The infrared baking device includes: a furnace chamber having an opening openable/closable by an opening/closing cover and allowing an internal space thereof to be tightly sealed; a baking object placement portion on which a baking object is to be placed and which is extractable/insertable through the opening; a heater lamp for heating the heating object by infrared rays; and a thermocouple provided at the baking object placement tray. A furnace wall of the furnace chamber is configured so that infrared rays from the heater lamp are collected and radiated to the tray. The thermocouple is provided in a contactor to contact with the tray. The tray and the contactor are made of the same material which absorbs the infrared rays.

The invention disclosed is methods, apparatus, and systems of a horizontal modular heater. Whereas the prior art, being heater of a single zone and singular structure, may not be able to provide the desired temperature profile nor efficient downtime during parts breakage is accordingly insufficient for the needs of the industry. The present invention then may be a furnace used in semiconductor manufacturing, of which may be a horizontal heater with multiple modules, of which may be connected in an ingenious method or structure to limit leakage and of which improves efficiency over previous heater designs heaters in the art.

According to one embodiment, an organic film forming apparatus includes a chamber configured to maintain an atmosphere more reduced than an atmospheric pressure, at least one processing room provided inside the chamber and being surrounded by a cover, and an exhaust part configured to exhaust the inside the chamber. The processing room includes an upper heating part including first heaters, a lower heating part including second heaters, and facing the upper heating part, an upper heat equalizing plate provided on the lower heating part side of the upper heating part, a lower heat equalizing plate provided on the upper heating part side of the lower heating part, and workpiece supporters configured to support a workpiece through a gap between the upper and lower heat equalizing plates.

A kiln including a stove and a heat source wherein the stove includes a chamber, an air guide structure, an exhaust pipe and a heat storage member. The chamber includes a cavity, an entry, and an air outlet. The air outlet is located between a top of the front section of the cavity and the entry. The air guide structure communicates with the air outlet and includes a guide plate. The exhaust pipe is disposed above the guide plate, and an exhaust channel is formed by the guide plate of the air guide structure and the exhaust pipe. The heat storage member covers an exterior of the cavity which is corresponding to the top of the front section of the cavity, and contacts the air guide structure. The heat source is disposed in the stove and adapted to heat the cavity.

A substrate heat treatment apparatus for heat treating a substrate, comprising a bake plate, a plurality of support components, a baffle plate, and a driving device. The bake plate defines at least one gas passage. The plurality of support components support the substrate. The baffle plate is fixed on a top surface of the bake plate. The baffle plate surrounds the substrate and a gap is formed between an inner circumferential wall of the baffle plate and the substrate. A driving device drives the plurality of support components to move up or down. When heat treating the substrate, a hot gas is supplied to the space between the substrate and the top surface of the bake plate through the gas passage of the bake plate, and the hot gas flows out through the gap formed between the inner circumferential wall of the baffle plate and the substrate.

A far-infrared radiation multi-stage type heating furnace for steel sheets for hot stamping, the furnace including far-infrared radiation heaters having flexibility that are prevented from deflecting even during heating at temperatures ranging from the Ac.sub.3 transformation temperature to 950 C. The furnace includes: multiple-staged heating units that accommodate steel sheets, each heating unit formed by thermal insulation materials disposed around the periphery; and far-infrared radiation heaters positioned above and below the heating units. A far-infrared radiation heater is received by first metal strips. The first metal strips are disposed so that their strong axis direction approximately corresponds to the direction of gravity and supported by support pieces so as to be expandable and contractible in a longitudinal direction by thermal expansion or thermal contraction. The support pieces are disposed outside the thermal insulation materials in the heating units and a ceiling unit.

A modular industrial energy transfer system includes a shell and at least one energy transfer unit coupled to the shell. The shell includes a plurality of sidewalls, a ceiling member coupled thereto, and a plurality of mounting structures disposed along the shell. The plurality of sidewalls and the ceiling member cooperate to define an interior volume to accommodate a work product. The at least one energy transfer unit is coupled to the shell via at least one of the plurality of mounting structures and is partially disposed through the shell to generate an airflow pattern through the interior volume of the shell.

A method for processing a workpiece is provided. The method can include placing a workpiece on a susceptor disposed within a processing chamber. The method can include performing a multi-cycle thermal treatment process on the workpiece in the processing chamber. The multi-cycle thermal treatment process can include at least two thermal cycles. Each thermal cycle of the at least two thermal cycles can include performing a first treatment on the workpiece at a first temperature; heating a device side surface of the workpiece to a second temperature in less than one second; performing a second treatment on the workpiece at approximately the second temperature; and cooling the workpiece subsequent to performing the second treatment.

A furnace for performing an endothermic process comprising tubes containing a catalyst for converting a gaseous feed, wherein tubes are positioned in rows inside the furnace, wherein burners are mounted between the tubes and between the tubes and the furnace walls parallel to the tubes row and wherein the burners rows and the tubes rows are ended by end walls and are divided into sections with the distance from the end burner to the end wall being B2W, the distance between two adjacent burners in the section being B2B, and half the distance in-between two sections being B2S, wherein the burners in the rows are arranged in such a way that the ratios B2B/B2W and B2B/B2S are greater than 1.3 thus limiting the occurrence of the flame merging phenomenon and reducing significantly the quadratic mean of the tube temperature profile.

A hot-press device includes: a heating furnace; a pair of punches which includes an upper punch and a lower punch provided in the heating furnace and vertically facing each other; a lower press ram which is connected to a lower surface of the lower punch; an upper press ram which is connected to an upper surface of the upper punch; and a pressing device which is connected to any one or both of the lower press ram and the upper press ram and presses the punch so that the pair of punches are close to each other, in which the lower press ram and/or the upper press ram includes a plurality of individual press rams which are disposed at intervals, each individual press ram having one end coupled to the pair of punches.