The disclosure relates to systems and methods for metering a dose volume of fluid that may be used to treat microelectronic substrates. The system enables precision dispensing of relatively small amounts of a liquid chemical into a chemical bath or processing chamber for microelectronic substrates. The dispensing device may include a fluid conduit with a plurality of actuation devices that may limit fluid communication between the actuation devices and store a portion of the fluid in expandable membrane. The actuation devices may push or pull the fluid within the fluid conduit when the expandable membrane expands or contracts. The configuration and operation of the actuation devices may enable the collection, isolation, and dispensing of the dose volume.

The present invention provides a dense silicic film and a producing method thereof. This method comprises coating a composition for coating film, which comprises a polymer having a silazane bond on a substrate, on a substrate, irradiating with light having a maximal peak in the range of 160-179 nm wavelength, and then irradiating with light having 10-70 nm wavelength longer maximal peak wavelength than the light used in the previous irradiation.

The present invention provides a dense silicic film and a producing method thereof. This method comprises coating a composition for coating film, which comprises a polymer having a silazane bond on a substrate, on a substrate, irradiating with light having a maximal peak in the range of 160-179 nm wavelength, and then irradiating with light having 10-70 nm wavelength longer maximal peak wavelength than the light used in the previous irradiation.

The present disclosure relates to a method for selecting a polyester film in which the polyester film is used as a sealant layer in a multilayer body including a base material layer including a crystalline polyester film, an adhesive layer and a sealant layer in this order, the method including: a step in which FT-IR analysis is performed on the polyester film by a reflection method, and the crystallinity of the polyester film is measured by the following formula; and a step in which a first polyester film having a crystallinity of 2 to 15% is selected:
I.sub.1409=p1I.sub.1340+p2I.sub.1370(Formula 1)
Crystallinity [%]=p1(I.sub.1340/I.sub.1409)100(Formula 2).

The present disclosure relates to a method for selecting a polyester film in which the polyester film is used as a sealant layer in a multilayer body including a base material layer including a crystalline polyester film, an adhesive layer and a sealant layer in this order, the method including: a step in which FT-IR analysis is performed on the polyester film by a reflection method, and the crystallinity of the polyester film is measured by the following formula; and a step in which a first polyester film having a crystallinity of 2 to 15% is selected:
I.sub.1409=p1I.sub.1340+p2I.sub.1370(Formula 1)
Crystallinity [%]=p1(I.sub.1340/I.sub.1409)100(Formula 2).

The invention relates to a process for partial colouring, in particular colour laser engraving, of plastic parts, preferably of thermoplastic parts, very particularly preferably of thermoplastic parts comprising a layer construction, comprising the steps of: i) providing a plastic part (A) having at least one surface; ii) laying a colour tape atop at least one portion of the at least one surface of the plastic part (A) to obtain a surface of the plastic part (A) covered with the colour tape; iii) irradiating the plastic part (A) from ii) with focused, preferably nonionizing, electromagnetic radiation (C) on at least one portion of the surface of the plastic part (A) covered with the colour tape, wherein the partial colouring is effected essentially only at the sites on the plastic part (A) irradiated in step iii), wherein the wavelength range of the focused, preferably nonionizing, electromagnetic radiation (C) is in a range from 200 to 20 000 nm, preferably in a range from 300 to 18 000 nm, particularly preferably in a range from 350 to 16 000 nm.

There is provided a polyethylene film and a laminate which can be used to produce a package having high heat resistance, strength and recycling suitability in place of a lamination film conventionally used in a package. The polyethylene film of the present invention is irradiated with an electron beam on its only one side, and comprises polyethylene and a crosslinking agent, in which the crosslink density of the polyethylene is different between the side irradiated with an electron beam and the other side not irradiated with an electron beam.

There is provided a polyethylene film and a laminate which can be used to produce a package having high heat resistance, strength and recycling suitability in place of a lamination film conventionally used in a package. The polyethylene film of the present invention is irradiated with an electron beam on its only one side, and comprises polyethylene and a crosslinking agent, in which the crosslink density of the polyethylene is different between the side irradiated with an electron beam and the other side not irradiated with an electron beam.

A fluororesin sheet that have achieved both a low coefficient of linear expansion (CTE) and improved adhesiveness to copper foil having a smooth surface, and a copper-clad laminate using the same are obtained. The fluororesin sheet including a fluororesin and a silica particle, in which one or both surfaces of the fluororesin sheet have an oxygen element percentage of 3.0 atomic % or more as measured by X-ray photoelectron spectroscopy (XPS), and the fluororesin sheet has a coefficient of linear expansion (CTE) of 100 ppm/ C. or less.

There is provided a polyethylene film and a laminate which can be used to produce a package having high heat resistance, strength and recycling suitability in place of a lamination film conventionally used in a package. The polyethylene film of the present invention is irradiated with an electron beam on its only one side, and comprises polyethylene and a crosslinking agent, in which the crosslink density of the polyethylene is different between the side irradiated with an electron beam and the other side not irradiated with an electron beam.