B24B31/00

POLISHING DEVICE AND POLISHING METHOD

A polishing device and a polishing method. The polishing device includes a thrust system, a sealing system including a piston, a cylinder body matched with the piston, and the cylinder body accommodating a polishing medium for polishing; a conveying pipeline system conveys the polishing medium to one end of an inner flow channel workpiece for polishing; a recycle system including a recycle container, a recycle pipeline, a return pipeline, a driving assembly, and a control valve assembly, the control valve assembly includes a first valve, a second valve; the recycle container is connected with the workpiece through the recycle pipeline, and the sealing system is communicated with the workpiece through the return pipeline; the first valve is coordinated with the sealing system and a low-pressure environment, the second valve is located at the return pipeline, is coordinated with the recycle container and the sealing system.

ELECTROCHEMICAL POLISHING METHOD EMPLOYING SOLID ELECTRO-CONDUCTIVE MEDIA WITH BI-DIRECTIONAL PLANETARY MOTION

Disclosed is an electrochemical polishing method employing solid electro-conductive media with bi-directional planetary motion, mainly including the following steps: using solid particles absorbing an electrolyte as solid electro-conductive media, and submerging an anode (workpiece) in the solid electro-conductive media to perform bi-directional planetary motion during polishing, allowing the workpiece to fully contact and collide with the solid electro-conductive media, and ensuring that materials are uniformly removed from various surfaces of the workpiece. In the present disclosure, one-time overall polishing of complex-shaped workpieces can be achieved by bi-directional planetary motion of the workpieces, the consistency of material removal from various surfaces of the workpieces is improved, and the polishing performance and efficiency are enhanced.

Displacement magnifying mechanism, actuator, polishing device, electronic component processing apparatus, dispenser, and air valve

A displacement magnifying mechanism, polishing device, actuator, electronic component processing apparatus, dispenser, and air valve which can easily control a drive system. The displacement magnifying mechanism includes a base; a piezoelectric element of which an end is attached to a mounting surface of the base, the piezoelectric element extending along a first longitudinal direction; a support member of which an end is attached to the mounting surface side by side with the piezoelectric element, the support member extending along a second longitudinal direction which intersects with the first longitudinal direction; an operating portion attached to each of other ends of the piezoelectric element and the support member to allow the operating portion to be displaced, in response to an expansion/contraction of the piezoelectric element, along a displacement direction; and a compression member attached to the base and the operating portion so as to compress the piezoelectric element.