Patent classifications
G01B11/00
STAGE DEVICE, AND CHARGED PARTICLE BEAM DEVICE
The present invention provides: a stage device that can suppress bending deformation of a mirror, and that can reduce the positioning error of a stage by reducing the measurement error of the position of the stage; and a charged particle beam device comprising this stage device. The stage device according to the present invention comprises: a table (105) on which a sample (106) is placed; a bar mirror (111) installed on the table (105); a laser interferometer (104) that irradiates the bar mirror (111) with laser light and receives reflected light from the bar mirror (111), thereby measuring the position of the table (105); a drive mechanism (103) that moves the table (105); and a plurality of elastic members (203) installed between the bar mirror (111) and the table (105)
Three-dimensional target with a dual structure, device and method for optical measurement with such a target
A three-dimensional target capable of serving as a positioning reference, including, on a useful face, a first structure and a second structure. The first structure defines a planar reference face divided up between at least a first portion whose surface is reflective according to a diffuse reflection, and a second portion whose surface is reflective according to a specular reflection, the second portion being divided up according to a series of localized zones positioned in the first portion. The second structure has an inclined face relative to the planar reference face. Applicable to three-dimensional optical measurement of the relative position between a first object and a second object.
Self-leveling system for rotating laser systems
A self-leveling laser transmitter is provided. The laser transmitter comprises a rotation head and an accelerometer mounted on the rotation head. An acceleration signal is received from the accelerometer and one or more tilt adjustment signals for adjusting a tilt of the rotation head to a leveled orientation are generated based on the acceleration signal. One or more actuators adjust the tilt of the rotation head based on the one or more tilt adjustment signals.
System and method for measuring three-dimensional coordinates
A three-dimensional (3D) measurement system, a method of measuring 3D coordinates, and a method of generating dense 3D data is provided. The method of measuring 3D coordinates includes using a first 3D measurement device and a second 3D measurement device in a cooperative manner is provided. The method includes acquiring a first set of 3D coordinates with the first 3D measurement device. The first set of 3D coordinates are transferred to the second 3D measurement device. A second set of 3D coordinates is acquired with the second 3D measurement device. The second set of 3D coordinates are registered to the first set of 3D coordinates in real-time while the second 3D measurement device is acquiring the second set of 3D coordinates.
System and method of defining a path and scanning an environment
A system and method for measuring three-dimensional (3D) coordinate values of an environment is provided. The method including moving a 2D scanner through the environment. A 2D map of the environment is generated using the 2D scanner. A path is defined through the environment using the 2D scanner. 3D scan locations along the path are defined using the 2D scanner. The 2D scanner is operably coupled to a mobile base unit. The mobile base unit is moved along the path based at least in part on the 2D map and the defined path. 3D coordinate values are measured at the 3D scan locations with a 3D scanner, the 3D scanner being coupled to the mobile base unit.
IMAGING LENS CHECK AND ACTIVE ALIGNMENT METHOD TO MAINTAIN CONSISTENT REAR FOCUSING DISTANCE FOR AN AUTOFOCUS LENS
An optical assembly for an autofocus imaging system for capturing at least one image of an object appearing in an imaging field of view (FOV) is provided. The optical assembly includes a front aperture along an optical axis and a front lens group along the optical axis that receives light from the object of interest. The position of the front lens group is adjustable to change a focal distance of the optical assembly. The optical assembly further includes an actuator physically coupled to the front lens group that adjusts the position of the front lens. A rear lens group is disposed along the optical axis to receive the light from the front lens group, and an imaging sensor is disposed at a back focal distance of the rear lens group, to detect the light.
METHOD AND SYSTEM FOR OPTICALLY DETECTING THE POSE OF AT LEAST ONE INSTRUMENT IN AN OPERATING THEATER
A system and a method for optically detecting a pose of at least one instrument in an operating theater are provided. The method includes determining pose information of the at least one instrument with an optical pose detection device of a surgical microscope or with a microscope-external optical pose detection device, determining whether the pose information is biunique or whether a biunique determination of the pose of the instrument is possible, and evaluating additional information for determining additional pose information, at least for a case where no biunique determination of the pose is possible.
MEASUREMENT RELAY DEVICE AND ASSOCIATED METHODS
A measurement relay device to receive measurements from a measurement device and transmit data relating to the measurement via a network is provided. The measurement relay device includes a housing, a display, a control unit, and a communication unit. The display may be carried by the housing. The control unit may be carried by the housing and may be in communication with the display. The communication unit may be carried by the housing and may be in communication with the control unit and the network. The control unit may be configured to receive data relating to the measurements from the measurement device to define measurement data. The measurement data may be displayed on the display. The measurement data may be transmittable via the network to be incorporated into a computer implemented system that may require measurement data.
Information processing apparatus, information processing method and program
A likelihood calculation unit calculates, from information obtained by each of movement detection methods including a movement detection method for detecting a movement amount of an object using an image and one or more different movement detection methods, movement amount likelihoods with regard to which the movement amount of an object is each of a plurality of movement amounts. An integration unit integrates the movement amount likelihoods according to the plurality of movement detection methods to determine integration likelihoods individually of the plurality of movement amounts. The present technology can be applied, for example, to a case in which a movement amount of an object is determined and a driver who drives an automobile is supported using the movement amount.
Information processing apparatus, information processing method and program
A likelihood calculation unit calculates, from information obtained by each of movement detection methods including a movement detection method for detecting a movement amount of an object using an image and one or more different movement detection methods, movement amount likelihoods with regard to which the movement amount of an object is each of a plurality of movement amounts. An integration unit integrates the movement amount likelihoods according to the plurality of movement detection methods to determine integration likelihoods individually of the plurality of movement amounts. The present technology can be applied, for example, to a case in which a movement amount of an object is determined and a driver who drives an automobile is supported using the movement amount.