A method and apparatus for improving film growth uniformity on a semiconductor substrate. The film growth uniformity is improved by adjusting the amount of power provided to the substrate by spot heaters as the substrate is rotated. Therefore, the amount of power provided to the substrate by the spot heaters changes as the portion of the substrate being heated by spot heater changes. The change in power provided by the spot heater is dependent on a temperature correction factor applied by the controller.

A functionally graded firing setter that includes a substrate layer of cubic oxide; a top layer of unstabilized zirconium dioxide/hafnium dioxide; and a continuous transitional gradient layer disposed between the substrate layer and the top layer. The continuous transitional gradient layer includes cubic oxide stabilized zirconium dioxide/hafnium dioxide. The cubic oxide can be calcium oxide (CaO) or magnesium oxide (MgO).

A functionally graded firing setter that includes a substrate layer of cubic oxide; a top layer of unstabilized zirconium dioxide/hafnium dioxide; and a continuous transitional gradient layer disposed between the substrate layer and the top layer. The continuous transitional gradient layer includes cubic oxide stabilized zirconium dioxide/hafnium dioxide. The cubic oxide can be calcium oxide (CaO) or magnesium oxide (MgO).

A substrate processing apparatus includes a bake chamber, a chamber door that opens and closes an opening of the bake chamber, a first support plate in the bake chamber, a first partition wall, which partitions a space provided on the first support plate into first heat treatment spaces spaced apart from each other in a first horizontal direction, and extends in a second horizontal direction and a vertical direction, first heat treatment modules arranged in the first heat treatment spaces, a first exhaust duct extending in the first horizontal direction across the first heat treatment spaces, a first sealing bracket coupled to the first exhaust duct, a first horizontal packing configured to seal a gap between the first sealing bracket and the chamber door, and a first vertical packing configured to seal a gap between the first partition wall and the chamber door.

The present invention describes an improved process for the commercial scale production of high-quality catalyst materials. These improved processes allow for production of catalysts that have very consistent batch to batch property and performance variations. In addition these improved processes allow for minimal production losses (by dramatically reducing the production of fines or small materials as part of the production process). The improved process involves multiple steps and uses calcining ovens that allow for precisely control temperature increases where the catalyst is homogenously heated. The calcining gas is released into a separate heating chamber, which contains the recirculation fan and the heat source. Catalysts that may be produced using this improved process include but are not limited to catalysts that promote CO hydrogenation, reforming catalysts, Fischer Tropsch Catalysts, Greyrock GreyCat™ catalysts, catalysts that homologate methanol, catalysts that promote hydrogenation of carbon compounds, and other catalysts used in industry.

A refractory article including a body having central opening extending through at least a portion of the body, the central opening having a receiving surface having a convex curvature. In an embodiment, the body can include a coupling protrusion extending from a portion of an upper surface of the body and a coupling depression on a portion of a bottom surface of the body.

According to certain aspects, a wrapped green body carrier for a green body includes side supports and moveable supports mounted to the side supports. Each of the moveable supports includes an inner end configured to move relative to the side supports. The green body carrier includes a flexible sheet attached to and suspended from each inner end of the moveable supports. The inner ends of the moveable supports are configured to move inward to wrap the flexible sheet around at least a portion of the green body (e.g., more than 180°). Accordingly, the wrapped green body carrier supports a large circumference of the green body and accommodates large deviations in shape and/or diameter. In certain embodiments, the flexible sheet includes radiation coupling material or radiation blocking material so that wrapping the flexible sheet around the green body improves uniformity during microwave drying.

A heat protective device includes a sheet having a first edge opposite a second edge. The sheet is comprised of a plurality of intertwined links that are movable with respect to each other. A strip is positioned between the first edge of the sheet and the second edge of the sheet. A fastener couples the first edge of the sheet and the second edge of the sheet to the strip to form a tubular shape. The fastener is configured to adjust a diameter of the tubular shape to releasably fix the heat protective device about an object. A method for manufacturing a heat protective device is also disclosed.

A heat protective device includes a sheet having a first edge opposite a second edge. The sheet is comprised of a plurality of intertwined links that are movable with respect to each other. A strip is positioned between the first edge of the sheet and the second edge of the sheet. A fastener couples the first edge of the sheet and the second edge of the sheet to the strip to form a tubular shape. The fastener is configured to adjust a diameter of the tubular shape to releasably fix the heat protective device about an object. A method for manufacturing a heat protective device is also disclosed.

The present invention describes an improved process for the commercial scale production of high-quality catalyst materials. These improved processes allow for production of catalysts that have very consistent batch to batch property and performance variations. In addition these improved processes allow for minimal production losses (by dramatically reducing the production of fines or small materials as part of the production process). The improved process involves multiple steps and uses calcining ovens that allow for precisely control temperature increases where the catalyst is homogenously heated. The calcining gas is released into a separate heating chamber, which contains the recirculation fan and the heat source. Catalysts that may be produced using this improved process include but are not limited to catlaysts that promote CO hydrogenation, reforming catalysts, Fischer Tropsch Catalysts, Greyrock GreyCat™ catalysts, catalysts that homologate methanol, catalysts that promote hydrogenation of carbon compounds, and other catalysts used in industry.