A flexible cover plate with an airflow opening. A fan carried on a rear side of the cover plate over the airflow opening. A protective screen carried on a front side of the cover plate over the airflow opening. An angle bracket carried in an elongated slot disposed in said cover plate having a first portion extending parallel along the rear side of the cover plate, and a second portion extending transverse to the front side of the cover plate above the airflow opening. A flexible polymer foam sheet carried on the rear side of the cover plate for conforming to a vent opening in a building foundation wall so that an airtight seal is formed against the vent opening. A fan speed controller adjusting a desired speed of the fan and airflow through the airflow opening.

The present invention is directed to an exhaust vent assembly including a clamp, a sleeve, a neck, a damper in the neck, a cap attached to the neck and a collar. The exhaust vent assembly may be configured without any penetrative fasteners. The invention is further directed to a clamp for attachment to round duct and a building surface to provide strength, rigidity and support to the round duct.

A precursor supply cabinet for accommodating one or more precursor containers having cabinet walls defining an inner cabinet space. The precursor supply cabinet includes a ventilation discharge connection arranged to discharge ventilation gas from the inner cabinet space, one or more ventilation inlet connections, two or more separate gas tight precursor supply chambers for accommodating precursor containers. The gas tight precursor supply chambers are arranged inside the inner cabinet space of the precursor supply cabinet such that the inner cabinet space of the precursor supply cabinet surrounding the separate gas tight precursor supply chambers is ventilated.

A precursor supply cabinet for accommodating one or more precursor containers having cabinet walls defining an inner cabinet space. The precursor supply cabinet includes a ventilation discharge connection arranged to discharge ventilation gas from the inner cabinet space, one or more ventilation inlet connections, two or more separate gas tight precursor supply chambers for accommodating precursor containers. The gas tight precursor supply chambers are arranged inside the inner cabinet space of the precursor supply cabinet such that the inner cabinet space of the precursor supply cabinet surrounding the separate gas tight precursor supply chambers is ventilated.

A quick ceiling fan mounting bracket with a safety protection structure has a bracket, two guide rails and an elastic engaging member. The bracket is configured to connect a junction box and a ceiling fan motor unit. The junction box is locked with two locking members. When installed, the locking members are half locked into locking holes of the junction box, and the heads of the locking members are positioned at positioning holes and a force is applied to the elastic engaging member for the locking members to pass through the guide rails. When the head of the locking member is displaced, an engaging portion of the elastic engaging member is against the head of the locking member to achieve the effect of safety protection.

To provide a transfer chamber capable of replacing a chemical filter without affecting an internal atmosphere, and shortening or eliminating stop time of a transfer process of a wafer (W) associated with replacement of the chemical filter.

The transfer chamber transfers the wafer (W) to or from a processing device (6) by using a transfer robot (2) provided thereinside, and includes a circulation path (CL1) formed inside of a transfer chamber (1) to circulate gas, a chemical filter unit (7) provided in the midstream of the circulation path (CL1), and a connecting and disconnecting means (8) which switches connection and disconnection of the chemical filter unit (7) to and from the circulation path (CL1).

A passive ventilation control system and method. The system includes passive vents throughout a building. The vents may be arranged in multiple sets, with each set being substantially vertically aligned through multiple floors or the entire height of the building. Sensors are positioned inside and/or outside the building for sensing different environmental parameters or atmospheric conditions. The sensors send signals to a controller, which automatically adjusts airflow through the vents in response to the signals from the sensors.

To provide a transfer chamber capable of replacing a chemical filter without affecting an internal atmosphere, and shortening or eliminating stop time of a transfer process of a wafer (W) associated with replacement of the chemical filter. The transfer chamber transfers the wafer (W) to or from a processing device (6) by using a transfer robot (2) provided thereinside, and includes a circulation path (CL1) formed inside of a transfer chamber (1) to circulate gas, a chemical filter unit (7) provided in the midstream of the circulation path (CL1), and a connecting and disconnecting means (8) which switches connection and disconnection of the chemical filter unit (7) to and from the circulation path (CL1).

A vent arrangement for a mask system includes a mask component and a mask vent provided to the mask component. The mask vent includes a plurality of vent holes each extending through a thickness of the mask component and each including a vent exit, and a continuous side wall structured to surround the plurality of vent exits of the vent holes.

An air purifying system is a system for purifying air in a room, and the air purifying system includes: a carbon dioxide removing device including a first space and a second space that are divided from each other by a separation membrane that selectively allows carbon dioxide to permeate therethrough; a feed passage that leads the air in the room to the first space; a return passage that leads purified air from which carbon dioxide has been removed from the first space to the room; a supply passage that supplies sweep gas to the second space, the sweep gas having a carbon dioxide partial pressure that is lower than a carbon dioxide partial pressure in the air in the room; and a discharge passage that discharges the sweep gas from the second space after the sweep gas is mixed with the carbon dioxide that has permeated through the separation membrane.