F26B7/00

Supercritical drying method for semiconductor substrate

According to one embodiment, a supercritical drying method for a semiconductor substrate comprises introducing a semiconductor substrate, a surface of the semiconductor substrate being wet with a water-soluble organic solvent, to the inside of a chamber, hermetically sealing the chamber and increasing a temperature inside the chamber to not lower than a critical temperature of the water-soluble organic solvent, thereby bringing the water-soluble organic solvent into a supercritical state, decreasing a pressure inside the chamber and changing the water-soluble organic solvent in the supercritical state to a gas, thereby discharging the water-soluble organic solvent from the chamber, starting a supply of an inert gas into the chamber as the pressure inside the chamber decreases to atmospheric pressure, and cooling the semiconductor substrate in a state where the inert gas exists inside the chamber.

APPARATUS AND METHOD FOR REMOVING MOISTURE FROM A SURFACE IN A CONTAINER
20170030644 · 2017-02-02 · ·

An apparatus (10; 20; 30; 40; 60) for removing moisture from a surface (522) in a container (500; 500.sub.1, 500.sub.2; 500), characterized by: a centrifuging element comprising a mount (140; 140.sub.1, 140.sub.2) for attaching said container (500; 500.sub.1, 500.sub.2; 500) to said centrifuging element and a drive (105) coupled to said mount (140; 140.sub.1, 140.sub.2) for rotating said attached container (500; 500.sub.1, 500.sub.2; 500) and centrifuging said moisture off said surface (522) in said attached container (500; 500.sub.1, 500.sub.2; 500); and a heating element (200) for providing heat energy and evaporating said moisture from said surface (522) in said attached container (500; 500.sub.1, 500.sub.2; 500), and a corresponding method.

APPARATUS AND METHOD FOR REMOVING MOISTURE FROM A SURFACE IN A CONTAINER
20170030644 · 2017-02-02 · ·

An apparatus (10; 20; 30; 40; 60) for removing moisture from a surface (522) in a container (500; 500.sub.1, 500.sub.2; 500), characterized by: a centrifuging element comprising a mount (140; 140.sub.1, 140.sub.2) for attaching said container (500; 500.sub.1, 500.sub.2; 500) to said centrifuging element and a drive (105) coupled to said mount (140; 140.sub.1, 140.sub.2) for rotating said attached container (500; 500.sub.1, 500.sub.2; 500) and centrifuging said moisture off said surface (522) in said attached container (500; 500.sub.1, 500.sub.2; 500); and a heating element (200) for providing heat energy and evaporating said moisture from said surface (522) in said attached container (500; 500.sub.1, 500.sub.2; 500), and a corresponding method.

METHOD TO IMPROVE THE EFFICIENCY OF REMOVAL OF LIQUID WATER FROM SOLID BULK FUEL MATERIALS
20170022435 · 2017-01-26 ·

The invention provides methods to efficiently reduce the water concentration of raw solid fuels, including low rank coals such as brown coal, lignite, subbituminous coal, and other carbonaceous solids. Efficiently drying these materials at low temperatures significantly reduces greenhouse gas emissions and allows the production of low-rank coals for gasification and liquifaction.

Vegetation hanger
12317781 · 2025-06-03 · ·

A vegetation hanger includes a linear plate and an aperture. The linear plate includes a first edge, a second edge, a first end portion, and a second end portion. The first edge includes at least one ridge disposed along the first edge. The aperture is disposed centrally along the linear plate and configured to slidably engage with a bar.

Vegetation hanger
12317781 · 2025-06-03 · ·

A vegetation hanger includes a linear plate and an aperture. The linear plate includes a first edge, a second edge, a first end portion, and a second end portion. The first edge includes at least one ridge disposed along the first edge. The aperture is disposed centrally along the linear plate and configured to slidably engage with a bar.

FLASH DRYER
20250271211 · 2025-08-28 · ·

A flash dryer for drying a product may include a chamber formed of a chamber wall. A product inlet may be provided for providing the product into the chamber. A gas inlet may be arranged below the product inlet for providing drying gas into the chamber. An outlet may be arranged above the product inlet. A gas distribution element may be arranged above the gas inlet. An outer edge of the gas distribution element may be distanced from the chamber wall such that a passage is formed between the gas distribution element and the chamber wall. A lower side of the gas distribution element may include a gas deflecting surface inclined relative to a horizontal plane such that the drying gas from the gas inlet is deflected by the gas deflecting surface towards the passage.

Drying method for polyglycollide warp-knitted support meshes for artificial skin
12516880 · 2026-01-06 ·

The invention relates to a drying method for polyglycollide warp-knitted support meshes for artificial skin, specifically comprising: pre-drying, deep drying, and fabric stress relaxation, which are performed sequentially. The drying method can completely remove water in polyglycollide warp-knitted support meshes as well as solvents left during the cleaning process, and can effectively maintain the properties such as tensile strength, pore size, and weight of the polyglycollide warp-knitted support meshes, thus being of great significance for the application of the polyglycollide warp-knitted support meshes in the field of medical artificial skin.

Drying method for polyglycollide warp-knitted support meshes for artificial skin
12516880 · 2026-01-06 ·

The invention relates to a drying method for polyglycollide warp-knitted support meshes for artificial skin, specifically comprising: pre-drying, deep drying, and fabric stress relaxation, which are performed sequentially. The drying method can completely remove water in polyglycollide warp-knitted support meshes as well as solvents left during the cleaning process, and can effectively maintain the properties such as tensile strength, pore size, and weight of the polyglycollide warp-knitted support meshes, thus being of great significance for the application of the polyglycollide warp-knitted support meshes in the field of medical artificial skin.

Wood drying device
12523424 · 2026-01-13 ·

A wood drying device that includes a pressure chamber having an interior sized to support a batch of wood therein, a closed-end, an open end, and a chamber door forming an airtight seal, an air compressor providing pressure to the pressure chamber, a vacuum pump evacuating air, recirculation fans located within the pressure chamber, a hot water radiator located within the pressure chamber, a hot water loop partially located within the pressure chamber and supplying heat to the radiator, a water heater located outside of the pressure chamber and connected to the hot water loop, a condenser located within the pressure chamber proximal a floor surface, a cold-water loop supplying chilled water to the condenser, a cold-water radiator located outside the pressure chamber and connected to the cold-water loop, a condensate basin located within the pressure chamber underneath the cold-water loop, and a condensate collection tank located outside the pressure chamber receiving water drips from the condensate basin.