Disclosed is a liquid-ring compressor including a bypass pipe, in which the bypass pipe is directly mounted to a main body of the liquid-ring compressor, thereby greatly reducing costs incurred in the installation of a facility or a system including the liquid-ring compressor, and also economically reducing maintenance costs. The liquid-ring compressor includes a main body accommodating a shaft centrally mounted therein to receive rotational force from a driving motor, a rotor configured to rotate together with the shaft inside the main body, a suction port formed at a portion of the main body, a discharge port formed at another portion of the main body, a bypass pipe mounted between a position adjacent to the suction port in the main body and a position adjacent to the discharge port in the main body, and an opening/closing valve mounted in the middle of the bypass pipe.

Venturi Scrubbers are used to separate particulate from a large range of fluids. Many provide additional liquid and/or gas to drive the fluid and aid in the removal of particulate. The present invention provides a liquid ring pump through which the fluid to be treated is first passed and then exhausted, with additional work fluid to a Venturi scrubber such that the particulate can be separated from the exhaust fluid.

Disclosed is a liquid-ring vacuum pump that enables a worker to inspect components provided in a main body from the outside using a see-through device without disassembling the main body and to easily remove foreign matter from the main body merely by demounting the see-through device from the main body. The liquid-ring vacuum pump includes a main body, which accommodates a shaft centrally mounted therein to receive rotational force from a driving motor and has a mounting hole formed therein so as to communicate with the interior of the main body, a rotor rotating together with the shaft inside the main body, a head unit coupled to at least one side of the main body, and a see-through device, which is detachably mounted in the mounting hole and includes a see-through window member to allow the interior of the main body to be inspected with the naked eye.

Disclosed is a liquid-ring vacuum pump that enables a worker to inspect components provided in a main body from the outside using a see-through device without disassembling the main body and to easily remove foreign matter from the main body merely by demounting the see-through device from the main body. The liquid-ring vacuum pump includes a main body, which accommodates a shaft centrally mounted therein to receive rotational force from a driving motor and has a mounting hole formed therein so as to communicate with the interior of the main body, a rotor rotating together with the shaft inside the main body, a head unit coupled to at least one side of the main body, and a see-through device, which is detachably mounted in the mounting hole and includes a see-through window member to allow the interior of the main body to be inspected with the naked eye.

An impeller-type liquid ring compressor having a particular bearing configuration. Such a bearing arrangement may completely support the impeller as it rotates, eliminating many of the problems inherent in the prior art designs without changing the general overhung impeller design. This may allow the impeller-type liquid ring compressor to be easily retrofitted in existing use environments, such as, for example, oil and gas processing facilities, oil refineries, and petrochemical processing facilities. In some exemplary embodiments, a thrust bearing may be located on the front face of the impeller, or radial bearings may be disposed between the vanes of the impeller. A radial bearing and thrust bearing may further be disposed on the shaft side of the impeller close to the impeller itself. The compressor may be configured so that the process fluid carries heat away from each of these bearings.

An impeller-type liquid ring compressor having a particular bearing configuration. Such a bearing arrangement may completely support the impeller as it rotates, eliminating many of the problems inherent in the prior art designs without changing the general overhung impeller design. This may allow the impeller-type liquid ring compressor to be easily retrofitted in existing use environments, such as, for example, oil and gas processing facilities, oil refineries, and petrochemical processing facilities. In some exemplary embodiments, a thrust bearing may be located on the front face of the impeller, or radial bearings may be disposed between the vanes of the impeller. A radial bearing and thrust bearing may further be disposed on the shaft side of the impeller close to the impeller itself. The compressor may be configured so that the process fluid carries heat away from each of these bearings.

Liquid ring pumps are used to pump a variety of fluid types. Corrosive fluids are easily handled by the work fluid but can cause corrosion of pumping mechanisms. The present invention provides a magnetically driven liquid ring pump with corrosion resistant pumping mechanisms which achieves a longer time between service intervals.

Liquid ring pumps are used to pump a variety of fluid types. Corrosive fluids are easily handled by the work fluid but can cause corrosion of pumping mechanisms. The present invention provides a magnetically driven liquid ring pump with corrosion resistant pumping mechanisms which achieves a longer time between service intervals.

A pumping line arrangement includes a chamber connecting line which is fluidly connectable to a process chamber that forms part of a semiconductor fabrication tool. The pumping line arrangement also includes a valve module which is fluidly connected to the chamber connecting line. The valve module splits the chamber connecting line into respective first and second pumping lines. The first pumping line is intended to carry a first process flow and the second pumping line is intended to carry a second process flow which is incompatible with the first process flow. At least one of the first pumping line or the second pumping line includes fluidly connected therewithin a pre-abatement module that is configured to remove one or more incompatible constituents from the process flow intended to be carried by the other pumping line.

The present invention relates to a two-stage liquid ring vacuum pump in which two-stage impellers are attached to an axial end portion of a main shaft (rotating shaft) of a motor. The two-stage liquid ring vacuum pump includes a first-stage impeller (4) provided in a first-stage pump chamber (1), a second-stage impeller (5) provided in a second-stage pump chamber (2), a single rotating shaft (7) to which the first-stage impeller (4) and the second-stage impeller (5) are fixed, and an exhaust port (Pd) of the first-stage pump chamber (1) and an intake port (Ps) of the second-stage pump chamber (2) which communicate with each other. An outer diameter of the first-stage impeller (4) is larger than an outer diameter of the second-stage impeller (5).