Patent classifications
F24F13/00
Air Cooled Faraday Shield and Methods for Using the Same
A chamber is provided. The chamber includes a Faraday shield positioned above a substrate support of the chamber. A dielectric window is disposed over the Faraday shield, and the dielectric window has a center opening. A hub having an internal plenum for passing a flow of fluid received from an input conduit and removing the flow of fluid from an output conduit is further provided. The hub has sidewalls and a center cavity inside of the sidewalls for an optical probe, and the internal plenum is disposed in the sidewalls. The hub has an interface surface that is in physical contact with a back side of the Faraday shield. The physical contact provides for a thermal couple to the Faraday shield at a center region around said center opening, and an outer surface of the sidewalls of the hub are disposed within the center opening of the dielectric window.
Air Cooled Faraday Shield and Methods for Using the Same
A chamber is provided. The chamber includes a Faraday shield positioned above a substrate support of the chamber. A dielectric window is disposed over the Faraday shield, and the dielectric window has a center opening. A hub having an internal plenum for passing a flow of fluid received from an input conduit and removing the flow of fluid from an output conduit is further provided. The hub has sidewalls and a center cavity inside of the sidewalls for an optical probe, and the internal plenum is disposed in the sidewalls. The hub has an interface surface that is in physical contact with a back side of the Faraday shield. The physical contact provides for a thermal couple to the Faraday shield at a center region around said center opening, and an outer surface of the sidewalls of the hub are disposed within the center opening of the dielectric window.
Method of cleaning a vehicle heat exchanger
A method for automatically cleaning a vehicle's heat exchanger or air filter is provided. In use, once the system determines that the heat exchanger/air filter should be cleaned, for example based on total operational time or the number of use cycles or air flow, the system temporarily reverses the direction of the corresponding fan assembly, thereby reversing the flow of air through the heat exchanger/air filter and forcing out dust, dirt and other debris.
CONNECTOR FOR A CLIMATE CONTROLLED SUPPORT DEVICE
Disclosed is a connector, comprising a base including one or more supports extending from the base, a diverter that is offset from the base via the one or more supports, and a passage defined in the base having a size that is substantially the same as a size of the diverter. The diverter is configured to extend through a layer in a climate control device. The diverter restricts the layer from obstructing the passage.
Air-conditioning vent vane adjusting device
An air-conditioning vent vane adjusting device includes a board for driving a vane to rotate, a push-button slidably installed on a panel, and a connecting plate fixedly attached to the board. A fixed plate is coupled to the push-button and is moved together with the push-button, and the fixed plate has a guide notch tilted with respect to the longitudinal direction of the board. The board has a lug accommodated in the guide notch and capable of sliding in the guide notch. With the tilted guide notch and the lug, the board can be moved reciprocally to overcome the problems of requiring a large operating force of the push-button of the tight assembly of the conventional board and connecting plate and the difficulty of opening and closing a vane.
Device employable in different circuit configurations using parallel wiring harnesses, a HVAC system employing the device and a method of manufacturing a HVAC unit
A HVAC unit manufacturing method and a HVAC system are disclosed herein. In one embodiment, the HVAC system includes: a controller having control board terminals, a parallel wiring harness having a first and a second connection header, the first connection header coupled to the control board terminals, and a switch having terminals. The terminals of the switch including: a pair of functional terminals configured to indicate a status of the switch and a pair of jumpered terminals independent of the pair of functional terminals and internally connected together within the switch, wherein designated combinations of the terminals indicate a circuit configuration for employing the switch in the HVAC system with each of the terminals having a particular design that dictates a specific corresponding connection header be used for each of the designated combinations, wherein a single one of the designated combinations of the terminals corresponds to the second connection header.
Device employable in different circuit configurations using parallel wiring harnesses, a HVAC system employing the device and a method of manufacturing a HVAC unit
A HVAC unit manufacturing method and a HVAC system are disclosed herein. In one embodiment, the HVAC system includes: a controller having control board terminals, a parallel wiring harness having a first and a second connection header, the first connection header coupled to the control board terminals, and a switch having terminals. The terminals of the switch including: a pair of functional terminals configured to indicate a status of the switch and a pair of jumpered terminals independent of the pair of functional terminals and internally connected together within the switch, wherein designated combinations of the terminals indicate a circuit configuration for employing the switch in the HVAC system with each of the terminals having a particular design that dictates a specific corresponding connection header be used for each of the designated combinations, wherein a single one of the designated combinations of the terminals corresponds to the second connection header.
HUMIDIFYING APPARATUS
A humidifying apparatus, including a water tank, a water pump, a wet curtain assembly, and a water passage structure. The water tank has a water storage chamber. A water inlet of the water pump is adapted to communicate with the water storage chamber. The wet curtain assembly is disposed above the water storage chamber and has a water supply port and a drainage port. The water passage structure is an integrated structure and includes a water inlet channel and a return water channel spaced apart from each other. An upper end of the water inlet channel is connected to the water supply port, and an upper end of the return water channel is connected to the drainage port.
Air cooled faraday shield and methods for using the same
A processing chamber and a Faraday shield system for use in a plasma processing chambers are provided. One system includes a disk structure defining a Faraday shield, and the disk structure has a process side and a back side. The disk structure extends between a center region to a periphery region. The disk structure resides within the processing volume. The system also includes a hub having an internal plenum for passing a flow of air received from an input conduit and removing the flow of air from an output conduit. The hub has an interface surface that is coupled to the back side of the disk structure at the center region. A fluid delivery control is coupled to the input conduit of the hub. The fluid delivery control is configured with a flow rate regulator. The regulated air can be amplified or compressed dry air (CDA).
Air cooled faraday shield and methods for using the same
A processing chamber and a Faraday shield system for use in a plasma processing chambers are provided. One system includes a disk structure defining a Faraday shield, and the disk structure has a process side and a back side. The disk structure extends between a center region to a periphery region. The disk structure resides within the processing volume. The system also includes a hub having an internal plenum for passing a flow of air received from an input conduit and removing the flow of air from an output conduit. The hub has an interface surface that is coupled to the back side of the disk structure at the center region. A fluid delivery control is coupled to the input conduit of the hub. The fluid delivery control is configured with a flow rate regulator. The regulated air can be amplified or compressed dry air (CDA).