A working device has a configuration with seven degrees of freedom, and is configured to perform work using an end effector. The working device includes: a linear motion unit having three degrees of freedom; a rotary unit having three degrees of freedom; and a rotary drive mechanism having one degree of freedom. The rotary drive mechanism is configured to rotate the rotary unit relative to the linear motion unit. The linear motion unit is mounted on a mount such that a base portion thereof is fixed to the mount. The rotary drive mechanism is mounted on an output portion of the linear motion unit. The rotary unit is mounted on an output portion of the rotary drive mechanism. The end effector is mounted on an output portion of the rotary unit.

The present invention involves a fill needle system for aseptically dispensing a pharmaceutical fluid in an aseptic chamber comprises a fill needle tubing in fluid communication with a pharmaceutical fluid source via flexible tubing and extending through a fill needle hub; a fill needle dispensing tip disposed at a dispensing end of the fill needle tubing; a fill needle sheath shaped and arranged to removably mate with and seal aseptically to the fill needle hub to form an aseptically sealed volume enclosing the dispensing tip; and a fluid pressure pulse induction system disposed and configured to compress the flexible tubing in order to dislodge droplets of pharmaceutical fluid retained on the dispensing tip after halting dispensing of the pharmaceutical fluid. An associated method of dispensing pharmaceutical fluid comprises operating the fluid pressure pulse induction system to dislodge the droplets. The system may comprise a controller for automatically controlling the dispensing and droplet dislodging.

The present invention involves a fill needle system for aseptically dispensing a pharmaceutical fluid in an aseptic chamber comprises a fill needle tubing in fluid communication with a pharmaceutical fluid source via flexible tubing and extending through a fill needle hub; a fill needle dispensing tip disposed at a dispensing end of the fill needle tubing; a fill needle sheath shaped and arranged to removably mate with and seal aseptically to the fill needle hub to form an aseptically sealed volume enclosing the dispensing tip; and a fluid pressure pulse induction system disposed and configured to compress the flexible tubing in order to dislodge droplets of pharmaceutical fluid retained on the dispensing tip after halting dispensing of the pharmaceutical fluid. An associated method of dispensing pharmaceutical fluid comprises operating the fluid pressure pulse induction system to dislodge the droplets. The system may comprise a controller for automatically controlling the dispensing and droplet dislodging.

A vacuum transfer device, which is arranged between a process chamber and a load lock chamber and transfers a substrate between the process chamber and the load lock chamber, includes a container, a transfer device, an exhaust device, a dew-point meter, and a control device. The container is connected to each of the process chamber and the load lock chamber via a gate valve. The transfer device is provided inside the container and transfers the substrate between the process chamber and the load lock chamber. The exhaust device exhausts a gas in the container. The dew-point meter measures a dew-point temperature of the gas in the container. The control device determines whether a process is ready to be executed, based on the dew-point temperature measured by the dew-point meter, and when the process is ready to be executed, notifies that fact to a user of the vacuum transfer device.

A vacuum transfer device, which is arranged between a process chamber and a load lock chamber and transfers a substrate between the process chamber and the load lock chamber, includes a container, a transfer device, an exhaust device, a dew-point meter, and a control device. The container is connected to each of the process chamber and the load lock chamber via a gate valve. The transfer device is provided inside the container and transfers the substrate between the process chamber and the load lock chamber. The exhaust device exhausts a gas in the container. The dew-point meter measures a dew-point temperature of the gas in the container. The control device determines whether a process is ready to be executed, based on the dew-point temperature measured by the dew-point meter, and when the process is ready to be executed, notifies that fact to a user of the vacuum transfer device.

A remote arm for a manipulator is disclosed, which has a boom tube having a distal end and housing a mechanical communication chain. A floating gearbox assembly is coupled to the boom tube and has an outer framework rigidly coupled to the distal end of the boom tube. An inner framework is retained by the outer framework and is rotatable relative to the outer framework. A drive gear is disposed in the inner framework, which is in mechanical communication with the mechanical communication chain. A wrist joint has a wrist joint housing and an output gear is disposed in the wrist joint housing, where the wrist joint housing is configured to detachably couple to the outer framework. The output gear is configured to mechanically communicate with the drive gear when the wrist joint housing is coupled to the outer framework.

A disposable isolator including a bottom, a flexible peripheral wall defining a clean and sterile inner volume, a first pair of joining parts forming a first tight junction at the bottom, this first pair including an inner part placed inside the inner volume and suitable for positioning containers, and an outer part placed outside the inner volume and suitable for cooperating by shape matching with a positioning cavity provided on a support table, and a second pair of joining parts forming a second tight junction at the peripheral wall and including an outer part suitable for being connected to a robot, and an inner part suitable for being connected to a manipulating tool, the first and second pairs being designed so that the robot applies the manipulating tool on the containers positioned on the support table.

A next generation painting robot with advanced fluid delivery system, enhanced kinematics and a service airlock compartment. The painting robot includes a fluid delivery system which places color changing valves and pumping hardware on the back side of the robot's mounting pedestal, where it can be serviced without a technician having to enter the spray booth. Additionally, the robot enables routine cleaning and maintenance to be performed without personnel entering the spray booth and without stopping the vehicle conveyor, due to simplified outer arm design, improved home positioning and an airlock booth adjacent to the robot pedestal. Service personnel can clean and service the applicator and other components on the outer arm from the airlock booth, while other robots continue painting parts moving on the conveyor, without allowing fume-laden vapors into the operator aisle.

A next generation painting robot with advanced fluid delivery system, enhanced kinematics and a service airlock compartment. The painting robot includes a fluid delivery system which places color changing valves and pumping hardware on the back side of the robot's mounting pedestal, where it can be serviced without a technician having to enter the spray booth. Additionally, the robot enables routine cleaning and maintenance to be performed without personnel entering the spray booth and without stopping the vehicle conveyor, due to simplified outer arm design, improved home positioning and an airlock booth adjacent to the robot pedestal. Service personnel can clean and service the applicator and other components on the outer arm from the airlock booth, while other robots continue painting parts moving on the conveyor, without allowing fume-laden vapors into the operator aisle.

A factory interface includes a housing, a front surface of the housing having multiple load ports, a robot having an arm and an end effector, and a track attached to a floor within the housing. The robot is adapted to move horizontally along the track to multiple positions from which the arm can reach the end effector of the robot into a front opening unified pod attached to any of the multiple load ports.