A temperature-controllable process chamber configured to process substrates may include one or more vertical walls at least partially defining a chamber portion of the process chamber. Multiple zones may be located about a periphery of the one or more vertical walls and multiple temperature control devices are thermally coupled to the periphery of the one or more vertical walls in each of the multiple zones. A controller coupled to the temperature control devices may be configured to individually control temperatures of the multiple temperature control devices to obtain substantial temperature uniformity across a substrate located in the chamber portion. Other systems and methods of manufacturing substrates are disclosed.

A process chamber system adapted for both vacuum process steps and steps at pressures higher than atmospheric pressure. The chamber door may utilize a double door seal which allows for high vacuum in the gap between the seals such that the sealing force provided by the high vacuum in the seal gap is higher than the opposing forces due to the pressure inside the chamber and the weight of the components.

A sample heating device includes: a rail-shaped disposal rail extending in one direction in a horizontal plane so that sample boats after heating are arranged and placed in a straight line; a disposal tray that houses the sample boat pushed-out from one end of the disposal rail; a sample boat conveying portion that places the sample boat after the heating at a predetermined placing position on the disposal rail; and a sample boat push-out portion that is positioned closer to the other end side of the disposal rail than the placing position when the sample boat is placed on the disposal rail and that is displaced toward the one end side of the disposal rail after the sample boat is placed at the placing position to slide the sample boats on the disposal rail toward the one end side.

A sample heating device includes: a rail-shaped disposal rail extending in one direction in a horizontal plane so that sample boats after heating are arranged and placed in a straight line; a disposal tray that houses the sample boat pushed-out from one end of the disposal rail; a sample boat conveying portion that places the sample boat after the heating at a predetermined placing position on the disposal rail; and a sample boat push-out portion that is positioned closer to the other end side of the disposal rail than the placing position when the sample boat is placed on the disposal rail and that is displaced toward the one end side of the disposal rail after the sample boat is placed at the placing position to slide the sample boats on the disposal rail toward the one end side.

The present invention improves the strength of the bottom (net) of the jig and makes it more difficult and unlikely for deviation of the mesh to occur. A workpiece is loaded on the net (2) of the heat treat furnace jig (hereinafter, heat treatment furnace jig). In the net (2), a first strand (10), a second strand (20) and a third strand (30) are in contact at a contact point (X1). Near the contact point (X1), the second strand (20) overlaps the first strand (10) from above and the third strand (30) overlaps the first strand (10) from below. As a result, the first strand (10) is held between the second strand (20) and the third strand (30) in the up/down directions.

In various embodiments, apparatuses for receiving and supporting one or more components during processing thereof at process temperatures greater than approximately 1000 C. feature refractory metal shelves separated by refractory metal support posts.

A processing apparatus includes: a plurality of process modules concatenated with one another; and a loader module configured to receive a carrier accommodating a plurality of substrates to be processed by the plurality of process modules, wherein each of the plurality of process modules includes: a heat treatment unit including a processing container configured to accommodate the plurality of substrates and perform a heat treatment on the plurality of substrates; and a gas supply unit disposed on one side surface of the heat treatment unit and configured to supply a gas into the processing container.

A kiln car assembly for a firing kiln having a plurality of upper burners includes a kiln car with an uppermost plurality of ceramic green bodies, a plurality of vertical members, and a horizontal supporting plate for supporting the ceramic green bodies during a firing process in the kiln. Further, the kiln car assembly includes a covering table having a tabletop located between the uppermost plurality of ceramic green bodies and the upper burners, and a plurality of legs positioned on the horizontal supporting plate.

A refractory article can include a socket including a cavity that is configured to receive a post, a particulate material, and a binder. The binder is configured to bond the post to the socket. The refractory article can include a sleeve coupled to the socket and configured to bond the post to the socket. In an embodiment, the sleeve can bond to the binder. In another embodiment, a collar can be placed between the sleeve and the binder. The collar can be configured to bond the post to the socket. A method of forming a refractory article can include disposing a particulate material within a cavity of a socket and placing a binder material overlying the particulate material.

A method for producing a fiber-reinforced resin molded body, including heating a fiber-reinforced resin molded body precursor containing thermoplastic resin as matrix resin to soften it and molding it in a molding die, where temperature unevenness between the inside and surface of the fiber-reinforced resin molded body precursor can be reduced. The method includes a first step of storing a fiber-reinforced resin molded body precursor containing thermoplastic resin as the matrix resin and containing conductive fibrous materials therein into a heating furnace with heating apparatuses while holding the precursor using a pair of holding tools, which also function as electrodes, and then actuating the heating apparatuses while supplying current to the precursor from the electrodes, thereby softening the precursor; and a second step of transferring the softened precursor to a molding die using the holding tools, and molding a fiber-reinforced resin molded body in the molding die.