G01B21/00

Measurement system, substrate processing system, and device manufacturing method
11430684 · 2022-08-30 · ·

A measurement system used in a manufacturing line for micro-devices includes: a plurality of measurement devices in which each device performs measurement processing on a substrate; and a carrying system to perform delivery of a substrate with the plurality of measurement devices. The plurality of measurement devices includes a first measurement device that acquires position information on a plurality of marks formed on a substrate, and a second measurement device that acquires position information on a plurality of marks formed on a substrate. Position information on a plurality of marks formed on a substrate can be acquired under a setting of a first predetermined condition in the first measurement device, and position information on a plurality of marks formed on another substrate can be acquired under a setting of a second predetermined condition different from the first predetermined condition in the second measurement device.

Measurement system, substrate processing system, and device manufacturing method
11430684 · 2022-08-30 · ·

A measurement system used in a manufacturing line for micro-devices includes: a plurality of measurement devices in which each device performs measurement processing on a substrate; and a carrying system to perform delivery of a substrate with the plurality of measurement devices. The plurality of measurement devices includes a first measurement device that acquires position information on a plurality of marks formed on a substrate, and a second measurement device that acquires position information on a plurality of marks formed on a substrate. Position information on a plurality of marks formed on a substrate can be acquired under a setting of a first predetermined condition in the first measurement device, and position information on a plurality of marks formed on another substrate can be acquired under a setting of a second predetermined condition different from the first predetermined condition in the second measurement device.

Method of actively counteracting displacement forces with a probing unit

Embodiments of the invention include a method for compensating a force at a probe element of a probing unit. The probing unit being attached to and moved along a defined moving path with a number of moving points by a coordinate measuring machine for approaching a measuring point at an object. The probing unit comprises an actuator which is arranged and designed in such manner that a force is applicable to the probe element with respect to at least one actuating direction in variable and defined manner, the force depending on an applied actuating signal. Movement information about an expected movement of the probing unit is received, the movement information provides information about an expected displacement behaviour of the probe element relative to the probing unit due to induced forces emerging by moving the probing unit.

Ad-hoc wireless sensor package

Systems, methods, computer-readable storage mediums including computer-readable instructions and/or circuitry for communicating with one or more sensors in an ad-hoc sensor network may implement operations including, but not limited to: receiving one or more wireless signals indicative of a presence of a sensor within a portion of a region to be monitored; storing location data associated with the portion of the region to be monitored; and wirelessly transmitting one or more sensor operation activation signals to one or more sensors according to the location data.

Ad-hoc wireless sensor package

Systems, methods, computer-readable storage mediums including computer-readable instructions and/or circuitry for communicating with one or more sensors in an ad-hoc sensor network may implement operations including, but not limited to: receiving one or more wireless signals indicative of a presence of a sensor within a portion of a region to be monitored; storing location data associated with the portion of the region to be monitored; and wirelessly transmitting one or more sensor operation activation signals to one or more sensors according to the location data.

Laser sensor stimulator

A laser sensor stimulator integrates laser units, an inertial measurement unit, a control unit, and ergonomic, modular design with GPS data feeds into a portable system that can be used to test energy sensors and warning devices and includes a user interface facilitates tracking and acquisition of items of interest by the laser sensor stimulator.

Laser sensor stimulator

A laser sensor stimulator integrates laser units, an inertial measurement unit, a control unit, and ergonomic, modular design with GPS data feeds into a portable system that can be used to test energy sensors and warning devices and includes a user interface facilitates tracking and acquisition of items of interest by the laser sensor stimulator.

Method for locating the position of wheels which are fitted with an electronic unit incorporating means of measuring an operating parameter of said wheel

The invention relates to a method for locating the position of wheels (5-8) of a vehicle (V) comprising, mounted on each wheel, an electronic unit (1-4) incorporating measurement means (9) for measuring a predetermined operating parameter for said wheel, referred to as a location parameter and, assigned to each wheel position and mounted on the vehicle (V), fixed means (13-16) for measuring the location parameter for said wheel. This location method consists, firstly, for each electronic unit (1-4), in comparing the values measured by the mobile measurement means (9) incorporated into said electronic unit with those measured by each of the fixed measurement means (13-16), secondly, for each wheel position, comparing the values measured by the fixed measurement means (13-16) assigned to said wheel position with those measured by each of the mobile measurement means (9), then assigning a wheel position to an electronic unit (1-4) when these correspond with one another.

Method for locating the position of wheels which are fitted with an electronic unit incorporating means of measuring an operating parameter of said wheel

The invention relates to a method for locating the position of wheels (5-8) of a vehicle (V) comprising, mounted on each wheel, an electronic unit (1-4) incorporating measurement means (9) for measuring a predetermined operating parameter for said wheel, referred to as a location parameter and, assigned to each wheel position and mounted on the vehicle (V), fixed means (13-16) for measuring the location parameter for said wheel. This location method consists, firstly, for each electronic unit (1-4), in comparing the values measured by the mobile measurement means (9) incorporated into said electronic unit with those measured by each of the fixed measurement means (13-16), secondly, for each wheel position, comparing the values measured by the fixed measurement means (13-16) assigned to said wheel position with those measured by each of the mobile measurement means (9), then assigning a wheel position to an electronic unit (1-4) when these correspond with one another.

Device and method for automatically normalizing the physiological signals of a living being
09759558 · 2017-09-12 · ·

An example device includes: a data input module configured to receive information about a living being's physiological signals, coordinates, and motion intensity; an activity recognition module configured to calculate, from information received about the living being's motion intensity, a living being's activity; a location recognition module, configured to calculate, from information received about the living being's coordinates, a living being's location; a memory storage configured to store information about the living being's physiological signals and activity in association with the location; a normalization parameters estimator module configured to use a mathematical model to calculate a plurality of normalization parameters for a plurality of detected activities and locations; and a model selector module configured to determine, based on the plurality of normalization parameters and the living being's location, a set of location-specific normalization parameters used to further calculate normalized physiological signals for the living being.