Annealing treatments for modified titania-silica glasses and the glasses produced by the annealing treatments. The annealing treatments include an isothermal hold that facilitates equalization of non-uniformities in fictive temperature caused by non-uniformities in modifier concentration in the glasses. The annealing treatments may also include heating the glass to a higher temperature following the isothermal hold and holding the glass at that temperature for several hours. Glasses produced by the annealing treatments exhibit high spatial uniformity of CTE, CTE slope, and fictive temperature, including in the presence of a spatially non-uniform concentration of modifier.

According to an aspect of the disclosure, a glass manufacturing system includes a hot-end subsystem, including: a submerged combustion melter that melts feedstock to produce molten glass; a stiller that receives the molten glass from the submerged combustion melter and that includes a stilling tank to still the molten glass and that is configured to control outflow of the stilled molten glass to effectively decouple viscosity of the molten glass from the flow rate of the molten glass and thereby control finer molten glass levels; and a finer that is mechanically decoupled from the stiller, and that receives and fines the stilled molten glass to produce fined molten glass. Many other aspects of the system are also disclosed and claimed.

According to an aspect of the disclosure, a glass manufacturing system includes a hot-end subsystem, including: a submerged combustion melter that melts feedstock to produce molten glass; a stiller that receives the molten glass from the submerged combustion melter and that includes a stilling tank to still the molten glass and that is configured to control outflow of the stilled molten glass to effectively decouple viscosity of the molten glass from the flow rate of the molten glass and thereby control finer molten glass levels; and a finer that is mechanically decoupled from the stiller, and that receives and fines the stilled molten glass to produce fined molten glass. Many other aspects of the system are also disclosed and claimed.

Annealing treatments for modified titania-silica glasses and the glasses produced by the annealing treatments. The annealing treatments include an isothermal hold that facilitates equalization of non-uniformities in fictive temperature caused by non-uniformities in modifier concentration in the glasses. The annealing treatments may also include heating the glass to a higher temperature following the isothermal hold and holding the glass at that temperature for several hours. Glasses produced by the annealing treatments exhibit high spatial uniformity of CTE, CTE slope, and fictive temperature, including in the presence of a spatially non-uniform concentration of modifier.

Annealing treatments for modified titania-silica glasses and the glasses produced by the annealing treatments. The annealing treatments include an isothermal hold that facilitates equalization of non-uniformities in fictive temperature caused by non-uniformities in modifier concentration in the glasses. The annealing treatments may also include heating the glass to a higher temperature following the isothermal hold and holding the glass at that temperature for several hours. Glasses produced by the annealing treatments exhibit high spatial uniformity of CTE, CTE slope, and fictive temperature, including in the presence of a spatially non-uniform concentration of modifier.

The present invention provides for synthesizing high optical quality multicomponent chalcogenide glasses without refractive index perturbations due to striae, phase separation or crystal formation using a two-zone furnace and multiple fining steps. The top and bottom zones are initially heated to the same temperature, and then a temperature gradient is created between the top zone and the bottom zone. The fining and cooling phase is divided into multiple steps with multiple temperature holds.

The present invention relates to a plasma-resistant glass, chamber interior parts for a semiconductor manufacturing process, and methods for manufacturing same, and specifically, to a plasma-resistant glass and a method for manufacturing same, wherein the content of components of the plasma-resistant glass can be controlled to reduce the thermal expansion coefficient of the glass and thereby prevent the glass from being damaged due to thermal shock when used at a high-temperature.

The present invention provides a method for synthesizing high optical quality multicomponent chalcogenide glasses without refractive index perturbations due to striae, phase separation or crystal formation using a two-zone furnace and multiple fining steps. The top and bottom zones are initially heated to the same temperature, and then a temperature gradient is created between the top zone and the bottom zone. The fining and cooling phase is divided into multiple steps with multiple temperature holds.

A refractive index device and method of making it include obtaining a glass structure comprising a plurality of nucleation sites. The glass structure is formed from a glass composition that comprises a first chemical component and a second chemical component. A crystal of the second chemical component has a different second refractive index from a first refractive index of the first chemical component. Each nucleation site defines where a crystal of the second chemical component can be grown. The method includes causing crystals of the second chemical component to grow in situ at a set of the plurality of nucleation sites in order to produce a spatial gradient of a refractive index in the glass structure.

A refractive index device and method of making it include obtaining a glass structure comprising a plurality of nucleation sites. The glass structure is formed from a glass composition that comprises a first chemical component and a second chemical component. A crystal of the second chemical component has a different second refractive index from a first refractive index of the first chemical component. Each nucleation site defines where a crystal of the second chemical component can be grown. The method includes causing crystals of the second chemical component to grow in situ at a set of the plurality of nucleation sites in order to produce a spatial gradient of a refractive index in the glass structure.