An example of a flow cell includes a substrate and a cured, patterned resin on the substrate. The cured, patterned resin has nano-depressions separated by interstitial regions. Each nano-depression has a largest opening dimension ranging from about 10 nm to about 1000 nm. The cured, patterned resin also includes an interpenetrating polymer network. The interpenetrating polymer network of the cured, patterned resin includes an epoxy-based polymer and a (meth)acryloyl-based polymer.

An imprint apparatus including a mold deformation mechanism configured to deform a mold by applying a pressure to the mold, a substrate deformation mechanism configured to deform the substrate by applying a pressure to the substrate, a measurement unit configured to measure a deformation amount of the mold and a deformation amount of the substrate during separating the mold from the cured imprint material on the substrate, and a control unit configured to control, during the separating, a pressure to be applied to the mold by the mold deformation mechanism and a pressure to be applied to the substrate by the substrate deformation mechanism based on the deformation amounts measured by the measurement unit such that a difference between the deformation amount of the mold and the deformation amount of the substrate falls within an allowable range.

A method for manufacturing a product having a surface provided with embossments, includes bringing a material web is in contact with a roller. The roller is provided with a relief at its surface, with which, via this relief, embossments are formed in the material web. The roller has a circumference of which, or at least certain parts thereof that are variable, or alternatively the circumference of the roller is variable by making use of embossing elements, wherein the mutual angular position thereof is adjustable.

An imprint device according to an embodiment includes: a stage, which supports a substrate; a press roller, which presses a film with respect to the substrate; a first load cell and a second load cell, which are disposed corresponding to opposite ends of the press roller, respectively; and a controller, which monitors a release state of the film based on an output of the first load cell and an output of the second load cell.

A storage device stores an ejection cartridge including an accommodating container that accommodates an ejection material, and an ejection head that includes an ejection port for ejecting the ejection material accommodated in the accommodating container. The storage device includes a mount on which the ejection cartridge is mounted, and includes a pressure regulating tank configured to control a pressure of an inside of the accommodating container of the ejection cartridge fixed to the mount with its ejection port not enclosed.

An imprint apparatus includes: a movable housing unit; an ejection head provided in the housing unit and configured to eject an ejection material; a flexible member provided in the housing unit and separating the housing unit into a first storing space communicating with the ejection head and storing the ejection material and a second storing space storing hydraulic liquid; a first channel and a second channel communicating with the second storing space; a pressure control unit configured to control a pressure in the second storing space through the channels; and a bubble detection unit configured to detect bubbles in the channels.

The present invention provides an imprint method of forming a pattern of an imprint material on a shot region of a substrate using a mold, the method comprising: supplying the imprint material onto the shot region so as to arrange droplets of the imprint material in arrangement patterns different from each other between a first partial region and a second partial region adjacent to each other in the shot region; performing alignment between the mold and the shot region after it is started to bring the mold and the imprint material into contact with each other; performing preliminary curing of irradiating the imprint material on the shot region with light to increase a viscoelasticity of the imprint material before the alignment is completed; and performing main curing of curing the imprint material on the shot region after the alignment is completed.

The imprint apparatus according to the present invention causes a supplying unit to supply an imprint material onto at least a first region in a predetermined shot region on a substrate, causes an energy supplying unit to supply energy to the imprint material on the first region so as to increase a degree of polymerization of the imprint material on the first region, causes a moving unit to move at least one of a mold and the substrate such that a pattern region formed on the mold and the imprint material on the substrate are brought into contact with each other, and causes the energy supplying unit to supply the energy to the imprint material on the predetermined shot region such that the imprint material on the predetermined shot region is solidified after the pattern region and the imprint material on the substrate are brought into contact with each other.

The invention pertains to an imprinting apparatus for a roll-to-plate process comprises a flexible master with an imprint pattern, a plate carrier and a substrate and curable imprint resin. The substrate is located on the plate carrier. The flexible master carries an inverse structure (imprint pattern), which is required for the desired product. The curable resin (also mentioned as lacquer) is placed on the substrate and/or the flexible master. During the imprinting process the flexible master is pressed upon the substrate with the curable resin in between. The plate carrier comprises a cavity in which the substrate is located. At least one substrate side-face is at least partially unenclosed by the cavity.

A further idea of this invention pertains to two roll-to-plate imprinting processes.

This application provides an alignment film transfer printing plate including a substrate, a first dot arranged on the substrate, and a plurality of second dots arranged around the first dot. A height of each of the second dots in a direction perpendicular to a surface of the substrate is less than or equal to a height of the first dot in the direction perpendicular to the surface of the substrate, a blocking portion is formed on an end of the first dot away from the substrate, and an area of an end surface of each of the second dots away from the substrate is less than an area of an end surface of the blocking portion away from the substrate.