A limit switch assembly, for a rising-stem valve having a stem with a diameter and a groove marking a desired stem position, includes an actuator arm having an inner end and an outer end. The inner end of the actuator arm forms a follower. A radius washer is mounted to the outer end of the actuator arm. An electrical switch has an operating lever and is mounted adjacent to the outer end of the actuating arm such that when the actuator arm is in an outward position the radius washer moves the operating lever, operating the electrical switch. When the actuator arm is in an inward position the radius washer does not move the operating lever and the electrical switch is not operated. A bias spring biases the actuating arm toward the inward position.

Disclosed is a vacuum valve including a valve closure and a preferably pneumatic or electro-pneumatic drive unit having a pressure medium, said drive unit being coupled to the valve closure. The vacuum valve also has a pressure sensor such that a pressure of the pressure medium can be measured.

The invention concerns an operator assembly having a tubular housing extending along a central axis (X1) and a transmission mechanism arranged in an inner bore of the housing and extending along the central axis (X1). The transmission mechanism providing a screw with a threaded outer surface and a nut with a threaded inner surface. The nut is radially mounted around the screw and the inner thread is configured to cooperate with outer thread. The operator assembly further provides angular contact bearings that are radially arranged between the inner bore of the housing and an outer surface of the rotating nut to support in rotation and guide the nut within the housing. The angular contact bearings are axially adjacent and are disposed within an angular contact ball bearing and an angular contact roller bearing.

Systems for processing articles are essential for semiconductor fabrication. In one method of controlling gas flow, a processing system is provided, the processing system having first and second fluid supplies. The first fluid supply is coupled to a first apparatus for controlling flow and the second fluid supply is coupled to the second apparatus for controlling flow. The first process fluid is then delivered to a process chamber via outlet of the first apparatus for controlling flow. The first process fluid is also bled via a bleed port of the first apparatus for controlling flow. The flow rate of the first process fluid through the bleed port is controlled at a first flow rate which is less than a first threshold.

Certain embodiments of the disclosure relate to a bi-directional oil-flow adapter that is attachable to a valve-controlled port of a transformer housing in which oil is contained for cooling parts of the transformer such as a primary coil and a secondary coil. The bi-directional oil-flow adapter not only allows for an oil sample to be drawn out of the transformer housing via the valve-controlled port but also allows for the oil sample to be used (along with an additional volume of oil if so desired) for flushing the valve-controlled port in order to ensure that a subsequent oil sample is different than a current oil sample. The oil sample can be provided to a dissolved gas analyzer for detecting and analyzing one or more gases that may be present in the oil sample, the one more gases indicative of a level of contamination of the oil sample.

Actuators for fluid catalytic cracking unit slide valves and similar valves are disclosed. The actuator frame is assembled by bolting, allowing for standardized configurations that permit stocking of parts and avoids prior art problems of dealing with actuators designed for each individual project, allowing for rapid assembly of new actuators on demand that suit each project by varying the incorporated components, as well as permitting for more-rapid servicing when necessary. Additionally, the instrumentation for the actuator is contained within the actuator frame, better protecting the instrumentation from damage such as from being struck. The actuator includes a new manual engagement system, providing for better engagement of manual controls to actuate the actuator and the accompanying valve when necessary.

Actuators for fluid catalytic cracking unit slide valves and similar valves are disclosed. The actuator frame is assembled by bolting, allowing for standardized configurations that permit stocking of parts and avoids prior art problems of dealing with actuators designed for each individual project, allowing for rapid assembly of new actuators on demand that suit each project by varying the incorporated components, as well as permitting for more-rapid servicing when necessary. Additionally, the instrumentation for the actuator is contained within the actuator frame, better protecting the instrumentation from damage such as from being struck. The actuator includes a new manual engagement system, providing for better engagement of manual controls to actuate the actuator and the accompanying valve when necessary.

A coolant control valve unit includes a valve housing including at least a first passage and a second passage in which coolant flows and disposed at a predetermined position, a first valve and a second valve provided to open and close the first and second passages, a first stem and a second stem respectively connected with the first valve and the second valve and extending to movement directions of the first valve and the second valve, a driving plate of which one surface is connected with end portions of the first stem and the second stem, and an actuator pushing and pulling the driving plate to allow the first valve and the second valve to open and close the first passage and the second passage.

An object of the invention is to provide a method of controlling a gate valve that operates the gate valve in a short time while suppressing vibration of the valve body. A method of controlling a gate valve provided on an opening of a chamber, wherein the gate valve includes a valve body that opens and closes so as to close the opening of a chamber, a valve seat provided on the edge of the opening to which the valve body is pressed, and a sealing material for sealing between the valve body and the valve seat. The invented method is characterized in that, in moving the valve body to the open position from the closed position where the valve body is pressed against the valve seat with the sealing material compressed, the valve body is made to stop temporarily for a predetermined time at the position immediately before the compressed sealing material is pulled apart or immediately after pulled apart in the opening movement of the valve body.

A plasma processing apparatus includes a process chamber including a sidewall, a mounting table disposed in the process chamber, a shield member which is disposed along the inner surface of the sidewall to surround the mounting table and has an opening facing the transfer port, and a shutter configured to open/close the opening, the shutter being movable up and down. The shutter has a first portion adapted to face the opening, and a second portion adapted to face the shield member at a lower side of the shield member. The shield member has a lower portion including a contact surface facing the second portion. A contactor adapted to contact the contact surface is disposed at the second portion. The first portion of the shutter closes the opening through a gap between the first portion and the shield member. The contact surface and the contactor are formed of HASTELLOY.