A robot includes a robot torso, a robot arm, a main controller, and a plurality of bundles of cables; wherein a plurality of shoulder effectors are configured to drive the robot arm to move are disposed on the robot torso, a plurality of arm effectors that are relatively movable are disposed in sequence on the robot arm, and the main controller is disposed on the robot torso and configured to control a corresponding effector to operate, such that the robot arm has a plurality of degrees of freedom; any adjacent two of the main controller, the plurality of shoulder effectors, and the plurality of arm effectors are electrically connected by a cable bundle, each of the plurality of bundles of cables is disposed on an outer surface of the shoulder effector or the arm effector which the bundle of cables travels through.

A robot arm including a rotating body connected to a base, an arm rotating about a central axis of the rotating body, a moving pulley provided at the arm and revolving along a circular track which is concentric with the rotating body, a reference pulley provided at the base and positioned on an inner side with respect to the circular track, a spring embedded in the arm and compressed or stretched in a lengthwise direction of the arm, a string compressing the spring and wound around the moving pulley and the reference pulley, and a plurality of roller bearings arranged to be spaced apart from each other along an outer circumference of the rotating body, rotating about a rotation axis parallel to the central axis of the rotating body, and configured to be in contact with the string is provided.

A robot arm including a rotating body connected to a base, an arm rotating about a central axis of the rotating body, a moving pulley provided at the arm and revolving along a circular track which is concentric with the rotating body, a reference pulley provided at the base and positioned on an inner side with respect to the circular track, a spring embedded in the arm and compressed or stretched in a lengthwise direction of the arm, a string compressing the spring and wound around the moving pulley and the reference pulley, and a plurality of roller bearings arranged to be spaced apart from each other along an outer circumference of the rotating body, rotating about a rotation axis parallel to the central axis of the rotating body, and configured to be in contact with the string is provided.

A robot includes a body, a first robotic arm physically coupled to the body, and a first discrete hydraulic system comprising a first plurality of hydraulic components. The first robotic arm includes a first end effector. The first hydraulic system is operable to control the first end effector. The first plurality of hydraulic components are integrated with the first robotic arm. In some implementations, the robot includes a second robotic arm physically coupled to the body, and a second discrete hydraulic system consisting of a second plurality of hydraulic components. The second robotic arm includes a second end effector. The second hydraulic system is operable to control the second end effector. The second plurality of hydraulic components are integrated with the second robotic arm. The second hydraulic system is hydraulically-isolated from the first hydraulic system.

Provided is a robot system which includes: a robot; a controller controlling the robot and causing the robot to operate in a plurality of operation modes; and a display device attached on the robot and caused by the controller to operate in patterns in accordance with the operation modes, the patterns being different from one another. The display device includes: a sheet-like base part being deformable in a shape in accordance with an outer surface of the robot and having flexibility; one or more display parts fixed on the base part; and a fixture maintaining the base part in a state in which the base part is attached on the outer surface of the robot.

Provided is a robot system which includes: a robot; a controller controlling the robot and causing the robot to operate in a plurality of operation modes; and a display device attached on the robot and caused by the controller to operate in patterns in accordance with the operation modes, the patterns being different from one another. The display device includes: a sheet-like base part being deformable in a shape in accordance with an outer surface of the robot and having flexibility; one or more display parts fixed on the base part; and a fixture maintaining the base part in a state in which the base part is attached on the outer surface of the robot.

An apparatus for semiconductor manufacturing includes an input port to receive a carrier, wherein the carrier includes a carrier body, a housing installed onto the carrier body, and a filter installed between the carrier body and the housing. The apparatus further includes a first robotic arm to uninstall the housing from the carrier and to reinstall the housing into the carrier; one or more second robotic arms to remove the filter from the carrier and to install a new filter into the carrier; and an output port to release the carrier to production.

A separable robotic interface includes a carrier portion, configured to attach to a free end of a robotic arm, and a probe portion, configured to be attached to a toolhead. The carrier portion includes a spring-loaded plug, coaxial with and arranged to slide lengthwise within the carrier portion, one or more ball bearings, arranged within holes of the carrier portion, and an axial lock feature. The probe portion may include a probe, which includes one or more recesses on lateral exterior surfaces of the probe and configured to receive ball bearings in order to axially lock the carrier portion to the probe portion in response to the probe portion inserted a predetermined distance into the carrier portion and the axial lock feature is activated. The probe portion is further configured to radially align with the carrier portion in response to an alignment feature engages the carrier portion.

A separable robotic interface includes a carrier portion, configured to attach to a free end of a robotic arm, and a probe portion, configured to be attached to a toolhead. The carrier portion includes a spring-loaded plug, coaxial with and arranged to slide lengthwise within the carrier portion, one or more ball bearings, arranged within holes of the carrier portion, and an axial lock feature. The probe portion may include a probe, which includes one or more recesses on lateral exterior surfaces of the probe and configured to receive ball bearings in order to axially lock the carrier portion to the probe portion in response to the probe portion inserted a predetermined distance into the carrier portion and the axial lock feature is activated. The probe portion is further configured to radially align with the carrier portion in response to an alignment feature engages the carrier portion.

A tool exchange device includes a male member and a female member. The male member is attached to a side of a main body of an apparatus. The female member is attached to a side of a tool. The male member and the female member includes a plurality of coupling portions mechanically connected to each other, and a connector portion that connects a power supply path arranged in the main body and the tool to each other. The plurality of coupling portions and the connector portion are provided in each of joining surfaces of the male member and the female member. The plurality of coupling portions are arranged around the connector portion.