Disclosed are an imprinting master-template and a manufacturing method therefor, wherein the method includes a master-template and a cushioning structure. A surface of the master-template is provided with a structural area and a non-structural area, the non-structural area being provided on a lateral edge of the structural area, and the structural area being provided with a structural member. The cushioning structure is provided in the non-structural area, when the imprinting master-template is transferred to form the transferring structure for the flexible template, the cushioning structure is used to be imprinted to form a supporting structure that supports the flexible template.

An imprint apparatus that can curb a decrease in throughput is provided. The imprint apparatus curs and forms a pattern of an imprint material sequentially in a plurality of shot areas on a substrate using a mold including a patterned part and includes: an alignment measurement unit configured to measure a relative position between the substrate and the mold by detecting a mark formed on the substrate and a mark formed on the mold; an alignment illumination unit including a light amount adjusting mechanism for adjusting a light amount of light emitted from a light source and configured to illuminate a marks on the mold and the substrate such that a marks are able to be detected by the alignment measurement unit; and a control unit configured to cure the imprint material in a state in which the mold and the substrate have been aligned on the basis of a measurement result from the alignment measurement unit and then to perform control such that adjustment of the light amount adjusting mechanism is started such that an illumination condition when the alignment illumination unit illuminates a shot area on which a pattern is to be next formed is satisfied.

A mold including a first part and a second part, wherein the first part includes a first surface and a second surface on an opposite side of the first surface, the second surface includes a concave portion having a concave shape, the first surface includes a convex portion and having a convex shape, the second part includes a third surface combined to the convex portion of the first part, and a fourth surface on the opposite side of the third surface, on which a pattern to be transferred to a transfer target is formed, the first part is made of a material having a first elastic modulus, and the second part is made of a material having a second elastic modulus lower than the first elastic modulus.