There is provided a method for at least partly determining the orientation of an edge-on x-ray detector with respect to the direction of x-rays from an x-ray source. The method includes obtaining (S1) information from measurements, performed by the x-ray detector, representing the intensity of the x-rays at a minimum of two different relative positions of a phantom in relation to the x-ray detector and the x-ray source, the phantom being situated between the x-ray source and the x-ray detector and designed to embed directional information in the x-ray field when exposed to x-rays. The method also includes determining (S2) at least one parameter associated with the orientation of the x-ray detector with respect to the direction of x-rays based on the obtained information from measurements and a geometrical model of the spatial configuration of the x-ray detector, x-ray source and phantom.

An electron vibrometer includes: an electron source providing a beam of primary electrons; a cantilever including: a receiver portion including: a gradient in thickness, a gradient in mass, atomic number of constituent atoms, or a combination thereof, the cantilever being disposed relative to the electron source such that the receiver portion of the cantilever receives the beam of primary electrons, and produces a plurality of scattered electrons from the receiver portion in response to receipt of the beam of primary electrons; and a charged particle detector that receives the plurality of scattered electrons from the receiver portion, and produces a detector signal comprising an amplitude that varies in relation to the gradient subject to receipt of the primary electrons, and the detector signal providing determination of the displacement of the cantilever.

An electron vibrometer includes: an electron source providing a beam of primary electrons; a cantilever including: a receiver portion including: a gradient in thickness, a gradient in mass, atomic number of constituent atoms, or a combination thereof, the cantilever being disposed relative to the electron source such that the receiver portion of the cantilever receives the beam of primary electrons, and produces a plurality of scattered electrons from the receiver portion in response to receipt of the beam of primary electrons; and a charged particle detector that receives the plurality of scattered electrons from the receiver portion, and produces a detector signal comprising an amplitude that varies in relation to the gradient subject to receipt of the primary electrons, and the detector signal providing determination of the displacement of the cantilever.

The invention relates to a method and an installation for automatically measuring linear dimensions of manufactured objects (2) of a series comprising: the disposition of at least one focal point (Fj) of X-rays, on a same base straight line parallel to the rectilinear trajectory of displacement of the objects and of one or several image sensors (Ci); the acquisition, for each object during its displacement, of a set of one-dimensional images comprising, for a number (NK) of distinct section planes (Pk) containing the base straight line, a number (NP) of said images obtained along at least three different directions of projection (Dijk) in the section plane; for each object, and for each distinct section plane (Pk), the determination, from the images obtained, of a delineation of the object in the considered section plane (Pk).

The invention relates to a method and an installation for automatically measuring linear dimensions of manufactured objects (2) of a series comprising: the disposition of at least one focal point (Fj) of X-rays, on a same base straight line parallel to the rectilinear trajectory of displacement of the objects and of one or several image sensors (Ci); the acquisition, for each object during its displacement, of a set of one-dimensional images comprising, for a number (NK) of distinct section planes (Pk) containing the base straight line, a number (NP) of said images obtained along at least three different directions of projection (Dijk) in the section plane; for each object, and for each distinct section plane (Pk), the determination, from the images obtained, of a delineation of the object in the considered section plane (Pk).

A critical dimension measurement system includes a voltage measurement circuit, a control circuit, and a critical dimension measurement circuit. The voltage measurement circuit may measure potentials of mask patterns of a photomask. The control circuit may include an information storage circuit for storing distribution information on the potentials of the mask patterns, measured by the voltage measurement circuit, and information on layout patterns corresponding to the mask patterns of the photomask. The critical dimension measurement circuit may be operated, by the control circuit, in a first measurement mode and a second measurement mode running for a shorter time than the first measurement mode, and measure critical dimensions of the mask patterns.

A critical dimension measurement system includes a voltage measurement circuit, a control circuit, and a critical dimension measurement circuit. The voltage measurement circuit may measure potentials of mask patterns of a photomask. The control circuit may include an information storage circuit for storing distribution information on the potentials of the mask patterns, measured by the voltage measurement circuit, and information on layout patterns corresponding to the mask patterns of the photomask. The critical dimension measurement circuit may be operated, by the control circuit, in a first measurement mode and a second measurement mode running for a shorter time than the first measurement mode, and measure critical dimensions of the mask patterns.

Provided is a non-destructive method for evaluating the structure of a water-absorbing resin which can be advantageously used for controlling various properties of the water-absorbing resin. This non-destructive method for evaluating the structure of a water-absorbing resin involves non-destructively evaluating the structure of a water-absorbing resin through an X-ray computer tomographic technique, wherein the method comprises a step 1 for installing the water-absorbing resin to be evaluated on a test piece stage of an X-ray computer tomography device, a step 2 for performing X-ray computer tomography on the water-absorbing resin using the X-ray computer tomography device and acquiring tomographic image data of the water-absorbing resin, and a step 3 for analyzing the tomographic image data using image analysis software and obtaining a tomographic image of the water-absorbing resin.

Provided is a non-destructive method for evaluating the structure of a water-absorbing resin which can be advantageously used for controlling various properties of the water-absorbing resin. This non-destructive method for evaluating the structure of a water-absorbing resin involves non-destructively evaluating the structure of a water-absorbing resin through an X-ray computer tomographic technique, wherein the method comprises a step 1 for installing the water-absorbing resin to be evaluated on a test piece stage of an X-ray computer tomography device, a step 2 for performing X-ray computer tomography on the water-absorbing resin using the X-ray computer tomography device and acquiring tomographic image data of the water-absorbing resin, and a step 3 for analyzing the tomographic image data using image analysis software and obtaining a tomographic image of the water-absorbing resin.

The disclosure relates to an object size estimation device and method. According to the disclosure, an object size estimation device comprises a reception unit receiving a reception signal reflected by the object, through the reception antenna, an object length calculation unit calculating a reflection point based on a position frequency of measurements included in the reception signal, calculating a horizontal length of the object based on a distance between a first straight line passing through the calculated reflection point and a measurement and calculating a vertical length of the object based on a distance between a second straight line orthogonal to the first straight line and a measurement, and an object size estimation unit estimating a size of the object formed with the horizontal length and the vertical length.