A substrate processing apparatus which causes a processing tape to abut against a processing object, including: a tape supply reel configured to supply the processing tape; a tape recovery reel configured to recover the processing tape; a recovery motor configured to apply a torque to the tape recovery reel; a tape feed motor configured to feed the processing tape between the tape supply reel and the tape recovery reel; and a control unit configured to control the tape feed motor, wherein the control unit controls the torque of the recovery motor depending on a change in an outer diameter of a roll of the processing tape wound by the tape recovery reel such that tension applied to the processing tape is constant, using a feed length of the tape fed by the tape feed motor and a thickness of the processing tape.

The invention relates to a method for producing a gear worm (12) which is located in particular on an armature shaft (14) of an electromotive drive unit (10), wherein firstly a worm gear (20) having screw flanks (22) axially opposite one another on a longitudinal axis (18) is formed by means of a rolling tool, and subsequently a groove structure (24) which is concentric about the longitudinal axis (18) is formed on the screw flanks (22) by means of an additional process step. The invention also relates to a gear worm (12) produced according to the method according to the invention, and to a transmission drive unit (10) containing such a gear worm (12).

A coating apparatus for a color filter substrate, including a coating sprayer (1) configured to coat a first film layer on a color filter layer (03) formed on the color filter substrate (01); a grinding device (2) configured to grind the color filter layer (03) to eliminate a step formed by the color filter layer (03) covering a black matrix (02); and a detection control unit (3) configured to measure a height of the step, determine a grinding amount of the grinding device (2) according to the height of the step, and control an operation of the grinding device (2) such that the first film layer coated on the color filter layer (03) has a flat surface. Also disclosed is a coating method for a color filter substrate.

Detection of an abnormality in polishing of a substrate is provided. A measuring device measures a position of the polishing tool relative to a surface of the substrate. A controller determines an amount of polishing of the substrate from the position of the polishing tool; calculates a polishing rate from the amount of polishing of the substrate; and judges that an abnormality in polishing of the edge portion of the substrate has occurred if the polishing rate is out of a predetermined range exceeds a predetermined threshold value.

A finishing device for finish machining of a workpiece, in particular of a crankshaft or a camshaft, comprising a workpiece holder and a rotary drive for rotating the workpiece about the workpiece axis thereof, comprising at least one first finishing tool for machining a main bearing concentric to the workpiece axis and at least one second finishing tool for machining an additional bearing, wherein the finishing tools can be moved along a transport axis which extends via a working area defined by the workpiece holder so that the finishing tools can be moved into an additional area arranged outside the working area.

Method and apparatus for sharpening a cutting tool. In some embodiments, a sharpener has a guide assembly adjacent a moveable abrasive medium. The medium is advanced at a first speed relative to the guide assembly during a coarse sharpening operation in which a user presents the cutting tool against the medium to shape a side of the cutting tool and generate distended material from the cutting edge (e.g., burrs). The medium is subsequently slowed to a lower, second speed for a fine sharpening operation in which the user presents the cutting tool against the medium to remove the distended material and provide a sharpened cutting edge.

A deburring tool includes a grinding belt holder, which is formed so as to hold a grinding belt, wherein the deburring tool has a housing, in which the grinding belt holder can alternatingly carry out a linear stroking or lifting movement. The grinding belt holder has a forming tunnel, which forms a forming duct including an input and an output for the guide-through of the grinding belt, wherein a grinding belt, which, folded in the center in the longitudinal direction of the grinding belt, escapes on the output side, can be supplied to the forming duct on the input side. The forming duct has a round cross section on its input side and a slit-like cross section on its output side.

Disclosed herein is an apparatus for grinding a compression line spring. The apparatus includes a lower chain conveyor (100), an upper chain conveyor (200), and grinding units (300). The lower chain conveyor includes chain units each having first support blocks (115) for supporting compression line springs. The upper chain conveyor includes chain units each having second support blocks (215) for compressing downward upper portions of the compression line springs and thus supporting the compression line springs. The grinding units grind seat surfaces formed on opposite ends of the compression line springs that are moved by the upper and lower chain conveyors. A V-shaped depression (115a) is formed in each first support block so that each of the compression line springs is seated onto the corresponding V-shaped depression. A lower surface (215a) of the second support block that compresses the compression line springs has a planar structure.

A polishing method which can remove foreign matters from an entire back surface of a substrate at a high removal rate is provided. The polishing method includes placing a polishing tool in sliding contact with an outer circumferential region of a back surface of a substrate while holding a center-side region of the back surface of the substrate, and placing a polishing tool in sliding contact with the center-side region of the back surface of the substrate while holding a bevel portion of the substrate to polish the back surface in its entirety.

Apparatus for sharpening a cutting tool. In some embodiments, a tool sharpener includes an abrasive medium having an abrasive surface. A stationary tool support guide provides a guide surface that supports a side of the tool during presentation of a cutting edge of the tool against the abrasive surface. A rotatable edge guide has a roller member with a curvilinearly extending outer surface. The roller member is rotatable about an edge guide roller axis and is moveable between a deployed position and a retracted position. In the deployed position, the roller member is positioned to engage, via rolling contact, the cutting edge during the presentation of the cutting edge against the abrasive surface. In the retracted position, the roller member is positioned to provide a non-contacting clearing relation with the cutting edge during said presentation.