Patent classifications
F16K21/00
Raw material supply apparatus and film forming apparatus
A raw material supply apparatus includes: a raw material supply path through which a raw material gas is supplied into a processing container; a valve provided in the raw material supply path; a pressure sensor configured to detect an internal pressure of the raw material supply path; a raw material exhaust path connected to the raw material supply path and through which the raw material gas in the raw material supply path is exhausted; an opening degree adjustment mechanism provided in the raw material exhaust path and configured to control the internal pressure of the raw material supply path based on an adjustment of an opening degree of the opening degree adjustment mechanism; and a controller configured to perform the adjustment of the opening degree of the opening degree adjustment mechanism based on a value detected by the pressure sensor.
Raw material supply apparatus and film forming apparatus
A raw material supply apparatus includes: a raw material supply path through which a raw material gas is supplied into a processing container; a valve provided in the raw material supply path; a pressure sensor configured to detect an internal pressure of the raw material supply path; a raw material exhaust path connected to the raw material supply path and through which the raw material gas in the raw material supply path is exhausted; an opening degree adjustment mechanism provided in the raw material exhaust path and configured to control the internal pressure of the raw material supply path based on an adjustment of an opening degree of the opening degree adjustment mechanism; and a controller configured to perform the adjustment of the opening degree of the opening degree adjustment mechanism based on a value detected by the pressure sensor.
Modular Faucet System for Aircraft
A modular faucet system for an aircraft comprising a faucet outlet, a flow valve, and an actuator. The faucet outlet is configured to be installed on the aircraft. The flow valve is configured to be installed on the aircraft separately from the faucet outlet, to be connected by a first water line to a water supply comprising a water tank on the aircraft, and to be connected by a second water line to the faucet outlet. The actuator is configured to be installed on the aircraft separately from the faucet outlet and the flow valve. The actuator comprises a touchless sensor that is configured to detect a user of the modular faucet system. The actuator is configured to generate a control signal to open the flow valve to provide water from the water supply to the faucet outlet in response to detection of the user by the touchless sensor.
PUMP UNIT FOR PROVIDING A HYDRAULIC PRESSURE FOR ACTUATING AN ACTUATOR IN THE DRIVE TRAIN OF A MOTOR VEHICLE
A pump unit provides a hydraulic pressure for actuating an actuator in the drive train of a motor vehicle, in particular a clutch actuator or gearbox actuator. The pump unit includes a pump, a storage container for hydraulic fluid, and at least one solenoid valve. The solenoid valve is arranged within the storage container such that it is surrounded by hydraulic fluid.
PUMP UNIT FOR PROVIDING A HYDRAULIC PRESSURE FOR ACTUATING AN ACTUATOR IN THE DRIVE TRAIN OF A MOTOR VEHICLE
A pump unit provides a hydraulic pressure for actuating an actuator in the drive train of a motor vehicle, in particular a clutch actuator or gearbox actuator. The pump unit includes a pump, a storage container for hydraulic fluid, and at least one solenoid valve. The solenoid valve is arranged within the storage container such that it is surrounded by hydraulic fluid.
Sensing mechanism for valve operation
A flush valve assembly has a pilot valve and a drive train for selective driving the pilot valve between an open position and a closed position. The drive train has a drive gear coupled to a motor for rotating the drive gear and a valve gear coupled to the pilot valve and intermeshing with the drive gear. At least one of the drive gear and the valve gear have a flag extending outwardly therefrom. A sensor positioned to detect the flag and establish a rotational position of the drive gear and the valve gear to thereby establish an opened or closed position of the pilot valve.
Sensing mechanism for valve operation
A flush valve assembly has a pilot valve and a drive train for selective driving the pilot valve between an open position and a closed position. The drive train has a drive gear coupled to a motor for rotating the drive gear and a valve gear coupled to the pilot valve and intermeshing with the drive gear. At least one of the drive gear and the valve gear have a flag extending outwardly therefrom. A sensor positioned to detect the flag and establish a rotational position of the drive gear and the valve gear to thereby establish an opened or closed position of the pilot valve.
Quantitative water adjusting valve
The invention relates to a valve, in particular to a quantitative water adjusting valve which comprises a valve body and a sealing pressure column, a control mechanism, a sealing element, a quantitative orifice plate and an end cover. The device disclosed by the invention is convenient to detach, so that the internal structure of the device is convenient to maintain; the valve can be quickly opened, and the valve can be slowly opened and closed through threads; under the condition that the water pressure is certain, the flow of water can be conveniently and quantitatively controlled.
Gas-filled resilient body and use thereof
A gas-filled resilient body and uses thereof are described. The gas-filled resilient body may be used as a valve member, as a spring or as a gas-propelled dispenser.
Gas-filled resilient body and use thereof
A gas-filled resilient body and uses thereof are described. The gas-filled resilient body may be used as a valve member, as a spring or as a gas-propelled dispenser.