A method of inspecting flatness of substrate is provided and includes providing a substrate. N first inspecting points are selected from the surface of the substrate along a first straight line, where the coordinate of the i-th first inspecting point is (X.sub.i,Y.sub.i,Z.sub.i). By using a formula “D=Σ.sub.i=1.sup.N−1√{square root over ((X.sub.i+1−X.sub.i).sup.2+(Y.sub.i+1−Y.sub.i).sup.2+(Z.sub.i+1−Z.sub.i).sup.2)}”, a first measurement length D is calculated. By using a formula “F=(D−S)/S”, a first flatness index F is calculated. S is the horizontal distance between 1.sup.st first inspecting point and N-th first inspecting point. When the first flatness index F is larger than a first threshold, the substrate is determined to be unqualified.

An overhead buffer double-entry detection system, which includes an overhead hoist transport, a first sensing unit for scanning and generating detection data of a horizontal range, a driving device for moving the first sensing unit in a vertical range, a controlling unit, and an overhead hoist transport controlling system for sending a detection instruction and a driving instruction to the controlling unit when the overhead hoist transport moves to a corresponding overhead buffer position, whereby the controlling unit bases on the driving instruction to control the driving device to move the first sensing unit in a vertical range, bases on the detection instruction to control the first sensing unit to scan and generate detection data of each horizontal range within the overhead buffer during movement process, and bases on the detection data of each horizontal range within the overhead buffer to judge whether there is obstacle in the overhead buffer.

A system and method for measuring three-dimensional (3D) coordinate values of an environment is provided. The system includes a movable base unit a first scanner and a second scanner. One or more processors performing a method that includes causing the first scanner to determine first plurality of coordinate values in a first frame of reference based on an emitted first beam of light and a received first reflected light. The second scanner determines a second plurality of 3D coordinate values in a second frame of reference as the base unit is moved from a first position to a second position. The determining of the first coordinate values and the second plurality of 3D coordinate values being performed simultaneously. The second plurality of 3D coordinate values are registered in a common frame of reference based on the first plurality of coordinate values.

A sample mapping system includes a sample chuck including absolute reference marks, an imaging metrology tool to capture sets of alignment images at locations associated with sample marks on a sample on the sample chuck, and a controller. A particular set of alignment images at a particular location may include at least one alignment image associated with a particular sample mark and at least one alignment image associated with a particular portion of the absolute reference marks within a field of view of the imaging metrology tool visible through the sample. The controller may determine absolute coordinates of the sample marks based on the sets of alignment images. Determining the absolute coordinates of the particular sample mark may include determining the absolute coordinates of the particular sample mark based on a position of the particular sample mark relative to the particular portion of the absolute reference marks.

A backlight optical alignment system comprises an illumination system having an illumination pupil and an illuminator configured to generate an output, wherein the illumination system includes a rotationally symmetric illumination distribution having an illumination axis, an imaging system having an imaging sensor comprising at least one detector element, an imaging pupil, and an acceptance cone in object space of the imaging system having an optical axis, wherein at least a portion of the imaging pupil is filled by the illumination system output when a portion of the illumination distribution overlaps with the acceptance cone, and a first substrate disposed in object space between the illumination system and the imaging system, wherein the solid substrate is adjustable to generate a change in signal intensity from the imaging sensor when the illumination axis of the illumination distribution is misaligned with the optical axis of the acceptance cone.

The present disclosure relates to systems and methods for object measurement. The systems may obtain an image of an object with a light bar acquired by an imaging device. The light bar may be formed by an optical sensor irradiating the object with a light beam. The systems may obtain a measurement model. The measurement model may be configured to simulate a curved surface formed by the light beam. The systems may determine position information of at least a portion of the object based at least in part on the image of the object with the light bar and the measurement model.

A locating system for determining a current position in an elevator shaft of an elevator system extending in a main extension direction includes a first distance sensor by which a first distance and a second distance, which second distance is perpendicular to the first distance, from a first reference element can be measured, as well as a tilt sensor by which a rotation about a horizontal first axis and a horizontal second axis perpendicular to the first axis can be measured, and a measuring system by which a position of the locating system can be determined in the main extension direction of the elevator shaft.

A parameter adjustment device (500) adjusts a parameter relating to control of laser light emitted from a measurement sensor (210) onto an object. A parameter calculator (520) calculates the parameter by applying, to a trained model generated through machine learning using training data sets each including waveform data of an amount of light received by the measurement sensor (210) and data indicating the parameter used to acquire the waveform data, waveform data newly acquired in a new state. The parameter calculated by the parameter calculator (520) enables measurement of the object using the measurement sensor (210) in the new state. A parameter outputter (530) outputs data indicating the parameter calculated by the parameter calculator (520).

A computing device includes: a tracking sensor including a camera; a controller connected with the tracking sensor, the controller configured to: control the tracking sensor to track successive poses of the computing device in a frame of reference; detecting a plurality of dimensioning events associated with an object; in response to detecting each of the dimensioning events, generate a respective position in the frame of reference based on a current one of the poses; generate, based on the positions, an object boundary in the frame of reference; and dimension the object based on the generated object boundary.

A computing device includes: a tracking sensor including a camera; a controller connected with the tracking sensor, the controller configured to: control the tracking sensor to track successive poses of the computing device in a frame of reference; detecting a plurality of dimensioning events associated with an object; in response to detecting each of the dimensioning events, generate a respective position in the frame of reference based on a current one of the poses; generate, based on the positions, an object boundary in the frame of reference; and dimension the object based on the generated object boundary.