods for polishing internal surfaces of apertures in semiconductor processing chamber components. A method includes providing a ceramic article having at least one aperture, the ceramic article being a component for a semiconductor processing chamber. The method further includes polishing the at least one aperture based on flowing an abrasive media through the at least one aperture of the ceramic article, the abrasive media including a polymer base and a plurality of abrasive particles.

An end effector provides one up assembly drilling through mated components, including a panel, by preloading the components. The end effector includes a drill and clamp dispenser for temporarily inserting and removing expansible single-sided clamps at various pre-drilled locations in the panel. In one method, pilot holes are first pre-drilled into mated components, for example an aircraft wing panel and a wing rib or spar; an initial pilot hole location is identified, and an expansible clamp is inserted into a pilot hole adjacent a desired initial fastener hole location. The clamp is torqued, causing its expansion for preloading the wing panel and rib and/or spar components under a predetermined load. The fastener hole is then drilled, the end effector untorques and removes the clamp and identifies a second (and/or next) pilot hole location, and the process is replicated.

An end effector provides one up assembly drilling through mated components, including a panel, by preloading the components. The end effector includes a drill and clamp dispenser for temporarily inserting and removing expansible single-sided clamps at various pre-drilled locations in the panel. In one method, pilot holes are first pre-drilled into mated components, for example an aircraft wing panel and a wing rib or spar; an initial pilot hole location is identified, and an expansible clamp is inserted into a pilot hole adjacent a desired initial fastener hole location. The clamp is torqued, causing its expansion for preloading the wing panel and rib and/or spar components under a predetermined load. The fastener hole is then drilled, the end effector untorques and removes the clamp and identifies a second (and/or next) pilot hole location, and the process is replicated.

A method includes making a first structure with a first plurality of pre-drilled holes at pre-defined locations, making a second structure with a second plurality of pre-drilled holes at pre-defined locations, making a third structure without pre-drilled full-size holes, measuring the location and orientation of the first and second plurality of pre-drilled holes in the first and second structures, determining the location of a third plurality of holes to be drilled in the third structure that correspond to first and second plurality of pre-drilled holes measured in the first and second structures, creating a program to drill the third plurality of holes in the third structure that align with the measured location and orientation of the first and second plurality of pre-drilled holes in the first and second structures based on the measure location and orientation of the first and second plurality of pre-drilled holes in the first and second structure, drilling the third plurality of holes in the third structure based on the program, positioning the third structure on the first and second structures such that the third plurality of holes in the third structure are aligned with the first and second plurality of pre-drilled holes in the first and second structures, and inserting fasteners through the third plurality of holes and the first and second plurality of predrilled holes that are aligned with the third plurality of holes to secure the second structure to the first structure using the third structure.

A method includes making a first structure with a first plurality of pre-drilled holes at pre-defined locations, making a second structure with a second plurality of pre-drilled holes at pre-defined locations, making a third structure without pre-drilled full-size holes, measuring the location and orientation of the first and second plurality of pre-drilled holes in the first and second structures, determining the location of a third plurality of holes to be drilled in the third structure that correspond to first and second plurality of pre-drilled holes measured in the first and second structures, creating a program to drill the third plurality of holes in the third structure that align with the measured location and orientation of the first and second plurality of pre-drilled holes in the first and second structures based on the measure location and orientation of the first and second plurality of pre-drilled holes in the first and second structure, drilling the third plurality of holes in the third structure based on the program, positioning the third structure on the first and second structures such that the third plurality of holes in the third structure are aligned with the first and second plurality of pre-drilled holes in the first and second structures, and inserting fasteners through the third plurality of holes and the first and second plurality of predrilled holes that are aligned with the third plurality of holes to secure the second structure to the first structure using the third structure.

According to one implementation, a drill includes: a body without a back taper and a cutting edge part. The body has a flow path of a cutting oil. The flow path is branched to first and second flow paths inside the body. The cutting edge part has a first supply port that supplies the cutting oil toward a workpiece. The first supply port is an outlet of the first flow path. The body has a second supply port that supplies the cutting oil to a clearance between the body and a bush for positioning the body. The second supply port is an outlet of the second flow path. The second flow path has a pressure loss by which the cutting oil is not scattered from the second supply port in a radial direction of the body but exuded from the second supply port.

According to one implementation, a drill includes: a body without a back taper and a cutting edge part. The body has a flow path of a cutting oil. The flow path is branched to first and second flow paths inside the body. The cutting edge part has a first supply port that supplies the cutting oil toward a workpiece. The first supply port is an outlet of the first flow path. The body has a second supply port that supplies the cutting oil to a clearance between the body and a bush for positioning the body. The second supply port is an outlet of the second flow path. The second flow path has a pressure loss by which the cutting oil is not scattered from the second supply port in a radial direction of the body but exuded from the second supply port.

A system and a method for measuring drilling damage in fiber reinforced plastic (FRP) composites is described. Multiple holes are drilled in the FRP composite using a drill having nominal diameter, and the FRP composite is separated into multiple drilled blocks. Each block, covered with the black substrate, is scanned on a scanner to generate a scanned image depicting a hole region, a background, and delamination damage peaks. For each scanned image, a maximum delamination damage peak and a maximum diameter of a first circle concentric with the drilled hole and passing through tip of the maximum delamination peak, are measured. Further, a delamination size and a delamination factor are calculated based on the maximum diameter of the first circle and the nominal diameter of the drill.

A drilling method is provided allowing drilling in confined spaces with less effort. Two independent data sources are used for reducing tolerances between the component to be joined to the workpiece. The component is measured at the supplier using photogrammetry or laser scanning First geometric data of the component obtained by this measurement are put in a data storage, such as a barcode tag or database. At the manufacturer, the first geometric data are used to position the component relative to the workpiece. Subsequently, the component is measured to obtain second geometric data indicative of the positions and diameters of the component joining holes. After determining a deviation between the first and second geometric data to be smaller than a predetermined threshold, the automatic drill is positioned at the correct drilling location and joining holes are drilled into the workpiece. Finally, the component and the workpiece are joined by fasteners.