To provide a semiconductor device including element layers that are stacked. A first wiring layer and a second wiring layer are stacked between a first element layer and a second element layer. A third wiring layer and a fourth wiring layer are stacked over the second element layer. Transistors of logic cells are provided in the first element layer. Wirings of the logic cells are provided in the first wiring layer or the second wiring layer. Input ports and output ports of the logic cells are provided in the third wiring layer. The input port of one of the logic cells is connected to the output port of another logic cell through the wiring of the third wiring layer or the fourth wiring layer. Connecting the logic cells through the wiring layers over the second element layer improves the efficiency of steps of arranging and connecting the logic cells.

A semiconductor device includes a bulk substrate of a first conductivity type, a first semiconductor on insulator (SOI) block in the bulk substrate, a first well of the first conductivity type in the first SOI block, a second well of a second conductivity type in the first SOI block, a first guard ring of the first conductivity type in the first SOI block around at least a portion of a periphery of the first SOI block, and a second guard ring of the second conductivity type in the first SOI block around at least a portion of the periphery of the first SOI block. The first conductivity type is different than the second conductivity type.

A semiconductor device or the like capable of preventing malfunction of a driver circuit is provided. In a driver circuit for driving a power device used for current supply, a transistor including an oxide semiconductor is used as a transistor in a circuit (specifically, for example, a level shift circuit) requiring a high withstand voltage. In addition, a transistor (for example, a silicon transistor or the like) capable of higher operation than a transistor including an oxide semiconductor is preferably used as a transistor in a circuit (specifically, for example, a buffer circuit, a flip-flop circuit, or the like) requiring a lower withstand voltage than the level shift circuit.

Provided is a semiconductor device capable of holding data for a long period. The semiconductor device includes first to third transistors, a capacitor, and a circuit. The third transistor includes a first gate and a second gate. A gate of the first transistor is electrically connected to a first terminal of the capacitor. A first terminal of the first transistor is electrically connected to the second gate. A second terminal of the first transistor is electrically connected to the circuit. A gate of second transistor is electrically connected to a first terminal of the second transistor. A first terminal of the second transistor is electrically connected to the second gate. A second terminal of the second transistor is electrically connected to a first terminal of the capacitor. The circuit is configured to generate a negative potential. A channel formation region of the first transistor preferably includes an oxide semiconductor.

A semiconductor device in which a variation of transistor characteristics is small is provided. The semiconductor device includes a transistor. The transistor includes a first insulator, a first oxide over the first insulator, a first conductor, a second conductor, and a second oxide, which is positioned between the first conductor and the second conductor, over the first oxide, a second insulator over the second oxide, and a third conductor over the second insulator. A top surface of the first oxide in a region overlapping with the third conductor is at a lower position than a position of a top surface of the first oxide in a region overlapping with the first conductor. The first oxide in the region overlapping with the third conductor has a curved surface between a side surface and the top surface of the first oxide, and the curvature radius of the curved surface is greater than or equal to 1 nm and less than or equal to 15 nm.

A semiconductor device in which a variation of transistor characteristics is small is provided. The semiconductor device includes a transistor. The transistor includes a first insulator, a first oxide over the first insulator, a first conductor, a second conductor, and a second oxide, which is positioned between the first conductor and the second conductor, over the first oxide, a second insulator over the second oxide, and a third conductor over the second insulator. A top surface of the first oxide in a region overlapping with the third conductor is at a lower position than a position of a top surface of the first oxide in a region overlapping with the first conductor. The first oxide in the region overlapping with the third conductor has a curved surface between a side surface and the top surface of the first oxide, and the curvature radius of the curved surface is greater than or equal to 1 nm and less than or equal to 15 nm.

A method of forming a substrate contact in a vertical transistor device includes patterning a sacrificial layer to form an opening in the sacrificial layer, the sacrificial layer disposed on hardmask arranged on a substrate, and the substrate including a bulk semiconductor layer, a buried oxide layer arranged on the bulk semiconductor layer, and a semiconductor layer arranged on the buried oxide layer; forming oxide spacers on sidewalls of the opening in the sacrificial layer; using the oxide spacers as a pattern to etch a trench through the substrate, the trench stopping at a region within the bulk semiconductor layer; and depositing a conductive material in the trench to form the substrate contact.

A semiconductor device includes a semiconductor-on-insulator (SOI) wafer having a semiconductor substrate, a buried insulating layer positioned above the semiconductor substrate, and a semiconductor layer positioned above the buried insulating layer. A shallow trench isolation (STI) structure is positioned in the SOI wafer and separates a first region of the SOI wafer from a second region of the SOI wafer, wherein the semiconductor layer is not present above the buried insulating layer in the first region, and wherein the buried insulating layer and the semiconductor layer are not present in at least a first portion of the second region adjacent to the STI structure. A dielectric layer is positioned above the buried insulating layer in the first region, and a conductive layer is positioned above the dielectric layer in the first region.

A semiconductor device structure includes a hybrid substrate having a semiconductor-on-insulator (SOI) region that includes an active semiconductor layer, a substrate material and a buried insulating material interposed between the active semiconductor layer and the substrate material, and a bulk semiconductor region that includes the substrate material. An insulating structure is positioned in the hybrid substrate, wherein the insulating structure separates the bulk region from the SOI region, and a gate electrode is positioned above the substrate material in the bulk region, wherein the insulating structure is in contact with two opposing sidewalls of the gate electrode.

One aspect of the disclosure relates to and integrated circuit structure and methods of forming the same. The integrated circuit structure may include: a thin gate dielectric device on a substrate, the thin gate dielectric device including: a first interfacial layer over a set of fins within the substrate, wherein the interfacial layer has a thickness of approximately 1.0 nanometers (nm) to approximately 1.2 nm; and a thick gate dielectric device on the substrate adjacent to the thin gate dielectric device, the thick gate dielectric device including: a second interfacial layer over the set of fins within the substrate; and a nitrided oxide layer over the second interfacial layer, wherein the nitrided oxide layer includes a thickness of approximately 3.5 nm to approximately 5.0 nm.