A device for measuring horological shakes, including a structure carrying an articulated mechanism with a compliant mechanism having a linear force/stroke characteristic connecting a first fixed element to a second element capable of moving linearly under the effect of an actuator manoeuvring same in a contactless manner in both directions, and a position sensor determining the position of the second element in a direction, and a load sensor determining the variation in the axial pushing or pulling load of the second element carrying a gripper clamping a mobile component, and/or the variation in the gradient of this load, generating a signal for triggering the position measurement during each sudden change in gradient of the load in each direction of running, to determine the shake of the mobile component, by comparing the positions measured during the sudden changes in gradient during the outward and return strokes.

A substrate processing system includes a substrate processing apparatus configured to process a substrate, a substrate transfer mechanism including a substrate holder configured to hold the substrate, an imaging device provided in the substrate transfer mechanism and configured to image a monitoring target member inside the substrate processing apparatus, and a controller. The controller is configured to cause the imaging device to image multiple portions of the monitoring target member, including a central portion facing a center of the substrate during processing and a peripheral edge portion facing a peripheral edge side of the substrate during the processing, by moving the substrate holder, and calculate, for each of the multiple portions of the monitoring target member, a physical amount indicating a state of the corresponding portion based on an imaging result.

A substrate processing system includes a substrate processing apparatus configured to process a substrate, a substrate transfer mechanism including a substrate holder configured to hold the substrate, an imaging device provided in the substrate transfer mechanism and configured to image a monitoring target member inside the substrate processing apparatus, and a controller. The controller is configured to cause the imaging device to image multiple portions of the monitoring target member, including a central portion facing a center of the substrate during processing and a peripheral edge portion facing a peripheral edge side of the substrate during the processing, by moving the substrate holder, and calculate, for each of the multiple portions of the monitoring target member, a physical amount indicating a state of the corresponding portion based on an imaging result.

A characterization device, system, and method for characterizing reflective elements from the light beams reflected in it. The device has two variable-gain detectors on a common structure, which can be portable or fixed, and for capturing light beams reflected by a reflective element, and from at least one processor characterizing the quality of the reflected light beams and evaluating the quality of the reflective element from its reflective capacity. Each detector has a lens for increasing the signal-to-noise ratio of the reflected beam or beams, a light sensor on which the beam or beams captured by the lens are focused, an automatic gain selection system associated with the optical sensor, and a data communication device associated with the device itself. A characterization system and a characterization method for characterizing reflective elements from the quality of the light beams reflected in at least one reflective element or heliostat.

A characterization device, system, and method for characterizing reflective elements from the light beams reflected in it. The device has two variable-gain detectors on a common structure, which can be portable or fixed, and for capturing light beams reflected by a reflective element, and from at least one processor characterizing the quality of the reflected light beams and evaluating the quality of the reflective element from its reflective capacity. Each detector has a lens for increasing the signal-to-noise ratio of the reflected beam or beams, a light sensor on which the beam or beams captured by the lens are focused, an automatic gain selection system associated with the optical sensor, and a data communication device associated with the device itself. A characterization system and a characterization method for characterizing reflective elements from the quality of the light beams reflected in at least one reflective element or heliostat.

Methods and systems for calculating a reflectance value of a reflective coating on a curved surface of an optical element include calculating the reflectance value by taking a series of photon count measurements of an extended radiation source over a range of values of emitted radiation reflected from the curved surface into a detector. A combination of the measurements and a known value of accepted or conforming reflectance for the reflective coating is used to calculate the reflectance value of the reflective coating on the curved surface.

A light sensing device, according to an embodiment, for sensing light emitted from a light source, and reflected or scattered from an object comprises: a light transmitting member; and a light sensing unit disposed on the light transmitting member, wherein the light sensing unit comprises: a light transmitting region; a first electrode layer; a semiconductor layer; and a second electrode layer, wherein the semiconductor layer comprises: a first semiconductor layer disposed around the light-transmitting region; and a second semiconductor layer disposed outside the first semiconductor layer.

A device for measuring horological shakes, including a structure carrying an articulated mechanism with a compliant mechanism having a linear force/stroke characteristic connecting a first fixed element to a second element capable of moving linearly under the effect of an actuator manoeuvring same in a contactless manner in both directions, and a position sensor determining the position of the second element in a direction, and a load sensor determining the variation in the axial pushing or pulling load of the second element carrying a gripper clamping a mobile component, and/or the variation in the gradient of this load, generating a signal for triggering the position measurement during each sudden change in gradient of the load in each direction of running, to determine the shake of the mobile component, by comparing the positions measured during the sudden changes in gradient during the outward and return strokes.

A method and sensor system for monitoring in time a geometric property of a gasket (32, 34) that sealingly interconnects two structural members (20, 21) of a subterraneous or immersed tunnel (10). The system includes a sensor (42) for measuring position indications for surface portions (48) of the gasket relative to a reference (26, 27, 47) associated with one or both structural members, and a processor (44) that is coupled with the sensor to receive the position indications. The processor is configured to derive indications of displacement (ΔY) for each of the gasket surface portions based on the measured indications of position, to compare the indications of displacement for each of the gasket surface portions with at least one threshold value (Ty), and to generate a warning message for an operator if at least one of the indications of displacement transgresses the at least one threshold value.

The present disclosure relates to a detector system for imaging an optical signal received by a graded index (GRIN) optical element to account for known variations in a graded index distribution of the GRIN optical element. The detector system incorporates a plurality of optical detector elements configured to receive optical rays received by the GRIN optical element at specific locations on a plane of the GRIN optical element. Ray tracing software is configured to receive and map the optical rays to a plurality of additional specific locations on the plane based on the known variations in the graded index distribution of the GRIN optical element. A processor uses algorithms for diagonalization of a linear system matrix to determine information on both an intensity and an angle of the received optical rays at each one of the plurality of specific locations on the plane.