C30B27/00

PVT METHOD AND APPARATUS FOR PRODUCING SINGLE CRYSTALS IN A SAFE PROCESS

An apparatus for process-safe production of single crystals includes a process chamber that is fillable with a process gas and that receives a heatable growth cell, a heating device for heating the growth cell, which is adapted to receive a source material and a seed, and a vessel at least radially enclosing the process chamber and comprising at least first and second segments. A related method is also disclosed.

PVT METHOD AND APPARATUS FOR PRODUCING SINGLE CRYSTALS IN A SAFE PROCESS

An apparatus for process-safe production of single crystals includes a process chamber that is fillable with a process gas and that receives a heatable growth cell, a heating device for heating the growth cell, which is adapted to receive a source material and a seed, and a vessel at least radially enclosing the process chamber and comprising at least first and second segments. A related method is also disclosed.