The objective of the present invention is to provide a height measurement device capable of highly accurate measurement in the depth direction of a structure on a sample. To achieve this objective, proposed are a charged particle beam device and a height measurement device that is provided with a calculation device for determining the size of a structure on a sample on the basis of a detection signal obtained by irradiating the sample with a charged particle beam, wherein the calculation device calculates the distance from a first charged particle beam irradiation mark formed at a first height on the sample and a second charged particle beam irradiation mark formed at a second height on the sample and on the basis of this distance and the charged particle beam irradiation angle when the first charged particle beam irradiation mark and second charged particle beam irradiation mark were formed, calculates the distance between the first height and the second height.

This method includes: generating a backscattered-electron image of a multilayered structure (400) including a plurality of patterns formed in a plurality of layers by a scanning electron microscope (50); classifying a plurality of regions of a virtual multilayered structure (300) including a CAD pattern created from design data of the plurality of patterns into a plurality of groups according to CAD pattern arrays in a depth direction of the virtual multilayered structure (1300); performing a matching between at least one of the plurality of patterns on the backscattered-electron image and a corresponding CAD pattern; calculating a brightness index value of a region on the backscattered-electron image corresponding to a region belonging to each group; and determining that there is a pattern defect in the region on the backscattered-electron image when the brightness index value is out of a standard range.

Proposed are an image analyzing apparatus and program in which the orientation of fiber bundles can be easily analyzed from a three-dimensional image of CMC. Provided is an image analyzing apparatus for analyzing an orientation of a fiber bundle from a three-dimensional image of a fiber-reinforced composite material, comprising an input unit which inputs the three-dimensional image, a binarization processing unit which binarizes the input three-dimensional image and acquires a binary image, an orientation estimation processing unit which estimates each orientation of foreground pixels in the binary image based on an orientation detection filter having a parameter for causing a shape of a detected cross section to have anisotropy, a center extraction processing unit which extracts center pixels showing a center of the fiber bundle from a foreground pixel group, in which the orientation thereof was estimated, based on the orientation detection filter, a fiber bundle connection processing unit which deems center pixels having a same or similar orientation to be a same fiber bundle with regard to the extracted center pixel group, and connects the center pixels indicating the same fiber bundle, and a meander determination processing unit which calculates a meandering amount of the connected center pixel group indicating the same fiber bundle.

Proposed are an image analyzing apparatus and program in which the orientation of fiber bundles can be easily analyzed from a three-dimensional image of CMC. Provided is an image analyzing apparatus for analyzing an orientation of a fiber bundle from a three-dimensional image of a fiber-reinforced composite material, comprising an input unit which inputs the three-dimensional image, a binarization processing unit which binarizes the input three-dimensional image and acquires a binary image, an orientation estimation processing unit which estimates each orientation of foreground pixels in the binary image based on an orientation detection filter having a parameter for causing a shape of a detected cross section to have anisotropy, a center extraction processing unit which extracts center pixels showing a center of the fiber bundle from a foreground pixel group, in which the orientation thereof was estimated, based on the orientation detection filter, a fiber bundle connection processing unit which deems center pixels having a same or similar orientation to be a same fiber bundle with regard to the extracted center pixel group, and connects the center pixels indicating the same fiber bundle, and a meander determination processing unit which calculates a meandering amount of the connected center pixel group indicating the same fiber bundle.

A method for the non-destructive testing of the volume of a test object, during the course of which a volume raw image of the test object is recorded by a suitable non-destructive imaging testing method. Then, those regions of the volume raw image are identified that are not to be attributed to the test object material. It is checked whether an identified region is completely embedded in regions that are to be associated with the test object material. If necessary, such a region is assimilated to those regions that are to be associated with the test object material, forming a filled volume raw image. Finally, a difference is generated between the volume raw image and the filled volume raw image, forming a first flaw image.

A method for the non-destructive testing of the volume of a test object, during the course of which a volume raw image of the test object is recorded by a suitable non-destructive imaging testing method. Then, those regions of the volume raw image are identified that are not to be attributed to the test object material. It is checked whether an identified region is completely embedded in regions that are to be associated with the test object material. If necessary, such a region is assimilated to those regions that are to be associated with the test object material, forming a filled volume raw image. Finally, a difference is generated between the volume raw image and the filled volume raw image, forming a first flaw image.

Described is compressing a digital representation of an object, wherein the object representation comprises image information items for the object that each specify a value of a measurand for the object at a defined position of the object. Compressing includes determining the object representation, determining a distance field from the image information items of the object representation that comprises a plurality of data points in a grid, the distance field assigns at least one distance value to each of the data points that in each case indicate the shortest distance of the data point from a closest material boundary of the object, determining a near region around a material boundary of the object, determining a sub-set of data points of the distance field which lie outside the near region, deleting the sub-set of data points, and saving the distance field in the form of a compressed object representation.

The present disclosure is generally directed towards calculating a remaining length of a cable on a cable reel. Generally, a first distance between a top edge of a first flange of the cable reel and a top portion of the cable remaining on the cable reel is received at a processor. A winding characterization indicating a configuration of the cable wound on the cable reel is also received at the processor. Dimensions of the cable reel are also received at the processor and include: a diameter of the first flange, a cable reel traverse distance, and a diameter of a drum of the cable reel. The cable reel traverse distance indicates a distance between the first and second flanges of the cable reel. The remaining length of the cable on the cable reel is calculated based on the first distance, the winding characterization, and the dimensions of the cable reel.

A pattern inspection apparatus includes a column to scan a substrate on which a pattern is formed, using multi-beams composed of a plurality of electron beams, a stage to mount the substrate thereon and to be movable, a detector to detect secondary electrons emitted from the substrate because the substrate is irradiated with the multi-beams, and a drive mechanism to move the detector in order to follow movement of the stage.

A pattern inspection apparatus includes a column to scan a substrate on which a pattern is formed, using multi-beams composed of a plurality of electron beams, a stage to mount the substrate thereon and to be movable, a detector to detect secondary electrons emitted from the substrate because the substrate is irradiated with the multi-beams, and a drive mechanism to move the detector in order to follow movement of the stage.