A module for a fluid circuit of a vehicle includes a unitary housing. The unitary housing of the module contains a fluid moving device, a fluid control device, and a power sharing connection. The power sharing device is configured to provide power to the fluid moving device and the fluid control device.

A loadlock apparatus includes a loadlock chamber including a first opening and a second opening separated in a vertical direction; a first slit valve including a first valve plate configured to move between a first open position where the first opening is open and a first closed position where the first opening is closed, the first open position being a position moved downward from the first closed position; and a second slit valve including a second valve plate configured to move between a second open position where the second opening is open and a second closed position where the second opening is closed, the second open position being a position moved upward from the second closed position.

An apparatus comprises a mounting panel including a top plate having multiple vias and multiple orifices. An internal face of the top plate includes a first cut-out region and channels through which to flow a process fluid. The first cut-out region can be a reservoir in which to contain the process fluid. The multiple vias are adapted for passing the process fluid through the top plate. The multiple orifices are adapted for attaching a plurality of process fluid control components to the mounting panel. An inner plate also has multiple additional vias. The apparatus includes a bottom plate, where the inner plate is compacted between the top plate and the bottom plate to form an integral metallic body in which to contain and flow the process fluid.

A valve block for hydrogen gas includes a valve block body having an outer surface on which an aluminum anodizing treatment has been performed, and a flow channel for hydrogen gas formed in the valve block body, and the flow channel has a sealing face in an inner face, and the sealing face is a machined face.

Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow frequently rely on large numbers of fitting assemblies. Fitting assemblies often require tight tolerances, requiring expensive manufacturing processes. Fitting assemblies formed as multiple components can reduce manufacturing costs. Fitting assemblies may be formed of a housing having an insert receiving cavity and an insert having a port, a seal cavity, and a tube stub. A flow path extends from the port to the tube stub to enable flow of fluid therebetween.

An actuator sub for generating hydraulic pressure having a sub housing which includes (i) an outer surface, (ii) a main flow passage extending though the sub housing, and (iii) a wall space formed between the main flow passage and the housing outer surface. At least a first hydraulic tube is position in the wall space and an equalization port is configured to transmit pressure in the main flow passage to the first hydraulic tube. A drive motor driving an bi-directional hydraulic motor, are positioned in the first hydraulic tube, with the hydraulic motor being configured to output fluid to a fluid outlet of the first hydraulic tube, and the hydraulic motor, when not under power, allowing the reverse flow of fluid through the hydraulic motor. The actuator sub includes the absence of a check valve along a path carrying fluid between the hydraulic motor and the outlet of the second hydraulic tube.

A cartridge valve includes a housing, a stem adapter, and a stem assembly. The stem adapter includes a body defining a first hole, which extends in a longitudinal direction. The stem assembly includes a first stem component and a second stem component. The first stem component includes an arm and a spherical portion that is configured to be at least partially positioned within the first hole and defines an opening. The second stem component has a body that is configured to be at least partially received within the opening of the first stem component. The spherical portion is configured to expand in size in response to the first end inserting a portion of the body of the second stem component into the opening in the first stem component, which increases a frictional resistance induced by relative rotation between the stem assembly and the stem adapter.

A cartridge valve includes a housing, a stem adapter, and a stem assembly. The stem adapter includes a body defining a first hole, which extends in a longitudinal direction. The stem assembly includes a first stem component and a second stem component. The first stem component includes an arm and a spherical portion that is configured to be at least partially positioned within the first hole and defines an opening. The second stem component has a body that is configured to be at least partially received within the opening of the first stem component. The spherical portion is configured to expand in size in response to the first end inserting a portion of the body of the second stem component into the opening in the first stem component, which increases a frictional resistance induced by relative rotation between the stem assembly and the stem adapter.

Valve assemblies, clips adapted for use in valve assemblies, and methods of assembling valve assemblies are disclosed herein. A valve assembly includes a solenoid, a valve body, and a clip. The valve body is coupled to the solenoid and extends along a valve body axis. The valve body includes a first inner surface that defines an interior passage, a second inner surface that defines a groove in fluid communication with the interior passage, and a shoulder defined at an interface between the first inner surface and the second inner surface. The clip is coupled to the solenoid and the valve body.

The invention relates to a fluid flow device comprising a plurality of fluid flow functional modules each fastened on a respective individual base comprising: two parallel lateral faces via which the bases are adapted to be placed against one another in such a manner that when the bases are placed against one another, two of the bases each have one lateral face that is free; a primary fluid transport channel passing through the base to open out in its two lateral faces in identical positions; and a front face along which the module extends so as to couple an inlet channel of said module with a secondary channel extending in the base from the front face and opening out in the primary channel.

According to the invention, the device includes fastener means for fastening the bases to one another and leaktight coupling means for coupling the end of the primary channel opening out in one of the lateral faces to a source of fluid under pressure for feeding the modules.