A dual latching microvalve is capable of a metastable state, wherein a one or more complete flow paths are open, before switching to another state that allows only an inlet or outlet valve to be open at any time on any fluid path. One valve mechanism uses a cam to alternately open and close two valves, with an external force applying pressure to move one valve arm onto a resting position on the cam, thereby opening the closed valve and provided an uninterrupted flow path through the dual latching microvalve. The metastable state provides, for example, a means to prime the pump before operation, such as pumping of insulin into a patient. When released from the metastable state, the dual latching microvalve operates in a fashion whereby opening of both valves simultaneously is prevented, thereby protecting the patient from injury.

Embodiments of the present invention are directed to a liquid delivery apparatus. A non-limiting example of the apparatus includes a substrate including a cavity formed in a surface of the substrate. The apparatus can also include a membrane disposed on the surface of the substrate covering an opening of the cavity. The apparatus can also include a hydrophobic layer disposed on the membrane. The apparatus can also include a seal disposed between the membrane and the substrate, wherein the seal surrounds the opening of the cavity. The apparatus can also include an electrode layer coupled to the membrane.

A micro fluid actuator includes an orifice layer, a flow channel layer, a substrate, a chamber layer, a vibration layer, a lower electrode layer, a piezoelectric actuation layer and an upper electrode layer, which are stacked sequentially. An outflow aperture, a plurality of first inflow apertures and a second inflow aperture are formed in the substrate by an etching process. A storage chamber is formed in the chamber layer by the etching process. An outflow opening and an inflow opening are formed in the orifice layer by the etching process. An outflow channel, an inflow channel and a plurality of columnar structures are formed in the flow channel layer by a lithography process. By providing driving power which have different phases to the upper electrode layer and the lower electrode layer, the vibration layer is driven to displace in a reciprocating manner, so as to achieve fluid transportation.

A low-voltage microfluidic valve device and system for regulating the flow of fluid. One low-voltage microfluidic valve device for regulating the low of fluid includes a nano-textured dendritic metallic filament configured to grow and retract in response to a voltage. The low-voltage microfluidic valve device also includes a microfluidic channel configured to allow fluid flow, wherein the fluid flow is selectively interrupted by the growth of the nano-textured dendritic metallic filament. The low-voltage microfluidic valve device also includes a membrane positioned proximate to the fluid and configured to alter shape in response to the growth of the nano-textured dendritic metallic filament.

A rotor assembly includes a rotor plate to rotate around a first axis, a bucket attached to the rotor plate and to rotate around a second axis, and a stop plate to rotate around the first axis between an open position and a closed position. When in the closed position, the stop plate engages the bucket to fix an angular position of the bucket relative to a plane of rotation of the rotor assembly. The rotor assembly further includes a housing for a sensor array component, the housing disposed in the bucket and including a solution inlet, a solution outlet, a transfer basin, a solution retainer disposed between the solution outlet and the transfer basin, and a collection reservoir in fluid communication with the transfer basin. The solution inlet and the solution outlet to engage ports of a flow cell of a sensor array.

A fluid handling device, comprising: a substrate including a first channel, a second channel and a partition wall formed between the first channel and the second channel; a film including a diaphragm, the film being disposed on the substrate so that the diaphragm faces the partition wall; and a sliding member slidable on the film while contacting with the film, the sliding member including a protrusion formed on an underside thereof, and the sliding member being disposed on the film with the underside facing the film, wherein: the sliding member is capable of switching between a first state and a second state by sliding on the film, wherein the protrusion is positioned so as not to face the partition wall with the diaphragm therebetween in the first state, and the protrusion is positioned so as to face the partition wall with the diaphragm therebetween in the second state.

A pneumatic system for a medical fluid machine operating a medical fluid cassette, the pneumatic system including an interface for supplying positive pneumatic pressure and negative pneumatic pressure to the medical fluid cassette; a source of positive pneumatic pressure; a source of negative pneumatic pressure; and a pneumatic pump including a first head and a second head, wherein the first head is dedicated to supplying positive pneumatic pressure to the positive pneumatic pressure source and the second head is dedicated to supplying negative pneumatic pressure to the negative pneumatic pressure source.

A flow channel assembly (200) of a fluid micro-injection device has a fluid seat (210), a nozzle mounting plate (240), a nozzle (220), a nozzle platen (250) and a fluid supply joint (230). The nozzle (220) is connected to the fluid seat (210) by the nozzle mounting plate (240). The nozzle platen (250) is connected with the nozzle mounting plate (240) to secure the nozzle (220). The fluid supply joint (230) and the fluid seat (210) are connected to control the fluid flowing to the nozzle (220).

A fluid control apparatus includes a piezoelectric pump and valve. The valve includes a second valve housing, second seal member, diaphragm, first seal member, and first valve housing and has a structure in which they are laminated in sequence. The first valve housing includes a second vent and third vent, has a valve seat, and includes six cavities. The second valve housing has a first vent and first vent and includes a valve seat and six first protrusions. The second valve housing further includes six second protrusions nearer the outer edges than the six first protrusions, as seen in the x-axis direction in plan view.

A micro-pneumatic control unit comprising a plurality of control channels for generating the control pressures in a pneumatically actuated multi-channel coating head for coating components with a coating agent, a control channel being characterized by a valve element comprising a valve bore in a valve plate and a diaphragm layer which is below the valve plate and is configured as a diaphragm closing element in the region of the valve bore, the shape of which diaphragm closing element defined by recesses positioned laterally with respect to the valve bore, by a micro-actuator having a plunger that actuates the diaphragm closing element through the valve bore such that the valve element opens, by a second micro-pneumatic element connected in series with the valve element, the control pressure developing and a cavity located at the connection node thereof, which cavity is connected to at least one pneumatically operated coating agent ejector, and by a pneumatic pressurization of the micro-pneumatic control unit, which is directed such that, with respect to the valve element, there is a pressure gradient from the diaphragm closing element to the valve bore in the valve plate.