H01L41/00

Piezoelectric actuator and method for producing piezoelectric actuator
11458729 · 2022-10-04 · ·

A piezoelectric actuator includes: a vibration plate: a first piezoelectric body arranged on one side in a thickness direction of the vibration plate; a second piezoelectric body arranged on a side, of the first piezoelectric body, opposite to the vibration plate in the thickness direction; a first electrode arranged between the vibration plate and the first piezoelectric body; a second electrode arranged between the first and second piezoelectric bodies in the thickness direction, and overlapping with the first electrode in the thickness direction; and a third electrode arranged on a side, of the second piezoelectric body, opposite to the first piezoelectric body in the thickness direction, and overlapping with the second electrode in the thickness direction. The second piezoelectric body covers at least a part of a first end surface, of the first piezoelectric body, which is an end surface in a first direction orthogonal to the thickness direction.

MEMS piezoelectric device and corresponding manufacturing process

A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.

Generator of electricity comprising a magneto-electric converter and associated manufacturing process

An electrical generator comprises a converter including two electrical terminals for converting a variation in a magnetic field into a potential difference between the terminals. The generator includes a stack of a first layer comprising an anisotropic magnetostrictive material defining a reference plane and a second layer comprising a piezoelectric material. The first layer has at least one preferential axis of deformation in the reference plane and the second layer has a polarization axis parallel to the reference plane, the preferential axis of deformation of the first layer being aligned to within 15° with the polarization axis of the second layer. The generator includes a source that generates the magnetic field, the strength of which is insufficient to magnetically saturate the material of the first layer. The source and converter are able to rotate with respect to each other so as to vary the orientation of the magnetic field.

Elastic wave device and manufacturing method therefor

An elastic wave device includes an interdigital transducer electrode and a wiring electrode made of metal and provided on a first main surface of a piezoelectric substrate. Via hole electrodes penetrate the piezoelectric substrate. Each via hole electrode is connected to an external connection terminal. A cover member defines a hollow space in which the interdigital transducer electrode is sealed, together with the first main surface of the piezoelectric substrate. A heat dissipating member is provided on the wiring electrode to extend from the wiring electrode toward the cover member and penetrate the cover member.

Reconfigurable interference

Aspects of the present disclosure are directed to a reconfigurable interference device comprising a phase change structure. The phase change structure comprises a solid-state phase change material having a first phase state and a second phase state dependent on temperature. A first energy source is configured to supply an initialization energy to initialize a plurality of domains having the first phase state and a second energy source is configured to supply an electrical current to the structure to position the plurality of domains of the first phase state within the phase change structure. A control unit is configured to control the first and the second energy source and to create a periodic interference pattern comprising a plurality of domains of the first phase state and a plurality of domains of the second phase state in an alternating pattern.

Linear structure for displacement transmission, and one-dimensional and three-dimensional micro movement device using same

Provided is a linear structure for displacement transmission that can be bent in a second direction or a third direction when force in the second direction or the third direction is applied and can transmit a displacement in a first direction from an end of one side to an end of the other side when force in the first direction is applied. The linear structure includes a displacement transmission plate and a plurality of displacement transmission rods disposed radially on the displacement transmission plate to transmit the displacement in the first direction from the end of one side to the end of the other side.

Medical instrument including high frequency ultrasound transducer array

Disclosed is a medical device that includes a phased array ultrasound transducer. The transducer includes a number of transducer elements that are electrically coupled to corresponding electrical conductors. In one embodiment, the conductors are included in a flex circuit and engage corresponding transducer elements though a conductive surface formed on outwardly extending ribs of a frame that holds the ultrasound array. In one embodiment, the phased array is forward facing in the medical device and has an element pitch of 0.75 lambda or less and more preferably 0.6 lambda or less. In one embodiment, the transducer is rotatable over an angle of +/−90 degrees to provide a 360 degree view of tissue surrounding the distal end of the device.

TWO-DIMENSIONAL ADDESSABLE ARRAY OF PIEZOELECTRIC MEMS-BASED ACTIVE COOLING DEVICES
20210183743 · 2021-06-17 ·

A cooling system and method for using the cooling system are described. The cooling system includes a plurality of individual piezoelectric cooling elements spatially arranged in an array extending in at least two dimensions, a communications interface and driving circuitry. The communications interface is associated with the individual piezoelectric cooling elements such that selected individual piezoelectric cooling elements within the array can be activated based at least in part on heat energy generated in the vicinity of the selected individual piezoelectric cooling elements. The driving circuitry is associated with the individual piezoelectric cooling elements and is configured to drive the selected individual piezoelectric cooling elements.

Two-dimensional addessable array of piezoelectric MEMS-based active cooling devices

A cooling system and method for using the cooling system are described. The cooling system includes a plurality of individual piezoelectric cooling elements spatially arranged in an array extending in at least two dimensions, a communications interface and driving circuitry. The communications interface is associated with the individual piezoelectric cooling elements such that selected individual piezoelectric cooling elements within the array can be activated based at least in part on heat energy generated in the vicinity of the selected individual piezoelectric cooling elements. The driving circuitry is associated with the individual piezoelectric cooling elements and is configured to drive the selected individual piezoelectric cooling elements.

Magnetostrictive stack and corresponding bit-cell

An apparatus is provided which comprises: a ferromagnetic (FM) region with magnetostrictive (MS) property; a piezo-electric (PZe) region adjacent to the FM region; and a magnetoelectric region adjacent to the FM region. An apparatus is provided which comprises: a FM region with MS property; a PZe region adjacent to the FM region; and a magnetoelectric region, wherein the FM region is at least partially adjacent to the magnetoelectric region. An apparatus is provided which comprises: a FM region with MS property; a PZe region adjacent to the FM region; a magnetoelectric region being adjacent to the FM and PZe regions; a first electrode adjacent to the FM and PZe regions; a second electrode adjacent to the magnetoelectric region; a spin orbit coupling (SOC) region adjacent to the magnetoelectric region; and a third electrode adjacent to the SOC region.