An air-conditioning apparatus includes: a heat source-side system having an intermediate heat exchanger that causes heat exchange to be performed between a heat source-side heat medium and a use-side heat medium, causes the heat source-side heat medium to receive or transfer heat, and causes the use-side heat medium to undergo a phase change; and a use-side cycle circuit formed of pipes connecting, to one another, the intermediate heat exchanger, a pump that sucks and delivers the use-side heat medium in a liquid state, a use-side heat exchanger that heats or cools air in an air-conditioning target space due to heat exchange causing a change in phase of the use-side heat medium, and a pressure-reducing device that reduces a pressure of the use-side heat medium that passes through the use-side heat exchanger, the use-side cycle circuit causing the use-side heat medium to circulate through the use-side cycle circuit.

A sub-fab area installation apparatus includes: a vacuum pump configured to evacuate a processing gas from a processing chamber of the semiconductor manufacturing equipment; a cooling unit configured to cool a first circulation liquid used in the processing chamber; a heating unit configured to heat a second circulation liquid used in the processing chamber; and a cooling-liquid line configured to pass a cooling liquid therethrough. The cooling liquid is supplied from a cooling source. The cooling-liquid line includes: a distribution line configured to supply the cooling liquid to the vacuum pump and the cooling unit; and a merging return line configured to merge the cooling liquid that has passed through the vacuum pump and the cooling unit and return the cooling liquid to the cooling source.

A multiple-circuit heating and cooling system includes a first refrigeration circuit having a first condenser and a first evaporator and a second refrigeration circuit having a second condenser and a second evaporator. The first condenser and the second condenser are arranged in a first row split configuration, and the second condenser is downstream of the first condenser relative to a first air flow directed across the second condenser and the first condenser. Additionally, the first evaporator and the second evaporator are arranged in a second row split configuration, and the first evaporator is downstream of the second evaporator relative to a second air flow directed across the first evaporator and the second evaporator.

A multiple-circuit heating and cooling system includes a first refrigeration circuit having a first condenser and a first evaporator and a second refrigeration circuit having a second condenser and a second evaporator. The first condenser and the second condenser are arranged in a first row split configuration, and the second condenser is downstream of the first condenser relative to a first air flow directed across the second condenser and the first condenser. Additionally, the first evaporator and the second evaporator are arranged in a second row split configuration, and the first evaporator is downstream of the second evaporator relative to a second air flow directed across the first evaporator and the second evaporator.

A cold water supply system cools water flowing through a water pipe, and supplies the water cooled to a cooling load, the cold water supply system including: an independent refrigerant circuit unit including a first compressor and a first water heat exchanger configured to exchange heat between refrigerant and the water to cool the water; a composite unit configured to cool the water, and a controller configured to control operation of the independent refrigerant circuit unit and operation of the composite unit, wherein the composite unit includes a free cooling unit including a pump and a second water heat exchanger configured to exchange heat between a heat medium and the water to cool the water, and a coupled refrigerant circuit unit including a second compressor and a third water heat exchanger configured to exchange heat between refrigerant and the water to cool the water, and the controller controls an operating frequency of the first compressor, an operating frequency of the second compressor, and an operating frequency of the pump based on a temperature of the water flowing out from the water pipe.

A cold water supply system cools water flowing through a water pipe, and supplies the water cooled to a cooling load, the cold water supply system including: an independent refrigerant circuit unit including a first compressor and a first water heat exchanger configured to exchange heat between refrigerant and the water to cool the water; a composite unit configured to cool the water, and a controller configured to control operation of the independent refrigerant circuit unit and operation of the composite unit, wherein the composite unit includes a free cooling unit including a pump and a second water heat exchanger configured to exchange heat between a heat medium and the water to cool the water, and a coupled refrigerant circuit unit including a second compressor and a third water heat exchanger configured to exchange heat between refrigerant and the water to cool the water, and the controller controls an operating frequency of the first compressor, an operating frequency of the second compressor, and an operating frequency of the pump based on a temperature of the water flowing out from the water pipe.

A refrigeration cycle system includes a first cycle and a second cycle. The first cycle is connected with a first compressor, a cascade heat exchanger, a first expansion unit, and a first heat exchanger, and includes a first flow path that connects the first compressor to the cascade heat exchanger, a second flow path that connects the cascade heat exchanger to the first expansion unit, a third flow path that connects the first heat exchanger to the first compressor, and a bypass flow path that connects at least one of the first flow path and the second flow path to the third flow path. The second cycle includes the cascade heat exchanger. In a case of using the cascade heat exchanger as a radiator of the first cycle and a heat sink of the second cycle, the first compressor of the first cycle is started after a flow of a heat medium generates in the cascade heat exchanger in the second cycle.

A refrigeration cycle apparatus includes a primary-side refrigerant circuit in which a first refrigerant circulates and a secondary-side refrigerant circuit in which a second refrigerant circulates. The primary-side refrigerant circuit includes a primary-side compressor, a primary-side flow path of a cascade heat exchanger, a primary-side heat exchanger, and a primary-side switching mechanism. The secondary-side refrigerant circuit includes a secondary-side compressor, a secondary-side flow path of the cascade heat exchanger, a secondary-side switching mechanism, a suction flow path, a plurality of utilization-side heat exchangers, a first connection flow path, connecting the plurality of utilization-side heat exchangers and the secondary-side switching mechanism, including a secondary-side first connection pipe, a first heat source pipe, first branch pipes, junction pipes, first connection pipes, and first utilization pipes, a second connection flow path, connecting the plurality of utilization-side heat exchangers and the suction flow path, including a secondary side second connection pipe, a second heat source pipe, second branch pipes, the junction pipes, the first connection pipes, and the first utilization pipes, a third connection flow path, connecting the plurality of utilization-side heat exchangers and the secondary-side flow path of the cascade heat exchanger, including a secondary-side third connection pipe, a fourth heat source pipe, a fifth heat source pipe, third branch pipes, second connection pipes, and second utilization pipes.

A refrigerant for a cooling device (10) comprising a cooling circuit (11) with at least one heat exchanger, in which the refrigerant undergoes a phase transition, the refrigerant being a refrigerant mixture composed of a mass fraction of carbon dioxide and a mass fraction of at least one other component, wherein the mass fraction of carbon dioxide in the refrigerant mixture is 10 to 50 mass percent, preferably 30 to 50 mass percent, the other component being pentafluoroethane and/or difluoromethane.

A multi-refrigeration-cycle apparatus capable of reducing an installation area for equipment installed in a sub-fab and capable of shortening a pipe for delivering a cooling medium to a semiconductor-device manufacturing equipment is disclosed. The multi-refrigeration-cycle apparatus includes: a first refrigeration cycle having a first refrigerant for performing heat exchange with a cooling medium for cooling the semiconductor-device manufacturing equipment, the first refrigerant circulating in the first refrigeration cycle; and a second refrigeration cycle having a second refrigerant for performing heat exchange with the first refrigerant, the second refrigerant circulating in the second refrigeration cycle. At least a part of the first refrigeration cycle is arranged in a clean room where the semiconductor-device manufacturing equipment is installed, and the second refrigeration cycle is arranged in a sub-fab.