H01L45/00

Memory device and manufacturing method thereof

A memory device includes a transistor and a memory cell. The memory cell includes a bottom electrode, a top electrode, and a dielectric structure. The top electrode is electrically connected to the transistor. The dielectric structure includes a thin portion and a thick portion. The thin portion is sandwiched between the bottom electrode and the top electrode. The thick portion is thicker than the thin portion and between the bottom electrode and the top electrode.

LOW FORMING VOLTAGE OXRAM MEMORY CELL, AND ASSOCIATED METHOD OF MANUFACTURE

An OxRAM resistive memory cell includes a lower electrode, an upper electrode, and an active layer which extends between the lower electrode and the upper electrode. The active layer includes a layer of a first electrically insulating oxide, wherein an electrically conductive filament can be formed, then subsequently broken and reformed several times successively. The upper electrode includes a reservoir layer, capable of receiving oxygen, which includes an upper part made of a metal and a lower part made of a second oxide, the second oxide being an oxide of the metal and including a proportion of oxygen such that the second oxide is electrically conductive.

RERAM MODULE WITH INTERMEDIATE ELECTRODE
20220399494 · 2022-12-15 ·

A resistive RAM module comprises a source electrode and an intermediate electrode that is formed on the source electrode. The intermediate electrode has a closed-curve profile. The resistive RAM module also comprises a memristor element that is deposited on the intermediate electrode. The resistive RAM module also comprises a sink electrode that is in contact with the memristor element. The intermediate electrode is electrically between the source electrode and the memristor element and the memristor element is electrically between the intermediate electrode and the sink electrode.

RESISTIVE RANDOM-ACCESS MEMORY (RRAM) DEVICE AND FORMING METHOD THEREOF

A RRAM device includes a bottom electrode, a resistive material layer, a high work function layer, a top electrode, a hard mask and high work function sidewall parts. The bottom electrode, the resistive material layer, the high work function layer, the top electrode and the hard mask are sequentially stacked on a substrate. The high work function sidewall parts cover sidewalls of the top electrode and sidewalls of the hard mask, thereby constituting a RRAM cell. A method of forming said RRAM device is also provided.

MEMORY DEVICE AND MANUFACTURING METHOD THEREOF
20220399492 · 2022-12-15 · ·

A memory device includes a substrate, a memory unit, and a first spacer layer. The memory unit is disposed on the substrate, and the memory unit includes a first electrode, a second electrode, and a memory material layer. The second electrode is disposed above the first electrode in a vertical direction, and the memory material layer is disposed between the first electrode and the second electrode in the vertical direction. The first spacer layer is disposed on a sidewall of the memory unit. The first spacer layer includes a first portion and a second portion. The first portion is disposed on a sidewall of the first electrode, the second portion is disposed on a sidewall of the second electrode, and a thickness of the second portion in a horizontal direction is greater than a thickness of the first portion in the horizontal direction.

MEMORY DEVICE
20220399488 · 2022-12-15 ·

A memory device includes a first interconnect layer, a second interconnect layer, a phase-change layer, and an adjacent layer. The phase-change layer is disposed between the first interconnect layer and the second interconnect layer and configured to reversibly transition between a crystalline state and an amorphous state. The adjacent layer contacts the phase-change layer and comprises tellurium and at least one of titanium, zirconium, or hafnium.

MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME
20220399490 · 2022-12-15 · ·

Provided is a memory device including a stack structure, a plurality of channel layers, a source line, a bit line, a switching layer, and a dielectric pillar. The stack structure has a plurality of dielectric layers and a plurality of conductive layers stacked alternately. The channel layers are respectively embedded in the conductive layers. The source line penetrates through the stack structure to be electrically connected to the channel layers at first sides of the channel layers. The bit line penetrates through the stack structure to be coupled to the channel layers at second sides of the channel layers. The switching layer wraps the bit line to contact the channel layers at the second sides of the channel layers. The dielectric pillar penetrates through the channel layers to divide each channel layer into a doughnut shape. A method of manufacturing a memory device is also provided.

STORAGE DEVICE
20220399489 · 2022-12-15 · ·

A storage device 10 includes a phase change layer 40 containing tellurium, and a diffusion layer 50 containing at least one of germanium, silicon, carbon, tin, aluminum, gallium, and indium and disposed at a position adjacent to the phase change layer 40. The phase change layer 40 is capable of changing between a first state and a second state different from each other in electric resistance. The phase change layer 40 is in a crystal state in any of the first state and the second state. A length of the diffusion layer 50 in a direction orthogonal to a z direction is shorter than a length of the phase change layer 40 in the direction orthogonal to the z direction.

PHASE CHANGE MEMORY CELL WITH AN AIRGAP TO ALLOW FOR THE EXPANSION AND RESTRICTION OF THE PCM MATERIAL
20220399493 · 2022-12-15 ·

A phase change memory (PCM) cell comprising a substrate a first electrode located on the substrate. A phase change material layer located adjacent to the first electrode, wherein a first side of the phase change material layer is in direct contact with the first electrode. A second electrode located adjacent to phase change material layer, wherein the second electrode is in direct contact with a second side of the phase change material layer, wherein the first side and the second side are different sides of the phase change material layer. An airgap is located directly above the phase change material layer, wherein the airgap provides space for the phase change material to expand or restrict.

FILAMENT-METAL OXIDE CHANNEL EXCHANGE RESISTIVE MEMORY DEVICE

An approach to provide a semiconductor structure for a resistive switch device. The resistive switch device includes a bottom electrode, a dielectric material over the bottom electrode, and a metal oxide material on a portion of the dielectric material connecting to a portion of a top electrode where the metal oxide material has a controlled volume. Additionally, the approach includes a plurality of the resistive switch devices in a crossbar. The crossbar array includes the plurality of resistive switch devices on more than one bottom electrode and at least one top electrode connecting to the plurality of resistive switch devices.