A method includes: storing a first flow rate from an oxygen mass flow controller for supplying an oxygen with an ozone generator turned off and measuring a flow rate of the oxygen supplied to the ozone generator, and a second flow rate from at least one ozone mass flow controller provided in flow paths; supplying the ozone into a processing container via the flow paths to perform multiple times a predetermined ozone-based process; acquiring a third flow rate from the oxygen mass flow controller and a fourth flow rate from the at least one ozone mass flow controller, by supplying the oxygen with the ozone generator turned off during a predetermined period between the ozone-based processes; and determining whether the fourth flow rate is a normal value by comparing the first and second flow rates with the third and fourth flow rates, respectively.

A method includes: storing a first flow rate from an oxygen mass flow controller for supplying an oxygen with an ozone generator turned off and measuring a flow rate of the oxygen supplied to the ozone generator, and a second flow rate from at least one ozone mass flow controller provided in flow paths; supplying the ozone into a processing container via the flow paths to perform multiple times a predetermined ozone-based process; acquiring a third flow rate from the oxygen mass flow controller and a fourth flow rate from the at least one ozone mass flow controller, by supplying the oxygen with the ozone generator turned off during a predetermined period between the ozone-based processes; and determining whether the fourth flow rate is a normal value by comparing the first and second flow rates with the third and fourth flow rates, respectively.

Reactive oxygen species formulations as well as methods for making and using such formulations. Reactive oxygen species formulations comprising one or more parent oxidants, such as peroxides, or peroxyacids, and one or more reactive oxygen species (ROS). The formulations optionally contain in addition one or more reactive species other than ROS. The reactive oxygen species and other reactive species when present provide chemical reactivity, oxidative activity and/or antimicrobial activity not provided otherwise by the parent oxidant. The invention provides methods for making such formulation and applications of such formulations. In certain formulations, ROS and other reactive species are generated in situ in the formulation by an activation event, such as a change in pH to an activation pH, a change in temperature, irradiation with electromagnetic radiation or by the addition of one or more precursors or a combination of precursors. In certain formulations, peracid containing precursors are activated by adjusting the pH of the formulation to be within an activation pH range for generation of singlet oxygen. In other formulations, formulations containing peracid and superoxide also evolve singlet oxygen. Formulations containing different combinations of ROS exhibit differences in oxidation activity and antimicrobial activity.

Reactive oxygen species formulations as well as methods for making and using such formulations. Reactive oxygen species formulations comprising one or more parent oxidants, such as peroxides, or peroxyacids, and one or more reactive oxygen species (ROS). The formulations optionally contain in addition one or more reactive species other than ROS. The reactive oxygen species and other reactive species when present provide chemical reactivity, oxidative activity and/or antimicrobial activity not provided otherwise by the parent oxidant. The invention provides methods for making such formulation and applications of such formulations. In certain formulations, ROS and other reactive species are generated in situ in the formulation by an activation event, such as a change in pH to an activation pH, a change in temperature, irradiation with electromagnetic radiation or by the addition of one or more precursors or a combination of precursors. In certain formulations, peracid containing precursors are activated by adjusting the pH of the formulation to be within an activation pH range for generation of singlet oxygen. In other formulations, formulations containing peracid and superoxide also evolve singlet oxygen. Formulations containing different combinations of ROS exhibit differences in oxidation activity and antimicrobial activity.

An oxygen allotrope generator having a tube with an electrically grounded outer surface and an electrically positive inner surface. A plurality of corona reaction plates are spaced along the interior of the tube, the plates being longitudinally inter-connected by wires and being in electrical connection with the electrically positive inner surface of the tube. An outer jacket encloses the tube and provides a second linear pass for partially ozonated gas to flow in the generator. An alternative embodiment includes external distributed ground connections at the locations of the corona reaction.

An oxygen allotrope generator having a tube with an electrically grounded outer surface and an electrically positive inner surface. A plurality of corona reaction plates are spaced along the interior of the tube, the plates being longitudinally inter-connected by wires and being in electrical connection with the electrically positive inner surface of the tube. An outer jacket encloses the tube and provides a second linear pass for partially ozonated gas to flow in the generator. An alternative embodiment includes external distributed ground connections at the locations of the corona reaction.

Systems and methods for generating reactive oxygen species formulations useful in various oxidation applications. Exemplary formulations include singlet oxygen or superoxide and can also contain hydroxyl radicals or hydroperoxy radicals, among others. Formulations can contain other reactive species, including other radicals. Exemplary formulations containing peracids are activated to generate singlet oxygen. Exemplary formulations include those containing a mixture of superoxide and hydrogen peroxide. Exemplary formulations include those in which one or more components of the formulation are generated electrochemically. Formulations of the invention containing reactive oxygen species can be further activated to generate reactive oxygen species using activation chosen from a Fenton or Fenton-like catalyst, ultrasound, ultraviolet radiation or thermal activation. Exemplary applications of the formulations of the invention among others include: cleaning in place applications, water treatment, soil decontamination and flushing of well casings and water distribution pipes.

Systems and methods for generating reactive oxygen species formulations useful in various oxidation applications. Exemplary formulations include singlet oxygen or superoxide and can also contain hydroxyl radicals or hydroperoxy radicals, among others. Formulations can contain other reactive species, including other radicals. Exemplary formulations containing peracids are activated to generate singlet oxygen. Exemplary formulations include those containing a mixture of superoxide and hydrogen peroxide. Exemplary formulations include those in which one or more components of the formulation are generated electrochemically. Formulations of the invention containing reactive oxygen species can be further activated to generate reactive oxygen species using activation chosen from a Fenton or Fenton-like catalyst, ultrasound, ultraviolet radiation or thermal activation. Exemplary applications of the formulations of the invention among others include: cleaning in place applications, water treatment, soil decontamination and flushing of well casings and water distribution pipes.

The present invention relates to a polishing agent including: metal oxide particles; an organic acid having a monodentate ligand; a nonionic polymer; and water, in which the polishing agent has a pH of from 3.0 to 7.0, and the nonionic polymer includes at least one selected from the group consisting of polyglycerin, polyoxyethylene polyglyceryl ether and polyoxypropylene polyglyceryl ether.

Disclosed herein are rapid cycle pressure swing adsorption (PSA) process for separating O.sub.2 from N.sub.2 and/or Ar. The processes use a carbon molecular sieve (CMS) adsorbent having an O.sub.2/N.sub.2 and/or O.sub.2/Ar kinetic selectivity of at least 5 and an O.sub.2 adsorption rate (1/s) of at least 0.2000 as determined by linear driving force model at 1 atma and 86 F.