Patent classifications
G01B5/00
POSITION MEASURING DEVICE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
A position measuring device and a position measuring method for accurately measuring a position of a movable member using a plurality of linear scales are provided. The position measuring device comprises a first linear scale elongated in a first direction, a second linear scale elongated in the first direction and separated from the first linear scale, and a head structure including a first scale head and a second scale head that are spaced apart from each other, wherein the head structure reads the first linear scale or the second linear scale while moving in the first direction, wherein the first scale head and the second scale head are activated or deactivated opposite to each other.
Three-dimensional measuring system, and three-dimensional measuring method
The three-dimensional measuring method includes: a conveying step of conveying a workpiece to be measured by a robot arm configured to change an attitude of the workpiece; a measuring step of performing three-dimensional measurement on the workpiece by a probe configured to be movable relative to the surface plate in a state in which the workpiece is held by the robot arm; a relative-position change detecting step of detecting a change in a relative position between the surface plate and the robot arm; and a vibration correcting step of correcting a result of the measurement performed on the workpiece in the measuring step based on a result of detection performed in the relative-position change detecting step.
XY macro-micro motion stage and control method thereof based on end feedback
An XY macro-micro motion stage and a control method thereof based on end feedback. The XY macro-micro motion stage includes a fine-adjusting assembly, a macro-driving assembly and an XY position detecting device. The macro-driving assembly includes an X-direction macro-driving unit, a Y-direction macro-driving unit, an X-direction mounting plate and a Y-direction mounting plate. The XY position detecting device is configured to obtain its position on the X axis and Y axis.
Apparatus and method for correcting vehicle member
An apparatus and a method for correcting a vehicle member, by which twisting or deflection of a vehicle member including a side member of the vehicle, may be corrected, may be disclosed, wherein the apparatus for correcting a vehicle member includes a base extending in a lengthwise direction thereof, and a plurality of correction units disposed on the base to be movable.
Method, system and apparatus for uniformed surface measurement
A system and a method for uniformed surface measurement are provided, in which a sensor is provided to perform measurements on a carrier in a polishing machine, and a measuring trajectory of the sensor on the carrier is adjusted by controlling the pivoting of a sensor carrier carrying the sensor and the rotation of a rotating platform in the polishing machine in order to achieve uniformed surface measurements of the carrier and real-time constructions of the surface topography. This allows the polishing state of the carrier to be monitored in real time, thereby improving the efficiency of the polishing process. A sensing apparatus for uniformed surface measurement is also provided.
COORDINATE POSITIONING MACHINE
A coordinate positioning machine includes a drive frame and a metrology frame. The drive frame includes a drive arrangement for moving a structure around a working volume of the machine. The metrology frame includes a metrology arrangement for measuring the position of the structure within the working volume. The metrology arrangement is a hexapod metrology arrangement and the drive arrangement is a non-hexapod drive arrangement. The metrology frame has a coefficient of thermal expansion that is lower than that of the drive frame. The drive frame is coupled to the metrology frame via a coupling arrangement which prevents at least some distortion associated with any extra thermal expansion and contraction of the drive frame from being transferred to the metrology frame. The drive arrangement moves the structure around the working volume, and the metrology arrangement measures the position of the structure within the working volume.
Method for creating a measurement protocol and computer for performing the same
A method for creating a measurement protocol in a computer, such as the measurement computer of a coordinate-measuring machine or a computer remote therefrom, includes: providing data necessary for creating a measurement protocol generated on the basis of a measurement sequence by the coordinate-measuring machine; providing specification data specifying predefined conditions under which a measurement sequence should be performed and/or specifying predefined conditions under which examination features should be evaluated; checking the data necessary for creating a measurement protocol as to whether the predefined conditions under which the entire measurement sequence should be performed were met and/or as to whether the predefined conditions under which individual examination features to be examined should be evaluated were met; and, creating a measurement protocol in the form of an electronic document, in which compliance and/or non-compliance with the conditions in accordance with the specification data is documented in the measurement protocol.
Testing device for material wear of cycloidal gear and needle bearing of RV reducer
The invention relates to a testing device for material wear of cycloidal gear and needle bearing of RV reducer, comprising: an upper cover (1), a lower cover (2), two sliding shafts (3 and 3′), two connecting shafts (4 and 4′), a driven shaft component (5), two copper sleeves (6 and 6′), two nuts (7 and 7′), two disc springs (8 and 8′), an eccentric shaft component (9), a needle bearing (10), two planetary gears (11 and 11′), two cycloidal gears (12 and 12′), and a motor assembly (13). The device can be installed on various industrial platforms. The motor drives the planetary gear to rotate, and then drives the eccentric shaft to rotate. The first bearing hole of the cycloidal gear fits with the needle bearing and forms a revolute pair with the eccentric shaft. Owning to the eccentric shaft, the cycloidal gears (12 and 12′) are driven to swing. The other bearing hole fits with the sliding shaft (3 and 3′) and the connecting shaft (4 and 4′) to form a loaded rolling friction pair. Then the cycloidal gear drives the sliding shaft to perform reciprocating movement along the track of cavity. The connecting shaft (4 and 4′) and the sliding shaft (3 and 3′) exert the load on the cycloidal gear (12 and 12′) and needle bearing (10) by compressing the disc springs via the nuts. After a specified time of operation, measure the diameter of bearing holes of cycloidal gear and the outer diameter of needle bearing, then evaluate the material wear of the two components. It provides reliable testing data for the selection of material and the determination of heat treatment process of the cycloidal gear and needle bearing. The invention solves the difficult problem for measuring the material wear of cycloidal gear and needle bearing, which are the key components of RV reducer.
Sensor mounting structure and sensor adaptor
The sensor adaptor includes a case body of which a front end is closed and a rear end is open, a cap body being engageable with the rear end of the case body, a seal member interposed between the case body and the cap body, and a fixing portion configured to fix the case body to the mounting portion. A part of the sensor is inserted into an accommodation space of the case body, and the remaining portion of the sensor is drawn out to the outside via an opening of the cap body. The seal member is disposed on a rear end side of the case body to surround the sensor. The seal member is brought into close contact with the case body and the sensor. Accordingly, a gap between the part of the sensor and the case body is sealed from an external space by the seal member.
METHODS AND APPARATUS FOR ESTIMATING MATERIAL SHEET SHAPE
Methods and apparatus provide for obtaining a gravity free shape, and intrinsic shape, and a thermal strain of a glass sheet and using same to improve glass manufacturing techniques.