Patent classifications
C07D307/00
SALT, ACID GENERATOR, RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN
A salt represented by formula (I), a salt or resin including a structural unit represented by formula (IP), an acid generator including the salt, an acid generator including the resin, or a resist composition including the acid generator.
##STR00001##
SALT, ACID GENERATOR, RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN
A salt represented by formula (I), a salt or resin including a structural unit represented by formula (IP), an acid generator including the salt, an acid generator including the resin, or a resist composition including the acid generator.
##STR00001##
Salt, acid generator, resist composition and method for producing resist pattern
Disclosed are a salt represented by formula (I), an acid generator and a resist composition: ##STR00001##
wherein Q.sup.1 and Q.sup.2 each represent a fluorine atom or a perfluoroalkyl group; R.sup.11 and R.sup.12 each represent a hydrogen atom, a fluorine atom or a perfluoroalkyl group; z represents an integer of 0 to 6; X.sup.1 and X.sup.2 each represent *COO, *OCO, etc.; L.sup.1 represents a single bond or a hydrocarbon group which may have a substituent; A.sup.1 represents a group having a lactone structure which may have a substituent; L.sup.2 and L.sup.3 each represent a single bond or an alkanediyl group; R.sup.1 represents an iodine atom or a haloalkyl group; R.sup.2 represents a halogen atom, a hydroxy group, a haloalkyl group or an alkyl group; m2 represents an integer of 0 to 4; and Z.sup.+ represents an organic cation.
RESIN, COMPOSITION AND USE
The present invention relates to an alkyd resin comprising the condensation product of at least the following components (A) a polybasic acid, (B) a polyhydric alcohol, and (C) a linear C.sub.12-C.sub.60 hydrocarbo monocarboxylic acid, and optionally (D) at least one component other than any of components A to C characterized in that at least a part of the polybasic acid (A) is a (optionally hydrogenated) Diels Alder adduct of citraconic acid with C.sub.4-C.sub.14 conjugated diene, a (optionally hydrogenated) Diels Alder adduct of citraconic anhydride with C.sub.4-C.sub.14 conjugated diene, a half ester of such a Diels Alder adduct and/or a diester of such a Diels Alder adduct.
ACID DIFFUSION CONTROL AGENT, RADIATION-SENSITIVE RESIN COMPOSITION, RESIST PATTERN-FORMING METHOD, COMPOUND, AND PRODUCTION METHOD
An acid diffusion control agent includes a compound represented by a formula (1), a compound represented by a formula (2) or both thereof. R.sup.1 represents a hydrocarbon group comprising a monovalent alicyclic structure, or the like. R.sup.2 and R.sup.3 each independently represent a monovalent hydrocarbon group, or the like. R.sup.4 and R.sup.5 each independently represent a monovalent hydrocarbon group, or the like. R.sup.6 and R.sup.7 each independently represent a monovalent hydrocarbon group, or the like. R.sup.8 represents a monocyclic heterocyclic group together with the ester group and with the carbon atom. n is an integer of 1 to 6. R.sup.9 represents a monovalent hydrocarbon group, or the like. R.sup.10 represents a monovalent hydrocarbon group having 1 to 10 carbon atoms. R.sup.11 and R.sup.12 each independently represent a monovalent hydrocarbon group, or the like. R.sup.13 and R.sup.14 each independently represent a monovalent hydrocarbon group, or the like.
##STR00001##
ACID DIFFUSION CONTROL AGENT, RADIATION-SENSITIVE RESIN COMPOSITION, RESIST PATTERN-FORMING METHOD, COMPOUND, AND PRODUCTION METHOD
An acid diffusion control agent includes a compound represented by a formula (1), a compound represented by a formula (2) or both thereof. R.sup.1 represents a hydrocarbon group comprising a monovalent alicyclic structure, or the like. R.sup.2 and R.sup.3 each independently represent a monovalent hydrocarbon group, or the like. R.sup.4 and R.sup.5 each independently represent a monovalent hydrocarbon group, or the like. R.sup.6 and R.sup.7 each independently represent a monovalent hydrocarbon group, or the like. R.sup.8 represents a monocyclic heterocyclic group together with the ester group and with the carbon atom. n is an integer of 1 to 6. R.sup.9 represents a monovalent hydrocarbon group, or the like. R.sup.10 represents a monovalent hydrocarbon group having 1 to 10 carbon atoms. R.sup.11 and R.sup.12 each independently represent a monovalent hydrocarbon group, or the like. R.sup.13 and R.sup.14 each independently represent a monovalent hydrocarbon group, or the like.
##STR00001##
RESIST COMPOSITION, PATTERNING PROCESS, AND BARIUM, CESIUM AND CERIUM SALTS
A resist composition comprising a base resin comprising acid labile group-containing recurring units and preferably acid generator-containing recurring units, and a sodium, magnesium, potassium, calcium, rubidium, strontium, yttrium, cesium, barium or cerium salt of -fluorinated sulfonic acid bonded to an alkyl, alkenyl, alkynyl or aryl group exhibits a high resolution and sensitivity and forms a pattern of satisfactory profile with minimal LWR after exposure and development.
RESIST COMPOSITION, PATTERNING PROCESS, AND BARIUM, CESIUM AND CERIUM SALTS
A resist composition comprising a base resin comprising acid labile group-containing recurring units and preferably acid generator-containing recurring units, and a sodium, magnesium, potassium, calcium, rubidium, strontium, yttrium, cesium, barium or cerium salt of -fluorinated sulfonic acid bonded to an alkyl, alkenyl, alkynyl or aryl group exhibits a high resolution and sensitivity and forms a pattern of satisfactory profile with minimal LWR after exposure and development.
Pharmaceutical compositions of Anisomelic acid and the use thereof
A pharmaceutical composition for anti-viral cancer treatment in mammals, comprising a therapeutically effective amount of Anisomelic acid or salts thereof. The pharmaceutical composition may comprise Anisomelic acid or salt thereof in an oil-in-water emulsion, for example in an isotropic mixture of at least one oil and at least one surfactant or, alternatively, in a hydrophilic solvent and a co-solvents or surfactant or a combination thereof. A method of treating or preventing of cancer in a mammal, wherein the p53 pathway is deregulated by viral oncoproteins, is also provided.
Isosorbide-derived epoxy resins and methods of making same
Isosorbide-derived epoxies and methods of making same are disclosed. Isosorbide and its isomers are attached to glycidyl ether to make crosslinkable epoxy resin monomers. Adding the hydrophobic functional group into the backbone of isosorbide epoxy or adjusting the amount and type of crosslinker is operable to modify the mechanical properties and water uptake ratio (from <1 wt % to >50 wt %) of the isosorbide-derived epoxies for different uses. High water uptake epoxies with controllable biodegradation rate are suitable for drug delivery systems or extracellular matrices for biomedical applications, while low water uptake epoxies with strong mechanical properties may be used for can coatings, bone cements and other industrial additives and adhesives.