Embodiments of an electrostatic chuck are provided herein. In some embodiments an electrostatic chuck includes an electrode, a dielectric body having a disk shape and covering the electrode, the dielectric body including a central region and a peripheral region, and the dielectric body including a lower surface having a central opening and an upper surface having a first opening in the central region and a plurality of second openings in the peripheral region, wherein the upper surface includes a plurality of protrusions and a diameter of each of the plurality of second openings is greater than 25.0 mils, and gas distribution channels that extend from the lower surface to the upper surface to define a plenum within the dielectric body.

Provided is a transmission device for transmitting and receiving data through a transmission channel. The transmission device includes a transmission circuit unit configured to transmit data to the transmission channel. When an overcurrent caused by a simultaneous transmission of data to the transmission channel is detected during data transmission, the transmission circuit unit increases an output resistance, which is a resistance value for an output to the transmission channel, to an resistance value corresponding to a characteristic of a facility equipment item that transmits data to the transmission channel at the same time as itself.

Provided is a transmission device for transmitting and receiving data through a transmission channel. The transmission device includes a transmission circuit unit configured to transmit data to the transmission channel. When an overcurrent caused by a simultaneous transmission of data to the transmission channel is detected during data transmission, the transmission circuit unit increases an output resistance, which is a resistance value for an output to the transmission channel, to an resistance value corresponding to a characteristic of a facility equipment item that transmits data to the transmission channel at the same time as itself.

A low ambient cooling system for a variable refrigerant flow heat pump includes an outdoor air conditioning unit and an indoor air conditioning unit. The outdoor air conditioning unit includes an outdoor heat exchanger with one or more valves that selectively control refrigerant flow through different sections of condenser coils during a low ambient cooling mode. During the low ambient cooling mode, the condenser coils of the outdoor heat exchanger include an active coil section through which refrigerant flows and an inactive coil section that is closed. An outdoor-coil restrictor plate with holes is attached to the active condenser coil in the outdoor air conditioning unit. The outdoor-coil restrictor plate restricts excessive heat release from the active coil section of the condenser coils in the outdoor heat exchanger during the low ambient cooling mode.

A heat pump system includes a refrigerant circuit that has a compressor, a first heat exchanger, a second heat exchanger, a reheat heat exchanger, a modulating valve, and a reversing valve. The reversing valve is configured to transition between a first configuration to direct refrigerant from the compressor toward the modulating valve and a second configuration to direct the refrigerant from the compressor toward the first heat exchanger. The heat pump system also includes control circuitry configured to concurrently maintain the reversing valve in the first configuration and adjust a position of the modulating valve to direct a first portion of the refrigerant from the modulating valve to the second heat exchanger and a second portion of the refrigerant from the modulating valve to the reheat heat exchanger based on an operating mode of the heat pump system.

An energy exchange system that includes a supply air flow path, an exhaust air flow path, an energy recovery device disposed within the supply and exhaust air flow paths, and a supply conditioning unit disposed within the supply air flow path. The supply conditioning unit may be downstream from the energy recovery device.

A room air purifier comprises housing (9), air filter (100), RFID reader (143), RFID tag (120), and a wireless communication unit (142). A method is how to operating the room air purifier.

A technology includes a first plate including a first pair of legs defining a first channel; a second plate including a second pair of legs defining a second channel; a first block supporting the first plate and the second plate such that the first block is positioned between the first channel and the second channel; a second block including a U-shaped trench with a first open end portion and a second open end portion, wherein the first open end portion leads to the first channel, wherein the second open end portion leads to the second channel; a tube extending within the U-shaped trench; and a U-shaped cover covering the U-shaped trench.

A method for controlling a variable refrigerant flow (VRF) system includes applying a time window to sensor data associated with the VRF system, the sensor data including input data points and having a first resolution, wherein applying the time window to the sensor data isolates a subset of the input data points; applying a timing weight to one or more input data points in the subset of the input data points to generate corrected data points having a second resolution higher than the first resolution; creating a virtual sensor and mapping the corrected data points to an output of the virtual sensor; and controlling the VRF system based on an output of the virtual sensor. The use of virtual sensors with a higher resolution than corresponding physical sensors in this manner allows for existing physical sensors to be used while improving performance of the VRF system.

In one embodiment, an HVAC system includes an indoor unit having a furnace, an outdoor heat pump unit having a compressor and an outdoor coil, a refrigerant line coupled to the indoor unit and the outdoor heat pump unit, and a valve coupled to the refrigerant line. The HVAC system further includes one or more controllers operable to determine that the outdoor heat pump unit is in operation during an air conditioning cycle. The controllers are further operable to determine an outdoor temperature and compare the outdoor temperature to a predetermined temperature. The controllers are further operable to initiate a closure of the valve coupled to the refrigerant line and initiate operation of the compressor at an end of the air conditioning cycle to pump down a refrigerant to the outdoor coil in response to comparing the outdoor temperature to the predetermined temperature.