A method for forming a pellicle for an extreme ultraviolet lithography is provided. The method includes forming a pellicle membrane over a filter membrane and transferring the pellicle membrane from the filter membrane to a membrane border. Forming the pellicle membrane includes growing carbon nanotubes (CNTs) from in-situ formed metal catalyst particles in a first reaction zone of a reactor, each of the CNTs including a metal catalyst particle at a growing tip thereof, promoting formation of bundles of nanotubes from the individual CNTs in a second zone of the reactor downstream of the first reaction zone. The bundled CNTs are then collected on the filter membrane.

A hydrostatic radial piston unit of the cam-lobe type of construction including a shaft defining a rotational axis of the hydrostatic radial piston unit. The shaft extends with a front end region from a non-rotary, stationary rear casing to a front casing. Within the front casing a cylinder block is housed and fixed in a torque-proof connection to the front end region of the shaft. In the cylinder block radially reciprocating working pistons are disposed in radially oriented cylinder bores to and from which cylinder bores hydraulic fluid can be conducted by means of a distributor. The distributor is arranged rotationally fixed with respect to the front casing and rotationally free relative to the shaft. A circumferential cam-lobe surface with which the working pistons can interact, is formed integrally with the front casing on its radial inner side.

A method is for operating an axial piston machine whose displacement volume is continuously adjustable using a double-acting control cylinder having two oppositely acting control chambers. The method includes providing a corresponding axial piston machine. An electrically adjustable pressure control valve is connected to one control chamber. Another control chamber is connected to an electrically adjustable 3/2-way switching valve. The method includes providing a target control pressure difference. A zero case is defined as a case in which the target control pressure difference is essentially zero. A positive case is defined as a case in which the target control pressure difference is positive. A negative case is defined as a case in which the target control pressure difference is negative. The method further includes calculating a first and a second control pressure. A case differentiation includes determining whether the zero case, the positive case, or the negative case is present.