Disclosed herein are novel iodonium analogs having anticancer and anti-inflammatory activity.

A betaine type iodonium salt containing a C6-C18 alkyl or C4-C18 fluorinated alkyl group and having a iodonium cation and a carboxylate anion within a common molecule is a useful quencher. A chemically amplified positive resist composition comprising the iodonium salt exhibits improved lithography properties such as resolution, LER and pattern profile when processed by photolithography.