Embodiments described herein relate to integrated abrasive (IA) polishing pads, and methods of manufacturing IA polishing pads using, at least in part, surface functionalized abrasive particles in an additive manufacturing process, such as a 3D inkjet printing process. In one embodiment, a method of forming a polishing article includes dispensing a first plurality of droplets of a first precursor, curing the first plurality of droplets to form a first layer comprising a portion of a sub-polishing element, dispensing a second plurality of droplets of the first precursor and a second precursor onto the first layer, and curing the second plurality of droplets to form a second layer comprising portions of the sub-polishing element and portions of a plurality of polishing elements. Here, the second precursor includes functionalized abrasive particles having a polymerizable group chemically bonded to surfaces thereof.

A grinding tool includes a substrate having a surface provided with a plurality of openings, and a plurality of grinding studs. Each of the grinding studs includes a stud portion and an abrasive particle attached to each other, the stud portions being respectively attached into the openings, and the abrasive particles protruding outward from the surface, each of the abrasive particles having a pattern cut across a tip thereof to define multiple apexes adjacent to one another.

Described herein is an improved abrasive material (300) in which the cutting performance is orientation-independent. The abrasive material (300) comprises an abrasive structure (310) including a plurality of elongate abrasive elements (320, 330) aligned to be define a first open square. A plurality of pyramidal abrasive elements (340, 350) arranged in a second open square are located within the first open square defined by the elongate elements (320, 330).

A coated abrasive article comprising a backing, an adhesive layer disposed in a discontinuous distribution on at least a portion of the backing, wherein the discontinuous distribution comprises a plurality of adhesive contact regions having at least one of a lateral spacing or a longitudinal spacing between each of the adhesive contact regions; and at least one abrasive particle disposed on each adhesive contact region, the abrasive particle having a tip, and there being at least one of a lateral spacing or a longitudinal spacing between each of the abrasive particles, and wherein at least 65% of the at least one of a lateral spacing and a longitudinal spacing between the tips of the abrasive particles is within 2.5 standard deviations of the mean.

Abrasive disk sheet articles having raised islands coated with abrasive have a flexible disk polymer backing. The top flat surfaces of the raised islands are coated with a liquid controlled-thickness slurry mixture of abrasive particles and a polymeric adhesive by use of a magnetic precision-thickness coating-control font sheet having individual open holes that are slightly smaller than the respective raised islands. The magnetic coater font sheet is placed in flat-surfaced contact with the raised island surfaces where each individual font sheet open hole is aligned with a respective island surface. A magnet placed on the non-island surface of the disk polymer backing urges the magnetic coater font sheet into conformal contact with the island surfaces. A squeegee device moved along the font sheet fills and level coats the island tops with a uniform-thickness abrasive slurry mixture. After coating, the font sheet is removed and the abrasive slurry is solidified.

An abrasive article having a plurality of apertures arranged in a non-uniform distribution pattern, wherein the pattern is spiral or phyllotactic, and in particular those patterns described by the Vogel equation. Also, provided is a back-up pad having a spiral or phyllotactic patterns of air flow paths, such as in the form of open channels. The back-up pad can be specifically adapted to correspond with an abrasive article having a non-uniform distribution pattern. Alternatively, the back-up pad can be used in conjunction with conventional perforated coated abrasives. The abrasive articles having a non-uniform distribution pattern of apertures and the back-up pads can be used together as an abrasive system.

A grinding tool includes a substrate and a plurality of abrasive particles. The substrate has a first and a second surface and a plurality of holes, each of the holes extending through the substrate and respectively having a first and a second opening on the first and second surface, the second opening being larger than the first opening. The abrasive particles are respectively disposed in the holes and attached to the substrate via a plurality of adhesive portions, each of the abrasive particles having a tip protruding outward from the first surface and a remaining part covered with one of the adhesive portions inside the corresponding hole, wherein the first openings of the holes are smaller than the abrasive particles, and the abrasive particles are respectively retained in the holes. Moreover, embodiments described herein include a method of fabricating a grinding tool.

A method of making a bonded abrasive article comprises urging crushed abrasive particles with agitation against the surface of a tool, thereby causing a first portion of crushed abrasive particles to become retained within horizontally-oriented precisely-shaped cavities at predetermined locations with respect to the surface of the tool, and causing a second portion of the crushed abrasive particles to remain as loose particles on the surface of the tool. The loose particles are separated from the tool. The tool is positioned within a mold containing a curable binder material precursor. The crushed abrasive particles retained in the precisely-shaped cavities into the mold are released, and the tool is removed from the mold. The crushed abrasive particles and the curable binder material precursor are shaped and cured to form the bonded abrasive article. A bonded abrasive article preparable by the method is also disclosed.

The present invention provides a CMP abrasive pad conditioner, comprising a bottom substrate; an intermediate layer located on the bottom substrate, the intermediate layer including a hollow portion and an annular portion surrounding the hollow portion, the annular portion being provided with a plurality of bumps; and a diamond film located on the intermediate layer, and forming a plurality of abrasive projections corresponding to the bumps of the intermediate layer; in this case, a top surface of the abrasive projections is formed with a patterned configuration and the top surface is provided with a center line average roughness (Ra) between 2 and 20.

Methods of making an abrasive article. Abrasive particles are loaded to a distribution tool including a plurality of walls defining a plurality of slots. Each slot is open to a lower side of the tool. The loaded particles are distributed from the distribution tool to a major face of a backing web below the lower side and moving relative to the tool. At least a majority of the particles distributed from the tool undergo an orientation sequence in which each particle first enters one of the slots. The particle then passes partially through the slot such that a first portion is beyond the lower side and in contact with the major face, and a second portion within the slot. The sequence then includes the particle remaining in simultaneous contact with one of the walls and the major face for a dwell period while the web moves relative to the tool.