A method of forming fine patterns of semiconductor devices is disclosed. The method comprises forming a hard mask layer on an etch target, which includes first and second regions. The hard mask layer may further have first and second preliminary mask patterns formed on the same. Furthermore, a spacer layer may be formed on the first and second preliminary mask patterns. The spacer layer and the first and second preliminary mask patterns may be partially removed to form first and second spacers on sidewalls of the first and second preliminary mask patterns, respectively. The second spacer in the second region may have a top surface higher than a top surface of the first spacer in the first region. The height differences between the spacers allow forming of first and second patterns in the first and second regions, and thereby forming fine patterns of semiconductor devices.

A data storage device includes a semiconductor structure including a first conductive-type region having a first-type conductivity, a second conductive-type region spaced apart from the first conductive-type region and having a second-type conductivity opposite to the first-type conductivity, and a semiconductor region between the first conductive-type region and the second conductive-type region and including a neighboring portion adjacent to the second conductive-type region; a mode select transistor including a gate electrode aligned with the neighboring portion and an insulation layer between the gate electrode and the neighboring portion; a plurality of memory cell transistors including a plurality of control gate electrodes aligned with the semiconductor region, and a data storage layer interposed between the plurality of control gate electrodes and the semiconductor region; a first wire electrically connected to the first conductive-type region; and a second wire including an ambipolar contact having a first contact between the second wire and the second conductive-type region, and a second contact between the second wire and the neighboring portion.

A semiconductor structure is disclosed that includes a semiconductor structure includes an active area, a first conductive line, a conductive via, a first conductive metal segment coupled to the conductive line through the conductive via, a second conductive metal segment disposed over the active area, and a local conductive segment configured to couple the first conductive metal segment and the second conductive metal segment.

Some embodiments include a capacitive chip having a plurality of capacitive units. The individual capacitive units include alternating electrode layers and dielectric layers in a capacitor stack. The capacitor stack extends across an undulating topography. The undulating topography has peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns. The capacitor stack includes at least about 10 total layers. Some embodiments include apparatuses and multi-chip modules having capacitor chips.

The invention relates to an integrated circuit (1), comprising: a field-effect transistor (2), comprising: first and second conduction electrodes (201, 202); a channel zone (203) arranged between the first and second conduction electrodes; a gate stack (220) arranged vertically in line with the channel zone, and comprising a gate electrode (222); an RRAM-type memory point (31) formed under the channel zone, or formed in the gate stack under the gate electrode.

A semiconductor device includes a plurality of line patterns formed apart from one another on a substrate, the plurality of line patterns having a first width and extending parallel to one another in a first direction. A first line pattern of the plurality of line patterns may include a wider portion having a second width in a second direction perpendicular to the first direction that is greater than the first width. One or more second line patterns may be located adjacent to the first line pattern and include a conformal portion conformally formed about the wider portion of the first line pattern. One or more third line patterns may be located adjacent to the second line pattern and include an end portion near the conformal portion of the one or more second line pattern.

A semiconductor memory device includes a first memory die having a first termination resistor for an on-die termination and a second memory die having a second termination resistor for an on-die termination and formed on the first memory die. Each of the first and second memory dies has a center pad type and operates based on a multi-rank structure. When the first memory die is accessed, the second termination resistor is connected to the second memory die, and when the second memory die is accessed, the first termination resistor is connected to the first memory die.

A nonvolatile semiconductor storage device a memory cell array including a plurality of memory cell units arranged in a matrix configuration, the memory cell units including a memory string including a series connection of a plurality of memory cells that stores data in accordance with a threshold voltage and is capable of electrical data writing and erasure, a first select gate transistor that connects a first end of the memory string to a bit line and a second select gate transistor that connects a second end of the memory string to a source line. The nonvolatile semiconductor storage device a discharge transistor that is connected between the bit line and the source line and causes discharge of the bit line to the source line.

A magnetic memory according to an embodiment includes: at least one memory cell, the memory cell comprising: a conductive layer including a first terminal, a second terminal, and a portion located between the first terminal and the second terminal; a magnetoresistive element including: a first magnetic layer; a second magnetic layer between the portion and the first magnetic layer; and a nonmagnetic layer between the first magnetic layer and the second magnetic layer; a diode including an anode and a cathode, one of the anode and the cathode being electrically connected to the first magnetic layer; and a transistor including third and fourth terminals and a control terminal, the third terminal being electrically connected to the first terminal.

A memory device is provided that includes a plurality of memory cells. The memory device includes a plurality of stacks of conductive strips separated by insulating strips. Data storage structures including floating gates are disposed along the conductive strips in the stacks. Vertical channel films are disposed on sidewalls of the stacks. Memory cells in the plurality of memory cells have channels in the vertical channel films, and control gates in the conductive strips. A tunnel oxide layer is disposed between the vertical channel films and the floating gates. The floating gates can be coplanar with conductive strips in the plurality of stacks, or be disposed between the conductive strips in the plurality of stacks.