The present invention provides a fluorine-containing liquid crystal polymer of Formula (1). The present invention also discloses a fluorine-containing liquid crystal elastomer, which comprises a copolymer of a fluorine-containing liquid crystal polymer of Formula (1) with a near-infrared dye of Formula (2). The fluorine-containing liquid crystal elastomer of the present invention shrinks due to the photothermal conversion effect of the material under the irradiation of near-infrared light, and thus is widely applicable to the field of actuators. The fluorine-containing liquid crystal polymer of the present invention introduces fluorine-containing segments into the cross-linked network of the liquid crystal polymer, to improve the mechanical performance of the material, and greatly extend the service time of light-controlled actuators.

The invention relates to a fluid control device (7, 30) that comprises a fluid transfer chamber (17) and a first fluid conduit (13), a second fluid conduit (11) and a third fluid conduit (14) which are fluidly connected to the fluid transfer chamber (17). A control spool (15) is arranged movably inside the fluid transfer chamber (17) in a way that the first fluid conduit (13) and the third fluid conduit (14) can be selectively fluidly connected to the second fluid conduit (11) through said fluid transfer chamber (17). The control surfaces (19, 20) of the control spool (15) are arranged in the vicinity of the first fluid conduit (13) the third fluid conduit (14).

A hydrostatic servo assembly unit (1) for being arranged inside, outside or distant from a variable displacement hydrostatic unit (100) and for controlling the displacement of the variable displacement hydrostatic unit (100). The servo assembly unit (1) includes a servo housing (10) in which at least one servo piston (40) is arranged. The piston head (42) of the servo piston (40) can be pressurized such that the servo piston (40) can move linear relative to a servo cylinder (12) formed in the servo housing (10). The servo assembly unit (100) further includes a movable output element (49) protruding outside of the servo housing (10), which can be mechanically coupled to a displacement element (102) of a variable displacement hydrostatic unit (100).

A vacuum pumping arrangement comprises a first pump which has a first inlet and a first outlet. The first inlet is fluidly connected to a first common pumping line. The first common pumping line includes a plurality of first pumping line inlets each of which is fluidly connectable to a least one process chamber within a group of process chambers that form a semiconductor fabrication tool. The vacuum pumping arrangement also includes a reserve pump which has a reserve inlet and a reserve outlet. The reserve inlet is selectively fluidly connectable to each process chamber within the group of process chambers that form the semiconductor fabrication tool. The vacuum pumping arrangement additionally includes a controller which is configured to selectively fluidly isolate the pump from one or more given process chambers and selectively fluidly connect the reserve pump with the said one or more given process chambers.

A wearable infusion pump assembly includes a reservoir for receiving an infusible fluid, and an external infusion set configured to deliver the infusible fluid to a user. A fluid delivery system is configured to deliver the infusible fluid from the reservoir to the external infusion set. The fluid delivery system includes a volume sensor assembly, and a pump assembly for extracting a quantity of infusible fluid from the reservoir and providing the quantity of infusible fluid to the volume sensor assembly. The volume sensor assembly is configured to determine the volume of at least a portion of the quantity of fluid. The fluid delivery system further includes at least one optical sensor assembly configured to sense the movement of the pump assembly, a first valve assembly configured to selectively isolate the pump assembly from the reservoir, and a second valve assembly configured to selectively isolate the volume sensor assembly from the external infusion set.

A wearable infusion pump assembly includes a reservoir for receiving an infusible fluid, and an external infusion set configured to deliver the infusible fluid to a user. A fluid delivery system is configured to deliver the infusible fluid from the reservoir to the external infusion set. The fluid delivery system includes a volume sensor assembly, and a pump assembly for extracting a quantity of infusible fluid from the reservoir and providing the quantity of infusible fluid to the volume sensor assembly. The volume sensor assembly is configured to determine the volume of at least a portion of the quantity of fluid. The fluid delivery system further includes at least one optical sensor assembly configured to sense the movement of the pump assembly, a first valve assembly configured to selectively isolate the pump assembly from the reservoir, and a second valve assembly configured to selectively isolate the volume sensor assembly from the external infusion set.

A peristaltic pump precise dosing control system includes a driver, a pump head, pipeline switching means, a metering pipeline, and a discharge pipeline. An elastic tubing is provided in the pump head, and the outlet end of the elastic tubing is connected to the pipeline switching means. The driver drives the pump head to rotate to pump the liquid in the elastic tubing to the outlet end of the elastic tubing. The driver is electrically connected to the pipeline switching means so as to be capable of controlling the pipeline switching means to switch to the output pipeline with which the outlet end of the elastic tubing is connected. The pipeline switching means is driven to switch the outlet end of the elastic tubing from a state of connection with the discharge pipeline to a state of connection with the metering pipeline.

A peristaltic pump precise dosing control system includes a driver, a pump head, pipeline switching means, a metering pipeline, and a discharge pipeline. An elastic tubing is provided in the pump head, and the outlet end of the elastic tubing is connected to the pipeline switching means. The driver drives the pump head to rotate to pump the liquid in the elastic tubing to the outlet end of the elastic tubing. The driver is electrically connected to the pipeline switching means so as to be capable of controlling the pipeline switching means to switch to the output pipeline with which the outlet end of the elastic tubing is connected. The pipeline switching means is driven to switch the outlet end of the elastic tubing from a state of connection with the discharge pipeline to a state of connection with the metering pipeline.

Control systems and feedback assemblies for hydraulic axial displacement machines, such as pumps and motors. The control systems and feedback assemblies can reduce friction on the charging spools and provide for a more reliable return of the swashplate to a neutral position. Aspects of the control systems and feedback assemblies can be modularized for, e.g., easy maintenance and to reduce the overall size of the system.

A system includes a chemical storage tank, a pipeline, a pump, a first electrostatic probe, and a control unit. The pipeline is connected to the chemical storage tank. The pump is connected to the pipeline and configured to pump a chemical solution from the chemical storage tank into the pipeline. The first electrostatic probe is coupled to the pump and configured to measure an electrostatic voltage of the pump. The control unit is coupled to the first electrostatic probe and configured to obtain a measurement of an electrostatic voltage from the first electrostatic probe.